US5880846A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for color-coded optical profilometer
Assignee: Yeda Research and Development Co Ltd
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Filing: 1997-08-19
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Granted: 1999-03-09
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Expires: 2017-08-19
Abstract
Abstract A triangulation optical system and method for determining at least one coordinate of a surface of an object, along at least one coordinate axis which is substantially transverse to the surface. The method includes the steps of providing incident light of a substantially wide wavelength bandwidth propagating along the axis. Passing the light through an axially dispersing optics so that the light of different wavelengths is focussed at different locations relative to the axis. The different locations defining a multi-colored measuring area and a distance between extreme locations along the axis defining a depth of measuring range. Further, off-axis imaging of the measuring area, detecting intensity of the image and determining the coordinate of the intersection of the surface with the measuring area.
Inventors
- 👤 Erez Hasman
- 👤 Asher A. Friesem
- 👤 Nir Davidson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:29
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/24; G01B11/25; G01B11/2509; G01B2210/00; G01B2210/50
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
123 words
A triangulation method for determining at least one coordinate of a surface of an object, along at least one coordinate axis which is substantially transverse to said surface, comprising the steps of: (a) providing incident light of a substantially wide wavelength bandwidth propagating alone said axis; (b) passing said incident light through an axially dispersing optics so that the light of different wavelengths is focused at different locations relative to said axis, said different locations defining a multi-colored measuring area and a distance between extreme locations along said axis defining a depth measuring range; (c) off-axis imaging of said measuring area; (d) detecting intensity of the image; and (e) determining thereby the coordinate of the intersection of the surface with said measuring area.
Claim 2
Dependent Claim
123 words
A triangulation method for determining at least one coordinate of a surface of an object, along at least one coordinate axis which is substantially transverse to said surface, comprising the steps of: (a) providing incident light of a substantially wide wavelength bandwidth propagating alone said axis; (b) passing said incident light through an axially dispersing optics so that the light of different wavelengths is focused at different locations relative to said axis, said different locations defining a multi-colored measuring area and a distance between extreme locations along said axis defining a depth measuring range; (c) off-axis imaging of said measuring area; (d) detecting intensity of the image; and (e) determining thereby the coordinate of the intersection of the surface with said measuring area.
Claim 3
Dependent Claim
12 words
A method according to claim 1, used for the 3-dimensional surface topography.
Claim 4
Dependent Claim
77 words
A method according to claim 1, wherein the incident light of different wavelengths is focused at different light stripes lying in different focal planes, said measuring area is in the form of a 2-dimensional light sheet passing through said axis perpendicularly to said focal planes, and the step (e) is performed with respect to the intersection line between the surface of the object and said light sheet, whereby coordinates of a profile of the surface are determined.
Claim 5
Dependent Claim
25 words
A method according to claim 3, wherein the object is scanned by a stripe of light and the steps (b) to (e) are performed stripe-by-stripe.
Claim 6
Dependent Claim
59 words
A method according to claim 4, wherein the light of different wavelengths is focussed at different points located on said axis said measuring area is in the form of a light line on said axis, and the step (e) is performed with respect to the point of the intersection of the surface of the object with said light line.
Claim 7
Dependent Claim
34 words
A method according to claim 1, wherein the object is scanned by a point of light and the steps (b) to (e) are performed at different locations of the surface of the object, point-by-point.
Claim 8
Dependent Claim
80 words
A method according to claim 1, wherein step (c) is performed through a variable wavelength filter in which the wavelength of the light transmitted thereby varies depending on the location along the length of the filter, the location of the light of the wavelength transmitted by the filter corresponding to the dispersion of the light provided by the axially dispersing optics, whereby a sharp image of the intersection of the surface of the object with the measuring area is obtained.
Claim 9
Dependent Claim
141 words
A triangulation optical system for determining at least one coordinate of a surface of an object, along a coordinate axis which is substantially transverse to said surface, said system comprising: a source of light having a substantial wide wavelength bandwidth and providing the light propagation along said axis; axially dispersing optics having a focal length different for different wave-lengths, for focusing the incident light of different wavelengths at different locations relative to said axis, said different locations defining a multi-colored measuring area and a distance between extreme locations along said axis defining a depth measuring range; off-axis imaging optics having an imaging axis at angle to said coordinate axis for imaging the measuring area; a detecting device for detecting intensity of the image; and image processing means of determining the coordinate of the intersection of the surface with said measuring area.
Claim 10
Dependent Claim
141 words
A triangulation optical system for determining at least one coordinate of a surface of an object, along a coordinate axis which is substantially transverse to said surface, said system comprising: a source of light having a substantial wide wavelength bandwidth and providing the light propagation along said axis; axially dispersing optics having a focal length different for different wave-lengths, for focusing the incident light of different wavelengths at different locations relative to said axis, said different locations defining a multi-colored measuring area and a distance between extreme locations along said axis defining a depth measuring range; off-axis imaging optics having an imaging axis at angle to said coordinate axis for imaging the measuring area; a detecting device for detecting intensity of the image; and image processing means of determining the coordinate of the intersection of the surface with said measuring area.
Claim 11
Dependent Claim
60 words
An optical system according to claim 8, wherein said axially dispersing optics focuses the incident light at different points located on said axis, said measuring area is in the form of a light line on said axis, and said image processing means determine the coordinate of the point of the intersection of the surface of the object said light line.
Claim 12
Dependent Claim
17 words
An optical system according to claim 9, wherein said axially dispersing optics is a spherical focusing lens.
Claim 13
Dependent Claim
78 words
An optical system according to claim 8, wherein said axially dispersing optics focuses the incident light at different light stripes lying in different focal planes, said measuring area is in the form of a 2-dimensional light sheet passing through said axis perpendicularly to said focal planes, and said image processing means determine the coordinates of the line of the intersection between the surface of the object and said light sheet, whereby a profile of the surface is determined.
Claim 14
Dependent Claim
17 words
An optical system according to claim 11, wherein said axially dispersing optics is a cylindrical focusing lens.
Claim 15
Dependent Claim
16 words
An optical system according to claim 8, wherein said light source is a white light source.
Claim 16
Dependent Claim
23 words
An optical system according to claim 8, wherein said light source is a very short pulsed laser which produces relatively wide wave-length bandwidth.
Claim 17
Dependent Claim
36 words
An optical system according to claim 8, wherein the imaging optics includes a variable wavelength filter in which the wavelength of the light transmitted thereby varies depending on the location along the length of the filter.
Claim 18
Dependent Claim
33 words
An optical system according to claim 15, wherein the location of the light of the wavelength transmitted by the filter corresponds to the dispersion of the light provided by the axially dispersing optics.
Claim 19
Dependent Claim
15 words
An optical system according to claim 8, wherein said detecting device is a detecting camera.
Claim 20
Dependent Claim
14 words
An optical system according to claim 17, wherein said camera is a black-white camera.
Claim 21
Dependent Claim
19 words
An optical system according to claim 17, wherein said camera is based on three black/white cameras with color filters.
Claim 22
Dependent Claim
14 words
An optical system according to claim 17, wherein said camera is a color camera.
Claim 23
Dependent Claim
33 words
An optical system according to claim 19, wherein the camera is associated with a programmed color filter based on including an appropriate weighting function for each of red, green and blue CCD signals.
Claim 24
Dependent Claim
20 words
An optical system according to any one of claims 17 to 20, wherein said camera is of a CCD type.
Claim 25
Dependent Claim
13 words
An optical system according to claim 8, used for the 3-dimensional surface topography.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-08 | 2002-09-07 | 2003-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-08 | 2006-09-07 | 2007-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-08 | 2010-09-07 | 2011-03-09 | $7700.00 | Window Closed / Lapsed |