US5933744A
Expired / Lapsed
US
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Alignment method for used in chemical mechanical polishing process
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-04-02
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Granted: 1999-08-03
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Expires: 2018-04-02
Abstract
Abstract A method of alignment for a chemical mechanical polishing includes previously patterning a primary zero alignment mark on a surface of a wafer. A first dielectric layer is deposited on the wafer for isolation. Then, an etching is used to etch the first dielectric layer using a photoresist as a mask. First conductive plugs are formed in the first dielectric layer. Next, a first conductive layer is formed on the surface of the first dielectric layer and on the tungsten plugs. Thus, the first non-zero alignment mark pattern is formed on the surface of the first conductive layer and aligned to the first conductive plugs. Next, a second non-zero alignment mark pattern is thus formed on the surface of a second conductive layer and aligned to the a second conductive plugs. By repeating the aforementioned method, odd non-zero alignment mark patterns will be formed over the first non-zero alignment mark pattern, and even non-zero alignment mark patterns will be formed over the second non-zero alignment mark pattern. Therefore, the present invention save space to put non-zero alignment marks in multilevel interconnection and planarization processes.
Inventors
- 👤 Jeng-Horng Chen
- 👤 Tsu Shih
- 👤 Jui-Yu Chang
- 👤 Chung-Long Chang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:05
CPC Classifications
H; H10; H10W; H10W46/00; H10P; H10P95/00; H10P95/06; H10P95/062; H10W46/501; Y; Y10; Y10S; Y10S438/00; Y10S438/975
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
125 words
A method of alignment for chemical mechanical polishing process, an alignment mark pattern is previously formed on a surface of a semiconductor substrate, said method comprising: forming a first interconnection having first recess portion over said substrate by using said alignment mark pattern as a first reference for alignment, said first recess portion being used as a first non-zero alignment mark pattern; forming a first dielectric layer on said first interconnection; and forming a second interconnection having a second recess portion over said first dielectric layer by using said first non-zero alignment mark pattern as a second reference for alignment, wherein said second recess portion is shifted from said first recess portion, said second recess portion being used as a second non-zero alignment mark pattern.
Claim 2
Independent Claim
125 words
A method of alignment for chemical mechanical polishing process, an alignment mark pattern is previously formed on a surface of a semiconductor substrate, said method comprising: forming a first interconnection having first recess portion over said substrate by using said alignment mark pattern as a first reference for alignment, said first recess portion being used as a first non-zero alignment mark pattern; forming a first dielectric layer on said first interconnection; and forming a second interconnection having a second recess portion over said first dielectric layer by using said first non-zero alignment mark pattern as a second reference for alignment, wherein said second recess portion is shifted from said first recess portion, said second recess portion being used as a second non-zero alignment mark pattern.
Claim 3
Dependent Claim
73 words
The method of claim 1, further comprising: forming a second dielectric layer on said second interconnection; and forming a third interconnection having a third recess position over said second dielectric layer by using said second non-zero alignment mark pattern as a third reference for alignment, said third recess portion being used as a third non-zero alignment mark pattern, wherein said third non-zero alignment mark pattern is over said first non-zero alignment mark pattern.
Claim 4
Dependent Claim
74 words
The method of claim 2, further comprising: forming a third dielectric layer on said third interconnection for isolation; and forming a fourth interconnection having fourth recess portion over said third dielectric layer by using said third non-zero alignment mark pattern as a fourth reference for alignment, said fourth recess portion being used as a fourth non-zero alignment mark pattern, wherein said fourth non-zero alignment mark pattern is over said second non-zero alignment mark pattern.
Claim 5
Dependent Claim
74 words
The method of claim 3, further comprising: forming a fourth dielectric layer on said fourth interconnection for isolation; and forming a fifth interconnection having fifth recess portions over said fourth dielectric layer by using said fourth non-zero alignment mark pattern as a fifth reference for alignment, said fifth recess portion being used as a fifth non-zero alignment mark pattern, wherein said fifth non-zero alignment mark pattern is over said third non-zero alignment mark pattern.
Claim 6
Dependent Claim
18 words
The method of claim 1, further comprising performing a first chemical mechanical polishing after forming said first interconnection.
Claim 7
Dependent Claim
18 words
The method of claim 1, further comprising performing a second chemical mechanical polishing after forming said second interconnection.
Claim 8
Dependent Claim
18 words
The method of claim 2, further comprising performing a third chemical mechanical polishing after forming said third interconnection.
Claim 9
Dependent Claim
18 words
The method of claim 3, further comprising performing a fourth chemical mechanical polishing after forming said fourth interconnection.
Claim 10
Dependent Claim
18 words
The method of claim 4, further comprising performing a fifth chemical mechanical polishing after forming said fifth interconnection.
Claim 11
Independent Claim
219 words
A method of alignment for use with a chemical mechanical polishing process, an alignment mark pattern previously formed on a surface of a semiconductor substrate, said method comprising: patterning a first dielectric layer having a first hole formed therein, said first hole being shifted from said alignment mark pattern; forming a first conductive plug in a major portion of said first hole and keeping a distance from a surface of said first dielectric layer; forming a first conductive layer on said first dielectric layer and said first conductive plug, said first conductive layer having a recess portion aligned to said first hole to act as a first non-zero alignment mark pattern, wherein said first conductive layer and said first conductive plug are used as a first interconnection; patterning a second dielectric layer having a second hole formed therein, said second hole being adjacent to said first non-zero alignment mark pattern; forming a second conductive plug in a major portion of said second hole; and forming a second conductive layer on said second dielectric layer and said second conductive plug, said second conductive layer having a recess portion that is aligned to said second hole to act as a second non-zero alignment mark pattern, wherein said second conductive layer and said second conductive plug are used as a second interconnection.
Claim 12
Independent Claim
219 words
A method of alignment for use with a chemical mechanical polishing process, an alignment mark pattern previously formed on a surface of a semiconductor substrate, said method comprising: patterning a first dielectric layer having a first hole formed therein, said first hole being shifted from said alignment mark pattern; forming a first conductive plug in a major portion of said first hole and keeping a distance from a surface of said first dielectric layer; forming a first conductive layer on said first dielectric layer and said first conductive plug, said first conductive layer having a recess portion aligned to said first hole to act as a first non-zero alignment mark pattern, wherein said first conductive layer and said first conductive plug are used as a first interconnection; patterning a second dielectric layer having a second hole formed therein, said second hole being adjacent to said first non-zero alignment mark pattern; forming a second conductive plug in a major portion of said second hole; and forming a second conductive layer on said second dielectric layer and said second conductive plug, said second conductive layer having a recess portion that is aligned to said second hole to act as a second non-zero alignment mark pattern, wherein said second conductive layer and said second conductive plug are used as a second interconnection.
Claim 13
Dependent Claim
107 words
The method of claim 10, further comprising: patterning a third dielectric layer having a third hole formed therein, said third hole being adjacent to said second non-zero alignment mark pattern and over said first non-zero alignment mark pattern; forming a third conductive plug in a major portion of said third hole; and forming a third conductive layer on said third dielectric layer and said third conductive plug, said third conductive layer having a recess portion that is aligned to said third hole to act as a third non-zero alignment mark pattern, wherein said third conductive layer and said third conductive plug are used as a third interconnection.
Claim 14
Dependent Claim
107 words
The method of claim 11, further comprising: patterning a fourth dielectric layer having a fourth hole formed therein, said fourth hole being adjacent to said third non-zero alignment mark pattern and over said second non-zero alignment mark pattern; forming a fourth conductive plug in a major portion of said fourth holes; and forming a fourth conductive layer on said fourth dielectric layer and said fourth conductive plug, said fourth conductive layer having a recess portion that is aligned to said fourth hole to act as a fourth non-zero alignment mark pattern, wherein said fourth conductive layer and said fourth conductive plug are used as a fourth interconnection.
Claim 15
Dependent Claim
108 words
The method of claim 12, further comprising: patterning a fifth dielectric layer having a fifth hole formed therein, said fifth hole being adjacent to said forth non-zero alignment mark pattern and over said third non-zero alignment mark pattern; forming a fifth conductive plug in a major portion of said of fifth hole; and forming a fifth conductive layer on said fifth dielectric layer and said fifth conductive plug, said fifth conductive layer having a recess portion that is aligned to said fifth hole to act as a fifth non-zero alignment mark pattern, wherein said fifth conductive layer and said fifth conductive plug are used as a fifth interconnection.
Claim 16
Dependent Claim
19 words
The method of claim 10, further comprises performing a first chemical mechanical polishing after forming said first conductive layer.
Claim 17
Dependent Claim
19 words
The method of claim 10, further comprises performing a second chemical mechanical polishing after forming said second conductive layer.
Claim 18
Dependent Claim
19 words
The method of claim 11, further comprises performing a third chemical mechanical polishing after forming said third conductive layer.
Claim 19
Dependent Claim
19 words
The method of claim 12, further comprises performing a forth chemical mechanical polishing after forming said forth conductive layer.
Claim 20
Dependent Claim
19 words
The method of claim 13, further comprises performing a fifth chemical mechanical polishing after forming said fifth conductive layer.
Claim 21
Independent Claim
135 words
A method of forming alignment marks over a substrate, the method comprising: providing a substrate having an alignment mark formed thereon; forming a first dielectric layer over said substrate and said alignment mark; forming a first metal structure over said first dielectric layer using said alignment mark as an alignment reference, said first metal structure being shifted from said alignment mark, said first metal structure including a recessed portion serving as a first non-zero alignment mark; forming a second dielectric layer over said first metal structure; and forming a second metal structure over said second dielectric layer using said first non-zero alignment mark as a second alignment reference, said second metal structure being shifted from said first non-zero alignment mark, the second metal structure including a recessed portion serving as a second non-zero alignment mark.
Claim 22
Independent Claim
135 words
A method of forming alignment marks over a substrate, the method comprising: providing a substrate having an alignment mark formed thereon; forming a first dielectric layer over said substrate and said alignment mark; forming a first metal structure over said first dielectric layer using said alignment mark as an alignment reference, said first metal structure being shifted from said alignment mark, said first metal structure including a recessed portion serving as a first non-zero alignment mark; forming a second dielectric layer over said first metal structure; and forming a second metal structure over said second dielectric layer using said first non-zero alignment mark as a second alignment reference, said second metal structure being shifted from said first non-zero alignment mark, the second metal structure including a recessed portion serving as a second non-zero alignment mark.
Claim 23
Dependent Claim
66 words
The method of claim 19 wherein said first metal structure comprises a recessed metal plug formed in said first dielectric layer and a metal layer formed over and on said recessed metal plug, wherein a chemical-mechanical polish of the metal layer to planarize the metal layer located above an active area of said substrate does not completely remove said recessed portion of said first metal structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-02 | 2003-02-01 | 2003-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-02 | 2007-02-01 | 2007-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-02 | 2011-02-01 | 2011-08-03 | $7700.00 | Window Closed / Lapsed |