Patent US1837227A successfully refreshed from Google Patents.
US6498640B1
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Method to measure alignment using latent image grating structures
Assignee: NXP BV
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Filing: 1999-12-30
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Granted: 2002-12-24
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Expires: 2019-12-30
Abstract
Abstract A method for facilitating alignment measurements in a semiconductor fabrication process that uses a combination of underlying and latent images on a substrate to indicate alignment between a lithographic mask and the substrate. In an example embodiment of the method for measuring alignment, a substrate has a layer of photoresist disposed on it is illuminated through a reticle element resulting in the formation of a first plurality of underlying grating images. The first plurality of images has a repetitive and symmetrical pattern with equal spacing between images. A second plurality of latent grating images is formed in the photoresist having substantially the same pattern of images as the first plurality of images. The second plurality of images is disposed above from the first plurality of images, the first and second plurality of images serving as an indicator of alignment between the mask and the substrate when the combined images forming a repetitive pattern. The system includes an energy source, an optical element and a reticle element for forming the plurality of images on the substrate to aid in alignment.
Inventors
- 👤 David Ziger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 02:30
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7084; G03F9/7049
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
115 words
A method of providing alignment in a step and repeat system comprising: providing a substrate having a photoresist thereon; illuminating the substrate through a reticle element; forming a first plurality of underlying grating images, the images having a repetitive and symmetrical pattern with equal spacing therebetween; forming a second plurality of latent grating images in the photoresist, the second plurality of images disposed above from the first plurality of images, the reticle element and the substrate indicating proper alignment when combination of the first and second plurality of images form a series of equally spaced repetitive patterns; and determining the position of at least one of the underlying and latent grading lines to provide alignment.
Claim 2
Independent Claim
115 words
A method of providing alignment in a step and repeat system comprising: providing a substrate having a photoresist thereon; illuminating the substrate through a reticle element; forming a first plurality of underlying grating images, the images having a repetitive and symmetrical pattern with equal spacing therebetween; forming a second plurality of latent grating images in the photoresist, the second plurality of images disposed above from the first plurality of images, the reticle element and the substrate indicating proper alignment when combination of the first and second plurality of images form a series of equally spaced repetitive patterns; and determining the position of at least one of the underlying and latent grading lines to provide alignment.
Claim 3
Dependent Claim
39 words
The method of claim 1 , wherein determining the position of at least one of the underlying and latent grating lines includes the step of inspecting the substrate to determine the position of the underlying and latent grating lines.
Claim 4
Dependent Claim
17 words
The method of claim 2 , wherein the grating images are formed of line and space features.
Claim 5
Dependent Claim
40 words
The method of claim 2 , further including the step of adjusting the position of the substrate with respect to the reticle element where the latent and underlying grating images do not initially form a pattern of equally spaced lines.
Claim 6
Independent Claim
106 words
A method of measuring alignment in a step and repeat system comprising: providing a substrate having a photoresist thereon; illuminating the substrate through a reticle element, forming a first plurality of underlying grating lines, the lines having a predetermined line pitch forming a second plurality of latent grating lines in the photoresist, the second plurality of lines disposed above from the first plurality of lines, the reticle element and the substrate indicating proper alignment when the combination of the first and second plurality of lines form a regular line-space pitch pattern; and determining the position of at least one of the underlying and latent grating lines.
Claim 7
Independent Claim
106 words
A method of measuring alignment in a step and repeat system comprising: providing a substrate having a photoresist thereon; illuminating the substrate through a reticle element, forming a first plurality of underlying grating lines, the lines having a predetermined line pitch forming a second plurality of latent grating lines in the photoresist, the second plurality of lines disposed above from the first plurality of lines, the reticle element and the substrate indicating proper alignment when the combination of the first and second plurality of lines form a regular line-space pitch pattern; and determining the position of at least one of the underlying and latent grating lines.
Claim 8
Dependent Claim
39 words
The method of claim 5 , wherein determining the position of at least one of the underlying and latent grating lines includes the step of inspecting the substrate to determine the position of the underlying and latent grating lines.
Claim 9
Dependent Claim
40 words
The method of claim 6 , further including the step of adjusting the position of the substrate with respect to the reticle element where the latent and underlying grating images do not initially form a pattern of equally spaced lines.
Claim 10
Dependent Claim
31 words
The method of claim 5 , wherein the line/pitch ratio of the combination of the second plurality of lines over and offset from the first plurality of lines is about 1:1.
Claim 11
Dependent Claim
22 words
The method of claim 5 , wherein the first and second plurality of lines are composed of a grating array of checkerboards.
Claim 12
Dependent Claim
36 words
The method of claim 5 , wherein the first and second plurality of images are each composed of a grating array of checkerboards and the combination of the images form a series of equally spaced lines.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-12-23 | 2006-06-24 | 2006-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-12-23 | 2010-06-24 | 2010-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-12-23 | 2014-06-24 | 2014-12-24 | $7700.00 | Window Closed / Lapsed |