Fluid treatment device with vibrational energy means for treating substrates

Claim 3

The method of claim 1 wherein said fluid is provided to said chamber using fluid injection.

Claim 4

The method of claim 1 further including directing said fluid through said chamber at said established rate substantially between said means for providing said vibrational energy and said substrate.

Claim 5

The method of claim 1 wherein said vibrational energy is provided to said fluid at a frequency of from about 10 kHz to about 50 kHz.

Claim 6

The method of claim 1 wherein said established rate of said substrate movement is from about one to about three inches per second.

Claim 7

A fluid treatment device comprising: a housing defining at least one chamber therein; means for providing a fluid to said chamber of said housing such that said fluid will provide chemical action and will move through said chamber and be maintained within said chamber at an established level, said fluid including vortex regions of turbulent flow within said device and a boundary layer region immediately adjacent at least one of said vortex regions and substantially not including vortices of said fluid therein; means for moving a substrate through said chamber of said housing in an established direction along a path of travel such that said substrate will be exposed to both said vortex regions and said boundary layer region of said fluid moving within said chamber for an established period; and means for providing vibrational energy to said fluid moving within said chamber to enhance the treatment of said substrate by said fluid by increasing said chemical action by said fluid, said means for providing vibrational energy positioned immediately adjacent said means for providing said fluid along said path of travel of said substrate and adapted for being partly submerged within said fluid within said chamber and being located adjacent said substrate as said substrate moves through said chamber, said means for providing vibrational energy focusing its vibrational energy at said boundary layer region of said fluid not including said vortices of said fluid therein while not being in physical contact with said housing, said boundary layer of said fluid being positioned substantially directly below said means for providing said vibrational energy along said path of travel and therefore immediately adjacent said means for providing said fluid to said chamber.

Claim 8

A fluid treatment device comprising: a housing defining at least one chamber therein; means for providing a fluid to said chamber of said housing such that said fluid will provide chemical action and will move through said chamber and be maintained within said chamber at an established level, said fluid including vortex regions of turbulent flow within said device and a boundary layer region immediately adjacent at least one of said vortex regions and substantially not including vortices of said fluid therein; means for moving a substrate through said chamber of said housing in an established direction along a path of travel such that said substrate will be exposed to both said vortex regions and said boundary layer region of said fluid moving within said chamber for an established period; and means for providing vibrational energy to said fluid moving within said chamber to enhance the treatment of said substrate by said fluid by increasing said chemical action by said fluid, said means for providing vibrational energy positioned immediately adjacent said means for providing said fluid along said path of travel of said substrate and adapted for being partly submerged within said fluid within said chamber and being located adjacent said substrate as said substrate moves through said chamber, said means for providing vibrational energy focusing its vibrational energy at said boundary layer region of said fluid not including said vortices of said fluid therein while not being in physical contact with said housing, said boundary layer of said fluid being positioned substantially directly below said means for providing said vibrational energy along said path of travel and therefore immediately adjacent said means for providing said fluid to said chamber.

Claim 9

The device according to claim 6 wherein said means for providing said fluid to said chamber of said housing comprises at least one fluid injector member having a plurality of fluid injector ports for having said fluid pass therethrough into said chamber of said housing.

Claim 10

The device according to claim 7 wherein said fluid injector member includes a plurality of rows of said injector ports, said rows being oriented substantially perpendicular to said direction of said substrate moving through said chamber of said housing.

Claim 11

The device according to claim 7 further including a second fluid injector member located within said housing such that said second fluid injector member will be located on an opposite side of said substrate from the other of said fluid injector members as said substrate moves through said chamber.

Claim 12

The device according to claim 9 wherein said housing includes at least one weir portion located relative to said second fluid injector member and adapted for having the fluid provided by said second fluid injector member pass thereover.

Claim 13

The device according to claim 6 wherein means for providing said vibrational energy comprises an ultrasonic horn.

Claim 14

The device according to claim 11 wherein said horn includes first and second projecting end portions, both of said end portions adapted for being at least partly submerged within said fluid maintained at said level within said chamber of said housing.

Claim 15

The device according to claim 12 wherein said horn further includes a body portion of substantially tapered configuration, said projecting end portions projecting from said body portion, said body portion not being submerged within said fluid.

Claim 16

The device according to claim 13 wherein said housing includes at least two chambers therein, each of said chambers adapted for having a separate substrate pass therethrough, each of said projecting end portions of said ultrasonic horn being located within said housing such that each of said end portions will be positioned within a respective one of said chambers adjacent a respective one of said substrates as said substrates move through said chambers.

Claim 17

The device according to claim 6 wherein said means for moving said substrate moves said substrate at a rate of travel through said chamber within the range of about one to about three inches per second.