US6762826B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate attracting and holding system for use in exposure apparatus
Assignee: Canon Inc
•
Filing: 2003-08-27
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Granted: 2004-07-13
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Expires: 2023-08-27
Abstract
Abstract A substrate attracting and holding system includes a holding table for holding a substrate, a protrusion provided on the holding table, the protrusion being disposed to be placed in a predetermined positional relationship with a position of an alignment mark to be used for processing the substrate or a position with respect to which an alignment mark is to be produced.
Inventors
- 👤 Izumi Tsukamoto
- 👤 Itaru Fujita
- 👤 Hideki Nogawa
- 👤 Yukio Takabayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:47
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70708; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
68 words
An apparatus for holding a substrate, said apparatus comprising: a table; protrusions, being provided on said table, on which the substrate is to be supported; and at least a portion of an attracting unit, said attracting unit attracting the substrate onto said protrusions, wherein said apparatus is arranged such that said protrusions are disposed in accordance with a pattern formed on or to be formed on the substrate.
Claim 2
Independent Claim
68 words
An apparatus for holding a substrate, said apparatus comprising: a table; protrusions, being provided on said table, on which the substrate is to be supported; and at least a portion of an attracting unit, said attracting unit attracting the substrate onto said protrusions, wherein said apparatus is arranged such that said protrusions are disposed in accordance with a pattern formed on or to be formed on the substrate.
Claim 3
Dependent Claim
35 words
An apparatus according to claim 1 , wherein the pattern is one of an alignment mark, a shot region, a die region, and a scribe line formed on or to be formed on the substrate.
Claim 4
Dependent Claim
24 words
An apparatus according to claim 1 , wherein an attracting force of said attracting unit is adjustable in accordance with regions on the substrate.
Claim 5
Dependent Claim
30 words
An apparatus according to claim 1 , wherein said apparatus is an exposure apparatus and further comprises an exposure unit for exposing the substrate to a pattern of an original.
Claim 6
Dependent Claim
34 words
A method of manufacturing a device, said method comprising the steps of: holding a substrate by use of an apparatus as recited in claim 1 ; and processing the substrate held by the apparatus.
Claim 7
Independent Claim
74 words
An apparatus for holding a substrate, said apparatus comprising: a chuck for supporting the substrate; a stage for holding said chuck; and a conveyance unit for conveying said chuck onto said stage, wherein said chuck conveyed by said conveyance unit is selected on the basis of information related to protrusions, being provided on said chuck, for supporting the substrate, and information related to a pattern formed on or to be formed on the substrate.
Claim 8
Independent Claim
74 words
An apparatus for holding a substrate, said apparatus comprising: a chuck for supporting the substrate; a stage for holding said chuck; and a conveyance unit for conveying said chuck onto said stage, wherein said chuck conveyed by said conveyance unit is selected on the basis of information related to protrusions, being provided on said chuck, for supporting the substrate, and information related to a pattern formed on or to be formed on the substrate.
Claim 9
Dependent Claim
35 words
An apparatus according to claim 6 , wherein the pattern is one of an alignment mark, a shot region, a die region, and a scribe line formed on or to be formed on the substrate.
Claim 10
Dependent Claim
36 words
An apparatus according to claim 6 , further comprising an attracting unit for attracting the substrate onto said chuck, wherein an attracting force of said attracting unit is adjustable in accordance with regions on the substrate.
Claim 11
Dependent Claim
30 words
An apparatus according to claim 6 , wherein said apparatus is an exposure apparatus and further comprises an exposure unit for exposing the substrate to a pattern of an original.
Claim 12
Dependent Claim
34 words
A method of manufacturing a device, said method comprising the steps of: holding a substrate by use of an apparatus as recited in claim 6 ; and processing the substrate held by the apparatus.
References Cited (Backward Citations)
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US5923408A
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US6137562A
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JP2821678B2
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US6184972B1
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US6426790B1
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-07-13 | 2008-01-12 | 2008-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-07-13 | 2012-01-12 | 2012-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-07-13 | 2016-01-12 | 2016-07-13 | $7700.00 | Window Closed / Lapsed |