US5877861A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for overlay control system
Assignee: GlobalFoundries Inc
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Filing: 1997-11-14
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Granted: 1999-03-02
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Expires: 2017-11-14
Abstract
Abstract A method for overlay metrology and control. Simultaneous use of between-field overlay metrology to control field term alignment error at all levels and level-to-level metrology to control field term, grid term, and translation alignment errors at all levels is applied.
Inventors
- 👤 Christopher P. Ausschnitt
- 👤 Timothy J. Wiltshire
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 11:20
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
120 words
A method for optimization of overlay error correction using a first exposure tool, a second exposure tool, metrology equipment, and a processor comprising the steps of: a) patterning a first level field layer on a substrate using the first exposure tool; b) patterning a second level field layer overlying the first level field layer using the second exposure tool; c) measuring level-to-level and within-level between-field errors using overlay targets and metrology equipment; d) calculating field term alignment errors from the within-level between-field overlay measurement using the processor; e) calculating correction factors from the field term alignment errors and the level-to-level overlay measurements using the processor; and f) aligning the second level to the first level based on the correction factors.
Claim 2
Independent Claim
120 words
A method for optimization of overlay error correction using a first exposure tool, a second exposure tool, metrology equipment, and a processor comprising the steps of: a) patterning a first level field layer on a substrate using the first exposure tool; b) patterning a second level field layer overlying the first level field layer using the second exposure tool; c) measuring level-to-level and within-level between-field errors using overlay targets and metrology equipment; d) calculating field term alignment errors from the within-level between-field overlay measurement using the processor; e) calculating correction factors from the field term alignment errors and the level-to-level overlay measurements using the processor; and f) aligning the second level to the first level based on the correction factors.
Claim 3
Dependent Claim
39 words
The method as recited in claim 1 wherein the patterning of the first level field layer is at least the N th level patterned on the substrate, the method preventing accumulated alignment errors from exceeding a certain manufacturing tolerance.
Claim 4
Dependent Claim
50 words
The method as recited in claim 1 wherein: N is the number of items per field put down on the first level; M is the number of items per field put down on the second level; N is neither equal to now a common multiple of M and vice versa.
Claim 5
Dependent Claim
25 words
The method as recited in claim 1 wherein the field term alignment error comprises local field rotation, field skew, field translation, and field magnification errors.
Claim 6
Dependent Claim
20 words
The method as recited in claim 1 wherein the level-to-level errors colmprise field term, grid term, and translation alignment errors.
Claim 7
Dependent Claim
21 words
The method as recited in claim 5 wherein the grid term errors comprise grid magnification, grid rotation, and grid skew errors.
Claim 8
Dependent Claim
58 words
The method as recited in claim 1 wherein the first exposure tool is an "A" level field stepper, the second exposure tool is a "B" level field stepper, the first level field layer is an "A" level field layer, the second level field layer is a "B" level field layer, and the method optimizes stepper overlay error correction.
Claim 9
Dependent Claim
39 words
The method as recited in claim 7 wherein the patterning of the "A" level field layer is at least the N th level patterned on the substrate, the method preventing accumulated alignment errors from exceeding a certain manufacturing tolerance.
Claim 10
Dependent Claim
48 words
The method as recited in claim 7 wherein: N is the number of chips per field put down on level A; M is the number of chips per field put down on level B; N is neither equal to now a common multiple of M and vice versa.
Claim 11
Dependent Claim
25 words
The method as recited in claim 7 wherein the field term alignment error comprises local field rotation, field skew, field translation, and field magnification errors.
Claim 12
Dependent Claim
20 words
The method as recited in claim 7 wherein the level-to-level errors comprise field term, grid term, and translation alignment errors.
Claim 13
Dependent Claim
21 words
The method as recited in claim 11 wherein the grid term errors comprise grid magnification, grid rotation, and grid skew errors.
Claim 14
Independent Claim
143 words
A method for optimization of silicon wafer stepper overlay error correction using a first field stepper, a second field stepper, metrology equipment, and a processor comprising the steps of: a) patterning an "A" level field layer on a substrate using the first field stepper; b) pattering a "B" level field layer overlying said "A" level field layer using the "A" level field stepper; c) measuring level-to-level field and within-level between-field errors using overlay targets and metrology equipment; d) calculating field term alignment errors from the within-level butted field overlay measurement using the processor, where the field term alignment error is comprised of the local field rotation, field skew, field translation, and field magnification errors; e) calculating correction factors from the field term alignment errors and the level-to-level overlay measurements using the processor; and f) aligning the field layers based on the correction factors.
Claim 15
Independent Claim
143 words
A method for optimization of silicon wafer stepper overlay error correction using a first field stepper, a second field stepper, metrology equipment, and a processor comprising the steps of: a) patterning an "A" level field layer on a substrate using the first field stepper; b) pattering a "B" level field layer overlying said "A" level field layer using the "A" level field stepper; c) measuring level-to-level field and within-level between-field errors using overlay targets and metrology equipment; d) calculating field term alignment errors from the within-level butted field overlay measurement using the processor, where the field term alignment error is comprised of the local field rotation, field skew, field translation, and field magnification errors; e) calculating correction factors from the field term alignment errors and the level-to-level overlay measurements using the processor; and f) aligning the field layers based on the correction factors.
Claim 16
Dependent Claim
20 words
The method as recited in claim 13 wherein the level-to-level errors comprise field term, grid term, and translation alignment errors.
Claim 17
Dependent Claim
21 words
The method as recited in claim 14 wherein the grid term errors comprise grid magnification, grid rotation, and grid skew errors.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |