Patent EP0126266A2 successfully refreshed from Google Patents.
EP0126266A2
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EP
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Low striation positive resist composition
Assignee: Microsi Inc (a Delaware Corporation) Te Phoenix
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Filing: 1984-04-10
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Granted: —
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Expires: 2004-04-10
Abstract
Abstract A novel photoresist formulation is provided which provides low striations and excellent wetting properties. The photoresist composition may be applied by spin casting on various substrates used in integrated circuit manufacture. The essential component in this invention is the solvent composition which consists of cyclopentanone (or cyclopentanone-cyclohexanone blend) in combination with an aliphatic alcohol of 5-12 carbon atoms. These solvent components when used in certain specific ratios provide unexpectedly good wetting of various substrates and low striation films.
Inventors
- 👤 James Marvin Lewis
- 👤 Robert Austin Owens
- 👤 Richard Francis Sweeney
- 👤 Ronald Warren Wake
- 👤 Robert Eugene Rinehart
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 07:42
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/022; G03F7/0226; G03F7/0048; G03F7/016
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
78 words
A positive photoresist composition comprising an admixture in solution of: (a) a diazo ketone photosensitive compound (b) an alkali soluble resin (c) a cyclic ketone solvent selected from the group consisting of cyclopentanone and blends of cyclopentanone and cyclohexanone and (d) an aliphatic alcohol solvent having from 5 to 12 carbon atoms and wherein the cyclic ketone comprises at least 20 percent of the total solvent and the alcohol comprises at least 10 percent of the total solvent.
Claim 2
Dependent Claim
78 words
A positive photoresist composition comprising an admixture in solution of: (a) a diazo ketone photosensitive compound (b) an alkali soluble resin (c) a cyclic ketone solvent selected from the group consisting of cyclopentanone and blends of cyclopentanone and cyclohexanone and (d) an aliphatic alcohol solvent having from 5 to 12 carbon atoms and wherein the cyclic ketone comprises at least 20 percent of the total solvent and the alcohol comprises at least 10 percent of the total solvent.
Claim 3
Dependent Claim
11 words
The composition of claim 1 wherein the cyclic ketone is cyclopentanone.
Claim 4
Dependent Claim
21 words
The composition of claim 2 wherein the aliphatic alcohol solvent is selected from n-hexanol, n-octanol, 2-octanol, 1-heptanol, 2-methyl-l-pentanol and mixtures thereof.
Claim 5
Dependent Claim
29 words
The composition of claim 1 wherein the photosensitive compound selected from the group consisting of is 2,3,4-tris(6-diazo-5,6-dihydro-5-oxo-I-naphthalene- sulfonyloxy)benzophenone, 2-hydroxy-3,4-bis(6-diazo-5,6-dihydro-5-oxo-l-naphthalenesulfonyloxy)benzophenone, 2,4-bis(6-diazo-5,6-dihydro-5-oxo-l-naphthalenesulfony- loxy)benzophenone, 2,3-dihydroxy-4-(6-diazo-5,6-dihydro-5-oxo-l-naphthalenesulfonyloxy)benzophenone, 2-hydroxy-4-(6-diazo-5,6-dihydro-5-oxo-1-naphthalenesulfony- loxy)benzophenone, 2,3-dibromo-1-(6-diazo-5,6-dihydro-5-oxo-1-naphthalenesulfonyloxy)propane, 2,4-bis(6-diazo-5,6-dihydro-5-oxo-l-naphthalenesulfonyloxy)benzophenone and mixtures thereof.
Claim 6
Dependent Claim
16 words
The composition of claim 1 wherein the photosensitive compound is a mixture of 2-hydroxy-4-(6-diazo-5,6-dihydro-5-oxo-1-naphthalenesulfonyloxy)benzophenone and 2,4-bis(6-diazo-5,6-dihydro-5-oxo-l-naphthalenesulfonyloxy)benzophenone.
Claim 7
Dependent Claim
18 words
The composition of claim 1 wherein the photosensitive compound is a mixture of 2,3,4-tris(6-diazo-5,6-dihydro-5-oxo-l-naphthalenesulfonyloxy)benzophenone; 2-hydroxy-3,4-bis(6-diazo-5,6-dihydro-5-oxo-l-naphthalenesulfonyloxy)benzophenone and 2,3-dihydroxy-4-(6-diazo-5-6-dihydro-5-oxo-l-naphthalenesulfonyl- oxy)benzophenone.
Claim 8
Dependent Claim
23 words
The composition of claim 2 wherein the aliphatic alcohol is selected from the group consisting of 2-octanol, 1-heptanol, 2-methyl-l-pentanol, n-hexanol, n-octanol, and n-hexanol.
Claim 9
Dependent Claim
29 words
The composition of claim 4 wherein the cyclic ketone is cyclopentanone and the aliphatic alcohol is selected from n-hexanol, n-octanal, 2-octanol, 1-heptanol, 2-methyl-l-pentanol and mixture of these aliphatic alcohols.
References Cited (Backward Citations)
No citation records indexed.
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