US6489776B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Non-contact mechanical resonance method for determining the near surface carrier mobility in conductors
Assignee: International Business Machines Corp
•
Filing: 2000-11-02
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Granted: 2002-12-03
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Expires: 2020-11-02
Abstract
Abstract An apparatus using a resonator probe for determining an electronic property of a conductor across a dielectric. The apparatus has a device for inducing lateral mechanical oscillations of the resonator probe and a voltage source for producing a voltage difference between the resonator probe and the conductor to create an electronic drag between the conductor and resonator probe, thus damping the mechanical oscillations of the probe. The electronic property, such as charge carrier mobility, surface resistance, charge carrier lifetime and the number of charge carriers is determined from the damping experienced by the probe.
Inventors
- 👤 Timothy D. Stowe
- 👤 Daniel Rugar
- 👤 Thomas W. Kenny
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 12:18
CPC Classifications
G; G01; G01R; G01R29/00; G01R29/24; G01R9/00; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/778; Y10S977/784
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
89 words
An apparatus for determining an electronic property of a conductor across a dielectric, said apparatus comprising: a) a resonator probe for positioning a predetermined distance from said conductor; b) a means for inducing lateral mechanical oscillations in said resonator probe; c) a voltage source for producing a voltage difference between said resonator probe and said conductor to create an electronic drag between said conductor and said resonator probe, thereby causing a damping of said lateral mechanical oscillations; and d) a means for determining said electronic property from said damping.
Claim 2
Independent Claim
89 words
An apparatus for determining an electronic property of a conductor across a dielectric, said apparatus comprising: a) a resonator probe for positioning a predetermined distance from said conductor; b) a means for inducing lateral mechanical oscillations in said resonator probe; c) a voltage source for producing a voltage difference between said resonator probe and said conductor to create an electronic drag between said conductor and said resonator probe, thereby causing a damping of said lateral mechanical oscillations; and d) a means for determining said electronic property from said damping.
Claim 3
Dependent Claim
23 words
The apparatus of claim 1 , wherein said means for inducing said lateral mechanical oscillations comprises a capacitive drive or integrated piezoelectric devices.
Claim 4
Dependent Claim
22 words
The apparatus of claim 1 , wherein said means for determining said electronic property from said damping comprises an oscillation monitoring mechanism.
Claim 5
Dependent Claim
17 words
The apparatus of claim 3 , wherein said oscillation monitoring mechanism comprises an optical oscillation monitoring system.
Claim 6
Dependent Claim
19 words
The apparatus of claim 3 , wherein said oscillation monitoring mechanism comprises a processing circuit for determining said damping.
Claim 7
Dependent Claim
23 words
The apparatus of claim 3 , wherein said oscillation monitoring mechanism comprises a processing circuit for determining the Q-factor of said resonator probe.
Claim 8
Dependent Claim
23 words
The apparatus of claim 1 , further comprising a distance control for controlling said predetermined distance between said resonator probe and said conductor.
Claim 9
Dependent Claim
16 words
The apparatus of claim 1 , wherein said resonator probe comprises at least one resonator member.
Claim 10
Dependent Claim
19 words
The apparatus of claim 8 , wherein said resonator probe comprises two parallel resonator members forming a tuning fork.
Claim 11
Dependent Claim
20 words
The apparatus of claim 8 , wherein said resonator probe comprises one resonator member in the form of a cantilever.
Claim 12
Dependent Claim
24 words
The apparatus of claim 1 , wherein said voltage source is a source for producing a positive voltage difference and a negative voltage difference.
Claim 13
Dependent Claim
32 words
The apparatus of claim 1 , wherein said electronic property is selected from the group consisting of quantity of charge carriers, surface mobility of charge carriers, surface resistivity and charge carrier lifetime.
Claim 14
Dependent Claim
24 words
The apparatus of claim 1 , wherein said conductor is selected from the group consisting of metal conductors, semiconductors, conducting polymers and organic conductors.
Claim 15
Dependent Claim
22 words
The apparatus of claim 1 , wherein said dielectric is selected from the group consisting of air, oxides, passivation layers, protective layers.
Claim 16
Independent Claim
81 words
A method for determining an electronic property of a conductor across a dielectric, said method comprising: a) positioning a resonator probe a predetermined distance away from said conductor; b) inducing lateral mechanical oscillations in said resonator probe; c) producing a voltage difference between said resonator probe and said conductor such that an electronic drag is created between said conductor and said resonator probe, thereby causing a damping of said lateral mechanical oscillations; and d) determining said electronic property from said damping.
Claim 17
Independent Claim
81 words
A method for determining an electronic property of a conductor across a dielectric, said method comprising: a) positioning a resonator probe a predetermined distance away from said conductor; b) inducing lateral mechanical oscillations in said resonator probe; c) producing a voltage difference between said resonator probe and said conductor such that an electronic drag is created between said conductor and said resonator probe, thereby causing a damping of said lateral mechanical oscillations; and d) determining said electronic property from said damping.
Claim 18
Dependent Claim
33 words
The method of claim 15 , wherein said step of determining said electronic property comprises: a) monitoring the damping action of said electronic drag; b) calculating said electronic property from said damping action.
Claim 19
Dependent Claim
31 words
The method of claim 15 , wherein said step of determining said electronic property comprises: a) monitoring the Q-factor of said resonator probe; b) calculating said electronic property from said Q-factor.
Claim 20
Dependent Claim
15 words
The method of claim 15 , wherein said resonator probe is operated in a vacuum.
Claim 21
Dependent Claim
15 words
The method of claim 15 , wherein said resonator probe is encapsulated in a vacuum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-12-02 | 2006-06-03 | 2006-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-12-02 | 2010-06-03 | 2010-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-12-02 | 2014-06-03 | 2014-12-03 | $7700.00 | Window Closed / Lapsed |