Patent EP0032230A2 successfully refreshed from Google Patents.
EP0032230A2
Expired / Lapsed
EP
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Integrated magnetic transducer and method of manufacturing the same
Assignee: Siemens AG
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Filing: 1980-12-22
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Granted: —
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Expires: 2000-12-22
Abstract
Abstract There is disclosed an integrated magnetic transducer for recording and reproducing high frequency electrical signals on a magnetic recording medium and a method of manufacturing the transducer. A silicon substrate has a preferably V-shaped groove with two sides and two ends extending through the silicon substrate. Over the sides of the V-shaped groove a layer of magnetically inductive material is disposed which forms the pole pieces of the transducer. An electrically conductive layer covers this layer of magnetically inductive material and fills the space within the V-shaped groove. Another layer of magnetically inductive material is disposed over the electrically conductive layer. This second magnetically inductive layer completes the magnetic circuit. Means for contacting the electrically conductive layer at opposite ends of the V-shaped groove supply the electrically conductive layer with electrical current. The converging layers of said magnetically inductive material forming the pole pieces of the magnetic transducer are spaced apart at the apex of the V-shaped groove to form a transducer gap.
Inventors
- 👤 Wolfgang Kayser
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 07:43
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/187; G11B5/1871; G11B5/31; G11B5/3103; G11B5/3109; G11B5/313; G11B5/3163; G11B5/3176
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
143 words
An integrated magnetic transducer for recording and reproducing high frequency electrical signals on a magnetic recording medium, said transducer comprising: a) a silicon substrate with a groove having two sides and two ends extending into the silicon substrate; b) a layer of magnetically inductive material disposed over the surface of said groove; c) an electrically conductive layer disposed over said layer of magnetically inductive material within said groove; d) a second layer of magnetically inductive material disposed over said electrically conductive layer and magnetically contacted to said first magnetically inductive layer to complete the magnetic circuit; and e) means for contacting the electrically conductive layer at opposite ends of said groove, whereby the converging layers of said magnetically inductive material form the pole pieces of the magnetic transducer which are spaced apart at the apex of the groove to form a transducer gap.
Claim 2
Dependent Claim
143 words
An integrated magnetic transducer for recording and reproducing high frequency electrical signals on a magnetic recording medium, said transducer comprising: a) a silicon substrate with a groove having two sides and two ends extending into the silicon substrate; b) a layer of magnetically inductive material disposed over the surface of said groove; c) an electrically conductive layer disposed over said layer of magnetically inductive material within said groove; d) a second layer of magnetically inductive material disposed over said electrically conductive layer and magnetically contacted to said first magnetically inductive layer to complete the magnetic circuit; and e) means for contacting the electrically conductive layer at opposite ends of said groove, whereby the converging layers of said magnetically inductive material form the pole pieces of the magnetic transducer which are spaced apart at the apex of the groove to form a transducer gap.
Claim 3
Dependent Claim
29 words
An integrated magnetic transducer as defined in claim l,wherein the groove comprises a V-shaped groove extending through the silicon substrate, such that the apex of said groove is missing.
Claim 4
Dependent Claim
36 words
An integrated magnetic transducer as defined in claim 1, wherein the groove comprises a flat bottomed groove having a bottom part which is intersected such that a centered slotted hole through the bottom part is formed.
Claim 5
Dependent Claim
22 words
An integrated magnetic transducer as defined in any one of the claims 1-3,wherein the silicon substrate is comprising of a 100-crystal silicon.
Claim 6
Dependent Claim
23 words
An integrated magnetic transducer as defined in any one of the claims 1-3,wherein the first layer of magnetically inductive material comprises nickel iron.
Claim 7
Dependent Claim
44 words
An integrated magnetic transducer as defined in claim 5, wherein the second layer of magnetically inductive material is of different type and different thickness in reference to the respective first layer of magnetically inductive material, whereby the leakage of the magnetic field is reduced.
Claim 8
Dependent Claim
20 words
An integrated magnetic transducer as defined in any one of the claims 1-3, wherein the electrically conductive layer comprises gold.
Claim 9
Dependent Claim
22 words
An integrated magnetic transducer as defined in any one of the claims 1-3, wherein the electrically conductive layer comprises sintered aluminum powder.
Claim 10
Dependent Claim
80 words
An integrated magnetic transducer as defined in any one of the claims 1-3, wherein the means for contacting the electrically conductive layer at opposite ends of the groove form contact leads in a plane on the surface of the silicon substrate, said contact leads extend perpendicular to the horizontal axis of the groove; and the second layer of magnetically inductive material disposed on the surface of the silicon substrate is spaced apart on both sides from the neighboring contact leads.
Claim 11
Dependent Claim
72 words
An integrated.magnetic transducer as defined in any one of the claims 1-3, comprising: a) a first insulating layer disposed on the surface of the groove underneath the first layer of magnetically inductive material; b) a second insulating layer disposed between the first layer of magnetically inductive material and the electrically conductive layer; and c) a third insulating layer disposed between the electrically conductive layer and the second layer of magnetically inductive material.
Claim 12
Dependent Claim
16 words
An integrated magnetic transducer as defined in claim 10, wherein the insulating layers comprise silicon dioxide.
Claim 13
Dependent Claim
40 words
An integrated magnetic transducer as defined in any one of ,the claims 1-3, comprising: a) a multiplicity of said grooves aligned in a row and spaced apart from the respective neighboring grooves to form magnetic heads of a multi-channel device.
Claim 14
Dependent Claim
32 words
An integrated magnetic transducer as defined in claim 12, further comprising: electronic read and write circuits integrated into the silicon substrate which circuits are connected to magnetic transducers via respective contact leads.
Claim 15
Independent Claim
123 words
A method of manufacturing an integrated magnetic transducer for recording and reproducing high frequency electrical signals on a magnetic recording medium, said method comprising the steps of: a) etching a V-shaped groove with declining sides into silicon substrate by an anisotropic etching process; b) disposing a first layer of magnetically inductive material over the sides of said groove; c) disposing an electrically conductive layer over said first layer of magnetically inductive material within said groove; d) disposing a second layer of magnetically inductive material over said electrically conductive layer such that both layers of magnetically inductive material are magnetically contacted; and e) disposing means for contacting said electrically conductive layer at opposite ends of said groove on the surface of said silicon substrate.
Claim 16
Independent Claim
123 words
A method of manufacturing an integrated magnetic transducer for recording and reproducing high frequency electrical signals on a magnetic recording medium, said method comprising the steps of: a) etching a V-shaped groove with declining sides into silicon substrate by an anisotropic etching process; b) disposing a first layer of magnetically inductive material over the sides of said groove; c) disposing an electrically conductive layer over said first layer of magnetically inductive material within said groove; d) disposing a second layer of magnetically inductive material over said electrically conductive layer such that both layers of magnetically inductive material are magnetically contacted; and e) disposing means for contacting said electrically conductive layer at opposite ends of said groove on the surface of said silicon substrate.
Claim 17
Dependent Claim
85 words
A method of manufacturing an integrated magnetic transducer as defined in claim 14, further comprising the following steps after processing the steps a) through c): f) backgrinding the silicon substrate from its bottom surface until the apex of the V-shaped groove is reached; and g) lapping said bottom surface of the silicon substrate to a level below the apex of said V-shaped groove until the spacing of free set ends of the first layer of magnetically inductive material is sufficient to form a transducer gap.
Claim 18
Dependent Claim
67 words
A method of manufacturing an integrated magnetic transducer as defined in claim 14, wherein the etching step comprises the step of: etching into the silicon substrate a V-shaped groove until the apex of said groove extends through said silicon substrate, whereby a slotted hole is etched into the silicon substrate the dimensions of which hole are defined such that the transducer gap is to be arranged therein.
Claim 19
Independent Claim
175 words
A method of manufacturing an integrated magnetic transducer for recording and reproducting high frequency electrical signals on a magnetic recording medium, said method comprising the steps of: a) etching a flat bottomed groove having declining sides and a flat bottom part into a silicon substrate by an anisotropic etching process; b) stopping said etching process when a desired depth of the groove is reached; c) forming a centered slotted hole through the flat bottom part of said groove to obtain a properly dimensioned notch wherein a transducer gap is to be arranged; . d) disposing a first layer of magnetically inductive material over the sides of said flat bottomed groove; e) disposing an electrically conductive layer over said first layer of magnetically inductive material within said groove; f) disposing a second layer of magnetically inductive material over said electrically conductive layer, such that both layers of magnetically inductive material are magnetically contacted; and g) disposing means for contacting said electrically conductive layer at opposite ends of said groove on the surface of said silicon substrate.
Claim 20
Independent Claim
175 words
A method of manufacturing an integrated magnetic transducer for recording and reproducting high frequency electrical signals on a magnetic recording medium, said method comprising the steps of: a) etching a flat bottomed groove having declining sides and a flat bottom part into a silicon substrate by an anisotropic etching process; b) stopping said etching process when a desired depth of the groove is reached; c) forming a centered slotted hole through the flat bottom part of said groove to obtain a properly dimensioned notch wherein a transducer gap is to be arranged; . d) disposing a first layer of magnetically inductive material over the sides of said flat bottomed groove; e) disposing an electrically conductive layer over said first layer of magnetically inductive material within said groove; f) disposing a second layer of magnetically inductive material over said electrically conductive layer, such that both layers of magnetically inductive material are magnetically contacted; and g) disposing means for contacting said electrically conductive layer at opposite ends of said groove on the surface of said silicon substrate.
Claim 21
Independent Claim
174 words
A method of manufacturing an integrated magnetic transducer for recording and reproducing high frequency electrical signals on a magnetic recording medium, said method comprising the steps of: a) etching a flat bottomed groove having declining sides and a flat bottom part into a silicon substrate by an anisotropic etching process; b) stopping said etching process when a desired depth of the groove is reached; c) disposing a first layer of magnetically inductive material over the sides of said flat bottomed groove; d) forming a centered slotted hole through the flat bottom part of said groove to obtain a properly dimensioned notch wherein a transducer gap is to be arranged; e) disposing an electrically conductive layer over said first layer of magnetically inductive material within said groove; f) disposing a second layer of magnetically inductive material over said electrically conductive layer, such that both layers of magnetically inductive material are magnetically contacted; and g) disposing means for contacting said electrically conductive layer at opposite ends of said groove on the surface of said silicon substrate.
Claim 22
Independent Claim
174 words
A method of manufacturing an integrated magnetic transducer for recording and reproducing high frequency electrical signals on a magnetic recording medium, said method comprising the steps of: a) etching a flat bottomed groove having declining sides and a flat bottom part into a silicon substrate by an anisotropic etching process; b) stopping said etching process when a desired depth of the groove is reached; c) disposing a first layer of magnetically inductive material over the sides of said flat bottomed groove; d) forming a centered slotted hole through the flat bottom part of said groove to obtain a properly dimensioned notch wherein a transducer gap is to be arranged; e) disposing an electrically conductive layer over said first layer of magnetically inductive material within said groove; f) disposing a second layer of magnetically inductive material over said electrically conductive layer, such that both layers of magnetically inductive material are magnetically contacted; and g) disposing means for contacting said electrically conductive layer at opposite ends of said groove on the surface of said silicon substrate.
Claim 23
Dependent Claim
52 words
A method of manufacturing an integrated magnetic transducer as defined in claim 18 further comprising the step of: h) backgrinding the silicon substrate from its bottom surface, whereby a sufficient short distance between the layer of magnetically inductive material and said bottom surface is achieved to optimize the sensitivity of the transducer.
Claim 24
Dependent Claim
52 words
A method of manufacturing an integrated magnetic transducer as defined in claim 18, further comprising the step of: i) etching the silicon substrate from its bottom surface, whereby a sufficient short distance between the layer of magnetically inductive material and said bottom surface is achieved to optimize the sensitivity of the transducer.
References Cited (Backward Citations)
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