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US6027595A
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Method of making optical replicas by stamping in photoresist and replicas formed thereby
Assignee: Flir Systems Trading Belgium BVBA
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Filing: 1998-07-02
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Granted: 2000-02-22
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Expires: 2018-07-02
Abstract
Abstract Optical structures are replicated in photoresist on a substrate using a stamp. The transfer of the pattern into the liquid photoresist and the provision on the substrate can be achieved using manual pressures. Various techniques may be used to remove air from the liquid photoresist. The stamp is removed once the liquid photoresist is fully solidified. These structures in solidified photoresist may serve as optical elements or may be accurately transferred into the substrate. The stamp may be for an entire wafer.
Inventors
- 👤 Thomas J. Suleski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 04:26
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
57 words
A method of making an optical replica comprising: contacting liquid photoresist with a stamp having a pattern therein, thereby replicating the pattern in the photoresist; providing the liquid photoresist on a substrate opposite a side of the liquid photoresist contacting the stamp; solidifying the liquid photoresist; removing the stamp; and simultaneously etching solidified photoresist and the substrate.
Claim 2
Independent Claim
57 words
A method of making an optical replica comprising: contacting liquid photoresist with a stamp having a pattern therein, thereby replicating the pattern in the photoresist; providing the liquid photoresist on a substrate opposite a side of the liquid photoresist contacting the stamp; solidifying the liquid photoresist; removing the stamp; and simultaneously etching solidified photoresist and the substrate.
Claim 3
Dependent Claim
27 words
The method of claim 1, wherein said providing includes applying the liquid photoresist on the substrate and said contacting includes stamping the liquid photoresist with the stamp.
Claim 4
Dependent Claim
28 words
The method of claim 1, wherein said contacting includes applying the liquid photoresist on the stamp and said providing includes pressing the liquid photoresist and the substrate together.
Claim 5
Dependent Claim
17 words
The method of claim 1, further comprising transferring the pattern in the solidified photoresist into the substrate.
Claim 6
Dependent Claim
12 words
The method of claim 1, wherein the substrate is a glass substrate.
Claim 7
Dependent Claim
13 words
The method of claim 5, wherein the glass substrate is a silicon substrate.
Claim 8
Dependent Claim
23 words
The method of claim 5, wherein said simultaneous etching includes anisotropic etching of the pattern in the solidified photoresist into the glass substrate.
Claim 9
Dependent Claim
11 words
The method of claim 1, wherein the substrate is a wafer.
Claim 10
Dependent Claim
13 words
The method of claim 8, further comprising dicing the substrate after said removing.
Claim 11
Dependent Claim
11 words
The method of claim 8, wherein the stamp is a wafer.
Claim 12
Dependent Claim
15 words
The method of claim 1, wherein the stamp is made of an elastomeric, polymeric material.
Claim 13
Dependent Claim
20 words
The method of claim 11, further comprising, before said contacting, molding the elastomeric, polymeric material to form the pattern therein.
Claim 14
Dependent Claim
12 words
The method of claim 11, wherein the elastomeric, polymeric material is polydimethylsiloxane.
Claim 15
Dependent Claim
24 words
The method of claim 1, further comprising, when the stamp is made of glass, treating the stamp with a release agent before said contacting.
Claim 16
Dependent Claim
13 words
The method of claim 14, wherein the release agent is a fluorinated trichlorosilane.
Claim 17
Dependent Claim
16 words
The method of claim 3, wherein at least part of said solidifying occurs before said pressing.
Claim 18
Dependent Claim
19 words
The method of claim 3, wherein said pressing includes introducing the liquid photoresist at an angle to the substrate.
Claim 19
Dependent Claim
19 words
The method of claim 2, wherein said contacting includes applying differential initial stamping to the photoresist across the stamp.
Claim 20
Dependent Claim
20 words
The method of claim 18, wherein, when the stamp is flexible, said applying differential initial stamping includes bending the stamp.
Claim 21
Dependent Claim
26 words
The method of claim 18, wherein said applying differential initial stamping includes clamping one portion of the stamp more tightly than another portion of the stamp.
Claim 22
Dependent Claim
12 words
An optical replica made in accordance with the method of claim 1.
Claim 23
Dependent Claim
45 words
The method of claim 1, further comprising: determining a required thickness of the solidified photoresist to achieve a desired optical profile in accordance with relative etch rates of the solidified photoresist and the substrate; and providing the liquid photoresist in accordance with the required thickness.
Claim 24
Dependent Claim
16 words
The method of claim 1, wherein said simultaneous etching substantially removes all of the solidified photoresist.
Claim 25
Dependent Claim
13 words
The method of claim 1, wherein the pattern includes more than two levels.
Claim 26
Dependent Claim
11 words
The method of claim 24, wherein the levels are discrete levels.
Claim 27
Dependent Claim
12 words
The method of claim 24, wherein the levels have a continuous profile.
Claim 28
Dependent Claim
21 words
The method of claim 1, wherein said simultaneously etching includes transferring a surface topology of the solidified photoresist into the substrate.
Claim 29
Dependent Claim
29 words
The method of claim 27, wherein said transferring is in a ratio between 0.5 and 2 in accordance with respective etch rates of the solidified photoresist and the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-21 | 2003-08-23 | 2004-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-21 | 2007-08-23 | 2008-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-21 | 2011-08-23 | 2012-02-22 | $7700.00 | Window Closed / Lapsed |