US6040592A
Expired / Lapsed
US
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Well to substrate photodiode for use in a CMOS sensor on a salicide process
Assignee: Intel Corp
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Filing: 1997-06-12
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Granted: 2000-03-21
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Expires: 2017-06-12
Abstract
Abstract An image sensor having a well-to-substrate diode as the photodetector. In a preferred embodiment, a modern salicided (CMOS) process is utilized to manufacture the image sensor. The field oxide region above the diode junction is transparent to visible light, thus allowing the photodiode competitive quantum efficiency as compared to devices having source/drain diffusion-to-substrate photodiodes fabricated on a non-salicided process. The photodiode can be integrated as part of a sensor array with digital circuitry using a relatively unmodified digital CMOS process. Furthermore, the structure allows the optical properties of the photodiode to be engineered by modifying the well without deleterious effects, to approximate a first order, on the characteristics of a FET built in another identical well.
Inventors
- 👤 Bart McDaniel
- 👤 Mark A. Beiley
- 👤 Lawrence T. Clark
- 👤 Eric J. Hoffman
- 👤 Edward J. Bawolek
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:06
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F30/00; H10F30/20; H10F30/21; H10F30/28; H10F30/282; H10F39/80; H10F39/803; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/547
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
130 words
A photodiode for converting incident optical signals into electrical signals, comprising: substrate layer of semiconductor material of a first conductivity type; well of semiconductor material of a second conductivity type having a top and bottom, the bottom of the well being disposed in the substrate and a p-n junction defined there between, the well and substrate defining a photosensitive region of said photodiode; tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; and a field oxide region covering a substantial portion of the top of the well, the oxide region permitting the passage of at least some of the incident optical signals into the photosensitive region.
Claim 2
Dependent Claim
130 words
A photodiode for converting incident optical signals into electrical signals, comprising: substrate layer of semiconductor material of a first conductivity type; well of semiconductor material of a second conductivity type having a top and bottom, the bottom of the well being disposed in the substrate and a p-n junction defined there between, the well and substrate defining a photosensitive region of said photodiode; tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; and a field oxide region covering a substantial portion of the top of the well, the oxide region permitting the passage of at least some of the incident optical signals into the photosensitive region.
Claim 3
Dependent Claim
16 words
The photodiode of claim 1 wherein the substrate layer and well comprise the semiconductor material silicon.
Claim 4
Dependent Claim
16 words
The photodiode of claim 1 further comprising a metal electrical contact connected to the tap region.
Claim 5
Dependent Claim
48 words
The photodiode of claim 1 wherein the photodiode is formed by a salicided process and wherein a metal electrical contact is formed by depositing a layer of refractory metal over the tap region and then causing a reaction between the layer of refractory metal and the tap region.
Claim 6
Dependent Claim
19 words
The photodiode of claim 1 wherein the first conductivity type is p-type, and the second conductivity type is n-type.
Claim 7
Dependent Claim
19 words
The photodiode of claim 1 wherein the first conductivity type is n-type, and the second conductivity type is p-type.
Claim 8
Dependent Claim
21 words
The photodiode of claim 1 wherein the oxide region is a shallow trench isolation region formed by a CMOS fabrication process.
Claim 9
Dependent Claim
13 words
The photodiode of claim 1 wherein the oxide region is a LOCOS oxide.
Claim 10
Dependent Claim
143 words
A photocell electrically responsive to incident light, comprising: a photodiode having a p-n junction between a substrate of a first conductivity type and a well region of a second conductivity type, the well and substrate defining a photosensitive region of said photodiode, the well region being formed in the substrate and having a top substantially covered by a field oxide region being substantially transparent so that incident light can be detected by the photosensitive region, and a tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; and reset circuitry coupled to the photodiode for initializing the photodiode in preparation for detecting incident light; and readout circuitry coupled to the photodiode for reading an electrical signal representative of detected light.
Claim 11
Dependent Claim
143 words
A photocell electrically responsive to incident light, comprising: a photodiode having a p-n junction between a substrate of a first conductivity type and a well region of a second conductivity type, the well and substrate defining a photosensitive region of said photodiode, the well region being formed in the substrate and having a top substantially covered by a field oxide region being substantially transparent so that incident light can be detected by the photosensitive region, and a tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; and reset circuitry coupled to the photodiode for initializing the photodiode in preparation for detecting incident light; and readout circuitry coupled to the photodiode for reading an electrical signal representative of detected light.
Claim 12
Dependent Claim
38 words
The photocell of claim 11 wherein the reset circuitry comprises a MOS FET formed in the substrate adjacent to the photodiode, the MOS FET configured as a switch for applying and removing a reverse bias to the photodiode.
Claim 13
Dependent Claim
20 words
The photocell of claim 10 wherein the tap region is an extension of a source/drain diffusion of the MOS FET.
Claim 14
Dependent Claim
111 words
An image sensor IC comprising: a plurality of photocells arranged in rows and columns, each photocell having a well-to-substrate photodiode and associated reset and readout circuitry, a well of said photodiode having a top being substantially covered by a field oxide region, and a tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; a plurality of row decoder/drivers coupled to the photocells for generating a row select signal for a row of photocells; and a column decoder coupled to the photocells for decoding a column of photocells.
Claim 15
Dependent Claim
111 words
An image sensor IC comprising: a plurality of photocells arranged in rows and columns, each photocell having a well-to-substrate photodiode and associated reset and readout circuitry, a well of said photodiode having a top being substantially covered by a field oxide region, and a tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; a plurality of row decoder/drivers coupled to the photocells for generating a row select signal for a row of photocells; and a column decoder coupled to the photocells for decoding a column of photocells.
Claim 16
Dependent Claim
32 words
The image sensor IC of claim 12, further comprising an A/D converter coupled to at least one of said plurality of photocells; and digital signal processing circuitry coupled to the AID converter.
Claim 17
Dependent Claim
134 words
An image capturing system, comprising: optical interface exposed to incident light; sensor array of photocells electrically responsive to the incident light, each photocell having a well-to-substrate photodiode and associated reset and readout circuitry, a well of said photodiode having a top being substantially covered by a field oxide region, and a tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; A/D conversion unit coupled to the sensor array; digital signal processing unit coupled to the A/D conversion unit for processing and compressing digital data received from the A/D conversion unit to yield a detected image; and storage unit coupled to the digital signal processing unit for storing the detected image.
Claim 18
Dependent Claim
134 words
An image capturing system, comprising: optical interface exposed to incident light; sensor array of photocells electrically responsive to the incident light, each photocell having a well-to-substrate photodiode and associated reset and readout circuitry, a well of said photodiode having a top being substantially covered by a field oxide region, and a tap region of semiconductor material of the second conductivity type in contact with the well, the tap region having a greater dopant concentration than the well to promote electrical contact with the well; A/D conversion unit coupled to the sensor array; digital signal processing unit coupled to the A/D conversion unit for processing and compressing digital data received from the A/D conversion unit to yield a detected image; and storage unit coupled to the digital signal processing unit for storing the detected image.
Claim 19
Dependent Claim
24 words
The photodiode of claim 1 further comprising dielectric layer formed above the field oxide region and being substantially transparent to the incident optical signals.
Claim 20
Dependent Claim
139 words
A photodiode for converting incident light into electrical signals, comprising: a first region of semiconductor material of a first conductivity type; a second region of semiconductor material of a second conductivity type in contact with the first region; a p-n junction of the photodiode of defined between the first and second regions, the first and second regions defining a photosensitive region of said photodiode; a third region of semiconductor material of the second conductivity type in contact with the second region, the third region having a greater dopant concentration than the second region to facilitate electrical contact with the second region; and a field oxide region covering a substantial portion of a top of the second region and receiving the incident light, the oxide region permitting passage of at least some of the incident light into the photosensitive region.
Claim 21
Dependent Claim
139 words
A photodiode for converting incident light into electrical signals, comprising: a first region of semiconductor material of a first conductivity type; a second region of semiconductor material of a second conductivity type in contact with the first region; a p-n junction of the photodiode of defined between the first and second regions, the first and second regions defining a photosensitive region of said photodiode; a third region of semiconductor material of the second conductivity type in contact with the second region, the third region having a greater dopant concentration than the second region to facilitate electrical contact with the second region; and a field oxide region covering a substantial portion of a top of the second region and receiving the incident light, the oxide region permitting passage of at least some of the incident light into the photosensitive region.
Claim 22
Dependent Claim
33 words
The photodiode of claim 1 wherein the well is sufficiently large to allow formation therein of one or more transistors which can be built using the same process used for manufacturing the photodiode.
Claim 23
Dependent Claim
33 words
The photocell of claim 9 wherein the well is sufficiently large to allow formation therein of one or more transistors which can be built using the same process used for manufacturing the photocell.
Claim 24
Dependent Claim
37 words
The image sensor IC of claim 12 wherein the well is sufficiently large to allow formation therein of one or more transistors which can be built using the same process used for manufacturing the image sensor IC.
Claim 25
Dependent Claim
36 words
The image capturing system of claim 14 wherein the well is sufficiently large to allow formation therein of one or more transistors which can be built using the same process used for manufacturing the sensor array.
Claim 26
Dependent Claim
42 words
The photodiode of claim 16 wherein the first region includes a substrate, the second region includes a well disposed in the substrate, and the third region is built as part of a transistor drain/source junction formation step in a MOS fabrication process.
Claim 27
Dependent Claim
43 words
The photodiode of claim 21 further comprising a trench oxide isolation region covering a substantial portion of a top of the well and that permits passage of all of substantially the incident light that is detected by the photodiode into the photosensitive region.
Claim 28
Dependent Claim
32 words
The photodiode of claim 16 wherein the second region has a dopant concentration that is suitable as a background for building transistors therein using the same process used for manufacturing the photodiode.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-21 | 2003-09-20 | 2004-03-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-21 | 2007-09-20 | 2008-03-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-21 | 2011-09-20 | 2012-03-21 | $7700.00 | Window Closed / Lapsed |