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Beam divider

Assignee: Carl Zeiss SMT GmbH
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Filing: 1983-03-29
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Granted: —
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Expires: 2003-03-29
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Abstract

Abstract Translated from German Der Strahlteiler besteht aus einem Phasengitter (5), das den größten Teil der Strahlung eines zwei Moden-Lasers (1) in nullter Ordnung transmittiert und einen Teil der Intensität der Strahlung symmetrisch in die 1. bzw. -1. Ordnung abbeugt. Die Intensität der den beiden Moden zugeordneten, senkrecht zueinander polarisierten Komponenten der Strahlung wird von Detektoren (11, 12) gemessen, denen Polarisationsfolien (9, 10) als Analysatoren vorgeschaltet sind, und zur Regelung der Mittenfrequenz der Laserröhre (1) verwendet. The beam splitter consists of a phase grating (5), which transmits most of the radiation of a two-mode laser (1) in zero order and part of the intensity of the radiation symmetrically in the 1st or -1. Bends order. The intensity of the radiation components which are polarized perpendicular to one another and are assigned to the two modes is measured by detectors (11, 12), to which polarization foils (9, 10) are connected upstream as analyzers, and used to regulate the center frequency of the laser tube (1).

Inventors

  • 👤 Peter Dipl.-Ing. Vogt
  • 👤 Horst Prof. Dr. Dipl.-Ing. Kunzmann

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-08 13:06
CPC Classifications
G; G01; G01J; G01J4/00; G01J4/04; G02; G02B; G02B27/00; G02B27/10; G02B27/108; G02B27/1086; G02B27/1093; H; H01; H01S; H01S3/00; H01S3/10; H01S3/13; H01S3/139

Claims Analysis

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References Cited (Backward Citations)

US3701042A Cited
GB1448676A Cited
US4139257A Cited
DE3003467A1 Cited

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