Plasma monitor

Claim 2

In a plasma monitor for measuring a particular chemical species inside plasma generated in a instrument in order to grasp the operative condition inside said instrument making use of the plasma, the improvement characterized by means (11) for generating laser light having a wavelength exciting a chemical species to be measured and moving the radiating position of the laser light to the plasma so as to scan the plasma; and means (31) for receiving the fluorescence generated by the chemical species excited by the laser light, determining the concentration of the chemical species on the basis of the intensity of the fluorescence, determining the measuring position on the basis of the scanning position and the receiving position of the laser light and displaying the measuring position as well as the concentration of the chemical species at that measuring position.

Claim 3

In a plasma monitor for measuring a particular chemical species inside plasma generated in a instrument in order to grasp the operative condition inside said instrument making use of the plasma, the improvement comprising: laser light generation means (11) for generating laser light having a particular wavelength for exciting a particular chemical species contained in the plasma and letting it generate fluorescence; scanning means (21) for moving the radiating position of the laser light generated by said laser light generation means to the plasma and thus scanning the plasma by the laser light; light receiving means (31) for receiving the plasma inside the light receiving angle thereof and the fluorescence generated by the chemical species excited by the laser light, and capable of changing the light receiving position; detection means (41) for taking out the fluorescence generated by the particular chemical species among the light received by said light receiving means and converting it into an electric signal in accordance with the intensity of the fluorescence; control means (35) for calculating the ordinates of the detection position inside the plasma from the instruction signal given by said control means (35) to said scanning means (21) and to said light receiving means (31), and calculating the concentration of the particular chemical species at the detection position on the basis of the electric signal applied thereto by said detection means (41); and display means for displaying the results of calculation applied thereto by said control means.

Claim 4

In a plasma monitor for measuring a particular chemical species inside plasma generated in a instrument in order to grasp the operative condition inside said instrument making use of the plasma, the improvement comprising: laser light generation means (11) for generating laser light having a particular wavelength for exciting a particular chemical species contained in the plasma and letting it generate fluorescence; scanning means (21) for moving the radiating position of the laser light generated by said laser light generation means to the plasma and thus scanning the plasma by the laser light; light receiving means (31) for receiving the plasma inside the light receiving angle thereof and the fluorescence generated by the chemical species excited by the laser light, and capable of changing the light receiving position; detection means (41) for taking out the fluorescence generated by the particular chemical species among the light received by said light receiving means and converting it into an electric signal in accordance with the intensity of the fluorescence; control means (35) for calculating the ordinates of the detection position inside the plasma from the instruction signal given by said control means (35) to said scanning means (21) and to said light receiving means (31), and calculating the concentration of the particular chemical species at the detection position on the basis of the electric signal applied thereto by said detection means (41); and display means for displaying the results of calculation applied thereto by said control means.