US6869890B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Processing apparatus to be sealed against workpiece
Assignee: Ebara Corp
•
Filing: 2002-01-03
•
Granted: 2005-03-22
•
Expires: 2022-01-03
Abstract
Abstract A processing apparatus is used for processing a workpiece such as a semiconductor wafer. The processing apparatus comprises a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.
Inventors
- 👤 Nobuharu Noji
- 👤 Hiroshi Sobukawa
- 👤 Masami Nagayama
- 👤 Koji Ono
- 👤 Mutsumi Saito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:57
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4409; B; B08; B08B; B08B3/00; B08B3/04; B08B3/041; C23C16/04; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0441
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
83 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion at a lower end of said cover for sealing said process chamber when formed, said sealing portion to be provided between said cover and the surface of the workpiece so as to face the surface of the workpiece.
Claim 2
Dependent Claim
83 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion at a lower end of said cover for sealing said process chamber when formed, said sealing portion to be provided between said cover and the surface of the workpiece so as to face the surface of the workpiece.
Claim 3
Dependent Claim
24 words
The processing apparatus according to claim 1 , wherein said sealing portion comprises at least one of a contact seal and a non-contact seal.
Claim 4
Dependent Claim
94 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece, and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, said sealing portion comprising at least one of a contact seal and a non-contact seal, wherein said contact seal comprises at least one of an O-ring and an oil seal.
Claim 5
Dependent Claim
94 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece, and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, said sealing portion comprising at least one of a contact seal and a non-contact seal, wherein said contact seal comprises at least one of an O-ring and an oil seal.
Claim 6
Dependent Claim
97 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, said sealing portion comprising at least one of a contact seal and a non-contact seal, wherein said non-contact seal comprises at least one of a magnetic fluid seal and a differential pumping seal.
Claim 7
Dependent Claim
97 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, said sealing portion comprising at least one of a contact seal and a non-contact seal, wherein said non-contact seal comprises at least one of a magnetic fluid seal and a differential pumping seal.
Claim 8
Dependent Claim
86 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed; and a chemical vapor deposition device in said process chamber, when formed, for depositing a thin film on the surface of the workpiece.
Claim 9
Dependent Claim
86 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed; and a chemical vapor deposition device in said process chamber, when formed, for depositing a thin film on the surface of the workpiece.
Claim 10
Dependent Claim
86 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed; and a chemical liquid cleaning device in said process chamber, when formed, for cleaning the surface of the workpiece with a chemical liquid.
Claim 11
Dependent Claim
86 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed; and a chemical liquid cleaning device in said process chamber, when formed, for cleaning the surface of the workpiece with a chemical liquid.
Claim 12
Dependent Claim
76 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed; and a sensor for detecting conditions of the surface of the workpiece.
Claim 13
Dependent Claim
76 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed; and a sensor for detecting conditions of the surface of the workpiece.
Claim 14
Dependent Claim
30 words
The processing apparatus according to claim 7 , further comprising an adjustment device for adjusting processing conditions in said process chamber, when formed, based on a signal from said sensor.
Claim 15
Dependent Claim
81 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, wherein the surface of said workpiece is to be processed under a pressure lower than atmospheric pressure.
Claim 16
Dependent Claim
81 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, wherein the surface of said workpiece is to be processed under a pressure lower than atmospheric pressure.
Claim 17
Dependent Claim
78 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, wherein the surface of the workpiece is to be processed under a wet condition.
Claim 18
Dependent Claim
78 words
A processing apparatus for processing a workpiece, comprising: a cover for covering a portion of a surface, to be processed, of the workpiece; a process chamber to be formed by said cover and the surface, to be processed, of the workpiece; and a sealing portion to be provided between said cover and the surface of the workpiece for sealing said process chamber when formed, wherein the surface of the workpiece is to be processed under a wet condition.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-03-21 | 2008-09-20 | 2009-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-03-21 | 2012-09-20 | 2013-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-03-21 | 2016-09-20 | 2017-03-22 | $7700.00 | Window Closed / Lapsed |