US6794302B1
Expired / Lapsed
US
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Dynamic feed forward temperature control to achieve CD etching uniformity
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 2003-03-20
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Granted: 2004-09-21
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Expires: 2023-03-20
Abstract
Abstract A method for compensating CD variations across a semiconductor process wafer surface in a plasma etching process including a semiconductor wafer having a process surface comprising patterned features; carrying out a first plasma etching process wherein the semiconductor wafer is heated to at least two selectively controllable temperature zones; determining a first dimensional variation of etched features with respect to reference dimensions over predetermined areas of the process surface including the two selectively controllable temperature zones; determining operating temperatures for the two selectively controllable temperature zones to achieve a targeted dimensional variation change in the first dimensional variation to achieve a desired second dimensional variation; plasma etching the process surface to the desired operating temperatures; and, determining an actual dimensional variation change for use in at least one subsequent plasma etching process.
Inventors
- 👤 Li-Shiun Chen
- 👤 Ming-Ching Chang
- 👤 Huan-Just Lin
- 👤 Li-Te S. Lin
- 👤 Yung-Hog Chiu
- 👤 Hun-Jan Tao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 17:34
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
173 words
A method for compensating for CD variations across a semiconductor process wafer surface in a feed forward multi-step plasma etching process to achieve CD uniformity comprising the steps of: providing a semiconductor wafer having a process surface comprising patterned features for plasma etching; carrying out a first plasma etching process wherein the semiconductor wafer is heated to a first set of operating temperatures according to at least two selectively controllable temperature zones; determining a first dimensional variation of etched features with respect to reference dimensions over areas of the process surface comprising the at least two selectively controllable temperature zones; determining a second set of operating temperatures for the at least two selectively controllable temperature zones to achieve a targeted dimensional variation less than the first dimensional variation; plasma etching the process surface according to the second set of operating temperatures; and, determining and archiving a second dimensional variation correlated with the second set of operating temperatures for determining a third set of operating temperatures for carrying out a subsequent plasma etching process.
Claim 2
Independent Claim
173 words
A method for compensating for CD variations across a semiconductor process wafer surface in a feed forward multi-step plasma etching process to achieve CD uniformity comprising the steps of: providing a semiconductor wafer having a process surface comprising patterned features for plasma etching; carrying out a first plasma etching process wherein the semiconductor wafer is heated to a first set of operating temperatures according to at least two selectively controllable temperature zones; determining a first dimensional variation of etched features with respect to reference dimensions over areas of the process surface comprising the at least two selectively controllable temperature zones; determining a second set of operating temperatures for the at least two selectively controllable temperature zones to achieve a targeted dimensional variation less than the first dimensional variation; plasma etching the process surface according to the second set of operating temperatures; and, determining and archiving a second dimensional variation correlated with the second set of operating temperatures for determining a third set of operating temperatures for carrying out a subsequent plasma etching process.
Claim 3
Dependent Claim
28 words
The method of claim 1 , wherein the at least two selectively controllable temperature zones comprise a wafer holding surface in heat exchange relationship with the semiconductor wafer.
Claim 4
Dependent Claim
29 words
The method of claim 2 , wherein the at least two selectively controllable temperature zones are disposed radially concentric to one another contacting a backside of the semiconductor wafer.
Claim 5
Dependent Claim
37 words
The method of claim 1 , wherein the step of determining a second set of operating temperatures further comprises reference to a previously determined mathematical relationship between operating temperatures and dimensional variations following a plasma etching process.
Claim 6
Dependent Claim
35 words
The method of claim 1 , wherein the step of determining a second set of operating temperatures further comprises reference to an archive of previous operating temperatures and dimensional variations following a plasma etching process.
Claim 7
Dependent Claim
13 words
The method of claim 5 , wherein the archive comprises a relational database.
Claim 8
Dependent Claim
21 words
The method of claim 1 , further comprising minimizing a difference between the targeted dimensional variation and the archived dimensional variations.
Claim 9
Dependent Claim
26 words
The method of claim 7 , wherein minimizing a difference comprises a methodology selected from the group consisting of a linear and non-linear least squares analysis.
Claim 10
Independent Claim
152 words
A method for achieving CD uniformity in a feed forward multi-step plasma etching process comprising the steps of: providing a semiconductor wafer having a process surface comprising a plurality of photoresist patterned features; determining first critical dimensions (CD) of the photoresist patterned features; carrying out a first plasma etching process to form a first plurality of etched features at first wafer temperatures according to at least two selectively controllable temperature zones; determining a first CD variation of the plurality of etched features with respect to the first critical dimensions (CD) over areas of the process surface comprising the at least two selectively controllable temperature zones; adjusting first wafer temperatures to second wafer temperatures for etching the plurality of etched features in a second plasma etching step to achieve a targeted second CD variation less than the first CD variation; and, carrying out the second plasma etching step at the second wafer temperatures.
Claim 11
Independent Claim
152 words
A method for achieving CD uniformity in a feed forward multi-step plasma etching process comprising the steps of: providing a semiconductor wafer having a process surface comprising a plurality of photoresist patterned features; determining first critical dimensions (CD) of the photoresist patterned features; carrying out a first plasma etching process to form a first plurality of etched features at first wafer temperatures according to at least two selectively controllable temperature zones; determining a first CD variation of the plurality of etched features with respect to the first critical dimensions (CD) over areas of the process surface comprising the at least two selectively controllable temperature zones; adjusting first wafer temperatures to second wafer temperatures for etching the plurality of etched features in a second plasma etching step to achieve a targeted second CD variation less than the first CD variation; and, carrying out the second plasma etching step at the second wafer temperatures.
Claim 12
Dependent Claim
29 words
The method of claim 9 , wherein the at least two selectively controllable temperature zones are disposed radially concentric to one another contacting a backside of the semiconductor wafer.
Claim 13
Dependent Claim
24 words
The method of claim 9 , wherein the steps of determining, adjusting, and plasma etching are sequentially repeated to approach a CD variation window.
Claim 14
Dependent Claim
29 words
The method of claim 9 , wherein the step of adjusting wafer temperatures further comprises reference to a previously determined mathematical relationship between the wafer temperatures and CD variation.
Claim 15
Dependent Claim
25 words
The method of claim 9 , wherein the step of adjusting wafer temperatures further comprises reference to archived values of wafer temperatures and CD variation.
Claim 16
Dependent Claim
23 words
The method of claim 13 , wherein adjusting wafer temperatures comprises minimizing a difference between the targeted CD variation and archived CD variation.
Claim 17
Dependent Claim
35 words
The method of claim 9 , further comprising the steps of: determining the a second CD variation; and, adding the results of the second CD variation in association with the wafer temperatures to an archive.
Claim 18
Dependent Claim
13 words
The method of claim 15 , wherein the archive comprises a relational database.
Claim 19
Dependent Claim
20 words
The method of claim 9 , wherein the first and second CD variations are determined by scanning electron microscope examination.
Claim 20
Dependent Claim
20 words
The method of claim 1 , wherein the first and second dimensional variation are determined by scanning electron microscope examination.
Claim 21
Dependent Claim
19 words
The method of claim 1 , wherein the step of archiving a second dimensional variation comprises updating a database.
Claim 22
Dependent Claim
30 words
The method of claim 1 , wherein the at least two selectively controllable temperature zones comprise temperatures selected from the group consisting of about the same temperatures and different temperatures.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-09-21 | 2008-03-22 | 2008-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-09-21 | 2012-03-22 | 2012-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-09-21 | 2016-03-22 | 2016-09-21 | $7700.00 | Window Closed / Lapsed |