US6204176B1 — Substituted phenylethylene precursor deposition m…

Claim 1

Independent Claim 321 words

A method for depositing a copper (Cu) seed layer on a Cu-receiving surface of an integrated circuit (IC) wafer in a chamber having a chuck, on which the IC is mounted, and having a showerhead vapor distribution system, comprising the steps of: a) in said chamber, establishing a vaporizing temperature in the range of 60 to 80 degrees C.; establishing a chuck temperature in the range of approximately 140 to 230 degrees C.; establishing a chamber pressure in the range of approximately 0.1 to 2 torr (T); establishing a distance between the showerhead and the Cu-receiving surface in the range of 15 to 60 millimeters (mm); and establishing a helium carrier gas flow rate, to carry the Cu precursor compound vapor, in the range of 10 to 400 standard cubic centimeters (sccm); establishing a liquid precursor flow rate in the range of 0.05 to 0.7 milliliters pre minute (mL/min); and volatizing a Cu precursor compound including Cu +1 (hexafluoroacetylacetonate), and a substituted phenylethylene ligand having the following structural formula: (C 6 H 5 )(R 1 )C═C(R 2 )(R 3 ) in which R 1 is selected from the group consisting of C 1 to C 6 alkyl, C 1 to C 6 haloalkyl, phenyl, and C 1 to C 6 alkoxyl; in which R 2 is selected from the group consisting of H, C 1 to C 6 alkyl, phenyl, and C 1 to C 6 alkoxyl; and in which R 3 is selected from the group consisting of H, C 1 to C 6 alkyl, phenyl, and C 1 to C 6 alkoxyl; b) decomposing the Cu precursor compound on the Cu-receiving surface of the IC wafer to form a Cu seed-layer, whereby the seed layer is formed through chemical vapor deposition (CVD); and c) forming a second layer of Cu overlying the Cu seed layer, whereby the Cu seed layer enhances adhesion between the Cu films and Cu-receiving surface.

Claim 2

Independent Claim 321 words

A method for depositing a copper (Cu) seed layer on a Cu-receiving surface of an integrated circuit (IC) wafer in a chamber having a chuck, on which the IC is mounted, and having a showerhead vapor distribution system, comprising the steps of: a) in said chamber, establishing a vaporizing temperature in the range of 60 to 80 degrees C.; establishing a chuck temperature in the range of approximately 140 to 230 degrees C.; establishing a chamber pressure in the range of approximately 0.1 to 2 torr (T); establishing a distance between the showerhead and the Cu-receiving surface in the range of 15 to 60 millimeters (mm); and establishing a helium carrier gas flow rate, to carry the Cu precursor compound vapor, in the range of 10 to 400 standard cubic centimeters (sccm); establishing a liquid precursor flow rate in the range of 0.05 to 0.7 milliliters pre minute (mL/min); and volatizing a Cu precursor compound including Cu +1 (hexafluoroacetylacetonate), and a substituted phenylethylene ligand having the following structural formula: (C 6 H 5 )(R 1 )C═C(R 2 )(R 3 ) in which R 1 is selected from the group consisting of C 1 to C 6 alkyl, C 1 to C 6 haloalkyl, phenyl, and C 1 to C 6 alkoxyl; in which R 2 is selected from the group consisting of H, C 1 to C 6 alkyl, phenyl, and C 1 to C 6 alkoxyl; and in which R 3 is selected from the group consisting of H, C 1 to C 6 alkyl, phenyl, and C 1 to C 6 alkoxyl; b) decomposing the Cu precursor compound on the Cu-receiving surface of the IC wafer to form a Cu seed-layer, whereby the seed layer is formed through chemical vapor deposition (CVD); and c) forming a second layer of Cu overlying the Cu seed layer, whereby the Cu seed layer enhances adhesion between the Cu films and Cu-receiving surface.

Claim 3

Dependent Claim 35 words

A method as in claim 1 further comprising a step, following Step a), of: a8) establishing a wet helium gas flow rate, to carry water vapor, in the range of approximately 0.1 to 50 sccm.

Claim 4

Dependent Claim 113 words

A method as in claim 2 in which Step a2) includes a vaporization temperature of approximately 65 degrees C., in which Step a3) includes a chuck temperature of approximately 200 degrees C., in which Step a4) includes a chamber pressure of approximately 0.5 T, in which Step a5) includes the showerhead distance being approximately 30 mm, in which Step a6) includes a helium carrier gas flow of 100 sccm, in which Step a7) includes a liquid Cu precursor compound flow rate of approximately 0.15 mL/min, in which Step a8) includes a wet helium gas flow rate of approximately of 5 sccm, and in which Step a) includes volatilizing an α-methylstyrene Cu precursor compound.

Claim 5

Dependent Claim 46 words

A method as in claim 3 in which Step b) includes depositing the Cu seed layer at a deposition rate of approximately 260 Å per minute, and in which Step b) includes the deposited Cu seed layer having a resistivity of approximately 2.0 micro-ohms centimeters (μΩ·cm).

Claim 6

Dependent Claim 58 words

A method as in claim 4 including a further step, preceding Step a), of: a1) forming a liquid Cu precursor compound comprising an additive to create a Cu precursor blend, in which the Cu precursor blend further comprises approximately 5% α-methylstyrene, as measured by weight ratio of the Cu precursor compound, to facilitate a stable liquid phase precursor.

Claim 7

Dependent Claim 115 words

A method as in claim 2 in which Step a2) includes a vaporization temperature of approximately 65 degrees C., in which Step a3) includes a chuck temperature of approximately 190 degrees C., in which Step a4) includes a chamber pressure of approximately 0.7 to 1.2 T, in which Step a5) includes the showerhead distance being approximately 20 mm, in which Step a6) includes a helium carrier gas flow of 100 sccm, in which Step a7) includes a liquid Cu precursor compound flow rate of approximately 0.15 mL/min, in which Step a8) includes a wet helium gas flow rate of approximately of 5 sccm, and in which Step a) includes volatilizing an α-methylstyrene Cu precursor compound.

Claim 8

Dependent Claim 46 words

A method as in claim 6 in which Step b) includes depositing the Cu seed layer at a deposition rate of approximately 150 Å per minute, and in which Step b) includes the deposited Cu seed layer having a resistivity of approximately 2.2 micro-ohms centimeters (μΩ·cm).

Claim 9

Dependent Claim 58 words

A method as in claim 6 including a further step, preceding Step a), of: a1) forming a liquid Cu precursor compound comprising an additive to create a Cu precursor blend, in which the Cu precursor blend further comprises approximately 15% α-methylstyrene, as measured by weight ratio of the Cu precursor compound, to facilitate a stable liquid phase precursor.

Claim 10

Dependent Claim 236 words

In a chamber having a wafer chuck to receive an integrated circuit (IC) wafer and a showerhead to distribute materials on a Cu-receiving surface of the IC wafer, a method for forming a copper (Cu) seed layer on the Cu-receiving surface comprising steps of: a) forming a liquid Cu precursor compound including Cu +1 (hexafluoroacetylacetonate) and an α-methylstyrene ligand; b) adding approximately 5% α-methylstyrene ligand, as measured by weight ratio of the Cu precursor compound, to create a Cu precursor compound blend; c) establishing a Cu precursor vaporization temperature in the range of approximately 65 degrees C.; d) heating the wafer chuck to a temperature of approximately 200 degrees C.; e) creating a chamber pressure of approximately 0.5 T; f) carrying the vaporized Cu precursor compound blend with a helium carrier gas flow of approximately 100 sccm; g) establishing a distance between the showerhead and the Cu-receiving surface of approximately 30 mm; h) volatilizing the Cu precursor compound blend; i) flowing the Cu precursor compound blend at a liquid precursor flow rate in the range of approximately 0.15 mL/min; j) carrying water vapor with a helium gas flow rate of approximately of 5 sccm; k) in response to Steps a) through j), forming a Cu seed layer on the Cu-receiving surface; and l) depositing a second layer of Cu film overlying the Cu seed layer, whereby a thick Cu film with good adhesive qualities is formed.

Claim 11

Dependent Claim 236 words

In a chamber having a wafer chuck to receive an integrated circuit (IC) wafer and a showerhead to distribute materials on a Cu-receiving surface of the IC wafer, a method for forming a copper (Cu) seed layer on the Cu-receiving surface comprising steps of: a) forming a liquid Cu precursor compound including Cu +1 (hexafluoroacetylacetonate) and an α-methylstyrene ligand; b) adding approximately 5% α-methylstyrene ligand, as measured by weight ratio of the Cu precursor compound, to create a Cu precursor compound blend; c) establishing a Cu precursor vaporization temperature in the range of approximately 65 degrees C.; d) heating the wafer chuck to a temperature of approximately 200 degrees C.; e) creating a chamber pressure of approximately 0.5 T; f) carrying the vaporized Cu precursor compound blend with a helium carrier gas flow of approximately 100 sccm; g) establishing a distance between the showerhead and the Cu-receiving surface of approximately 30 mm; h) volatilizing the Cu precursor compound blend; i) flowing the Cu precursor compound blend at a liquid precursor flow rate in the range of approximately 0.15 mL/min; j) carrying water vapor with a helium gas flow rate of approximately of 5 sccm; k) in response to Steps a) through j), forming a Cu seed layer on the Cu-receiving surface; and l) depositing a second layer of Cu film overlying the Cu seed layer, whereby a thick Cu film with good adhesive qualities is formed.

Claim 12

Dependent Claim 32 words

A method as in claim 9 in which Step l) includes depositing the second Cu layer with deposition methods selected from the group consisting of CVD, physical vapor deposition (PVD), and electroplating.

Claim 13

Dependent Claim 236 words

In a chamber having a wafer chuck to receive an integrated circuit (IC) wafer and a showerhead to distribute materials on a Cu-receiving surface of the IC wafer, a method for forming a copper (Cu) seed layer on the Cu-receiving surface comprising steps of: a) forming a liquid Cu precursor compound including Cu +1 (hexafluoroacetylacetonate) and an α-methylstyrene ligand; b) adding approximately 15% α-methylstyrene ligand, as measured by weight ratio of the Cu precursor compound, to create a Cu precursor compound blend; c) establishing a Cu precursor vaporization temperature in the range of approximately 65 degrees C.; d) heating the wafer chuck to a temperature of approximately 190 degrees C.; e) creating a chamber pressure of approximately 0.5 T; f) carrying the vaporized Cu precursor compound blend with a helium carrier gas flow of approximately 100 sccm; g) establishing a distance between the showerhead and the Cu-receiving surface of approximately 20 mm; h) volatilizing the Cu precursor compound blend; i) flowing the Cu precursor compound blend at a liquid precursor flow rate in the range of approximately 0.15 mL/min; j) carrying water vapor with a helium gas flow rate of approximately of 5 sccm; k) in response to Steps a) through j), forming a Cu seed layer on the Cu-receiving surface; and l) depositing a second layer of Cu film overlying the Cu seed layer, whereby a thick Cu film with good adhesive qualities is formed.

Claim 14

Dependent Claim 236 words

In a chamber having a wafer chuck to receive an integrated circuit (IC) wafer and a showerhead to distribute materials on a Cu-receiving surface of the IC wafer, a method for forming a copper (Cu) seed layer on the Cu-receiving surface comprising steps of: a) forming a liquid Cu precursor compound including Cu +1 (hexafluoroacetylacetonate) and an α-methylstyrene ligand; b) adding approximately 15% α-methylstyrene ligand, as measured by weight ratio of the Cu precursor compound, to create a Cu precursor compound blend; c) establishing a Cu precursor vaporization temperature in the range of approximately 65 degrees C.; d) heating the wafer chuck to a temperature of approximately 190 degrees C.; e) creating a chamber pressure of approximately 0.5 T; f) carrying the vaporized Cu precursor compound blend with a helium carrier gas flow of approximately 100 sccm; g) establishing a distance between the showerhead and the Cu-receiving surface of approximately 20 mm; h) volatilizing the Cu precursor compound blend; i) flowing the Cu precursor compound blend at a liquid precursor flow rate in the range of approximately 0.15 mL/min; j) carrying water vapor with a helium gas flow rate of approximately of 5 sccm; k) in response to Steps a) through j), forming a Cu seed layer on the Cu-receiving surface; and l) depositing a second layer of Cu film overlying the Cu seed layer, whereby a thick Cu film with good adhesive qualities is formed.

Claim 15

Dependent Claim 32 words

A method as in claim 11 in which Step l) includes depositing the second Cu layer with deposition methods selected from the group consisting of CVD, physical vapor deposition (PVD), and electroplating.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2004-03-19	2004-09-18	2005-03-20	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2008-03-19	2008-09-18	2009-03-20	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2012-03-19	2012-09-18	2013-03-20	$7700.00	Window Closed / Lapsed

Substituted phenylethylene precursor deposition method

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