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Method for coating substrates with a film by cathode sputtering

Assignee: PPG Industries Inc
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Filing: 1984-09-03
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Granted: —
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Expires: 2004-09-03
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Abstract

Abstract A method is disclosed for improving the adhesion, stability and durability of sputtered metal films such as silver and copper by means of a primer layer of a metal such as stainless steel, which bonds oxidatively to the substrate surface, and/or a protective overcoat of a metal such as stainless steel, which forms a dense oxide.

Inventors

  • 👤 Russell Caldwell Criss
  • 👤 Frank Howard Gillery

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-07 20:26
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/34; C03C17/36; C03C17/3602; C03C17/3607; C03C17/3613; C03C17/3642; C03C17/3652; C03C17/3657; C03C17/366; C03C17/3689; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/16; C23C14/18; C03C2217/00; C03C2217/70; C03C2217/78

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 66 words
In a method for coating a substrate with a film by cathode sputtering, wherein the film comprises a metal characterized by low adhesion to the substrate surface, the improvement which comprises first depositing onto the substrate surface a primer layer of a metal which bonds oxidatively to the substrate surface and subsequently sputtering at least one film of the low adhesion metal onto the primer layer.
Claim 2
Dependent Claim 66 words
In a method for coating a substrate with a film by cathode sputtering, wherein the film comprises a metal characterized by low adhesion to the substrate surface, the improvement which comprises first depositing onto the substrate surface a primer layer of a metal which bonds oxidatively to the substrate surface and subsequently sputtering at least one film of the low adhesion metal onto the primer layer.
Claim 3
Dependent Claim 12 words
The improved method according to claim 1, wherein the substrate is glass.
Claim 4
Dependent Claim 31 words
The improved method according to claims 1 or 2, wherein the primer metal is selected from the group consisting of stainless steel, titanium, chromium, vanadium, aluminum, tin, tantalum and nickel alloys.
Claim 5
Dependent Claim 29 words
The improved method according to claims 1 to 3, wherein the low adhesion metal is selected from the group consisting of gold, silver, copper, platinum, palladium, and mixtures thereof.
Claim 6
Dependent Claim 40 words
5 . The improved method according to claims 1 to 4, wherein the primer metal is selected from the group consisting of stainless steel and titanium, and the sputtered metal is selected from the group consisting of silver and copper.
Claim 7
Dependent Claim 21 words
The improved method according to claims 1 to 5, wherein primer and film layers are deposited by magnetically enhanced cathode sputtering.
Claim 8
Dependent Claim 49 words
An article of manufacture comprising a coating of a metal selected from the group consisting of silver, copper, gold, platinum, palladium and mixtures thereof on a nonmetallic substrate, characterized by a primer layer of a metal which bonds oxidatively with the substrate surface between the substrate and the coating.
Claim 9
Dependent Claim 49 words
An article of manufacture comprising a coating of a metal selected from the group consisting of silver, copper, gold, platinum, palladium and mixtures thereof on a nonmetallic substrate, characterized by a primer layer of a metal which bonds oxidatively with the substrate surface between the substrate and the coating.
Claim 10
Dependent Claim 33 words
An article of claim 7 characterized in that the substrate is glass, the primer layer is stainless steel and the coating comprises a first layer of silver and a second layer of copper.
Claim 11
Dependent Claim 41 words
In a method for coating a substrate with at least one elemental metal film by cathode sputtering, the improvement which comprises depositing over the elemental metal film or films a protective overcoat of a metal which forms a dense oxide surface.
Claim 12
Dependent Claim 41 words
In a method for coating a substrate with at least one elemental metal film by cathode sputtering, the improvement which comprises depositing over the elemental metal film or films a protective overcoat of a metal which forms a dense oxide surface.
Claim 13
Dependent Claim 32 words
The method according to claim 9, wherein the substrate is glass and the overcoat is selected from the group consisting of stainless steel, titanium, vanadium, chromium, aluminium, tin, tantalum and nickel alloys.
Claim 14
Independent Claim 23 words
The method according to claims 9-10, wherein the substrate is first coated with a primer metal which bonds oxidatively with the glass surface.
Claim 15
Independent Claim 41 words
The method according to claims 9-11, wherein the elemental metal film is selected from the group consisting of silver, gold, platinum, palladium, copper and mixtures thereof and the overcoat metal is selected from the group consisting of stainless steel and titanium.
Claim 16
Independent Claim 21 words
The method according to claims 9-12, wherein primer, elemental metal film layers and overcoat are deposited by magnetically enhanced cathode sputtering.
Claim 17
Independent Claim 37 words
The method according to claims 9-13, wherein the substrate is glass, the primer layer is stainless steel, the elemental metal film comprises a layer of silver and a layer of copper, and the overcoat is stainless steel.
Claim 18
Dependent Claim 61 words
An article of manufacture comprising a coating of a metal selected from the group consisting of silver, copper, gold, platinum, palladium and mixtures thereof on a nonmetallic substrate, characterized by a protective overcoat of a metal which forms a dense oxide surface layer; and optionally, a primer layer which bonds oxidatively to the substrate surface between the substrate and the coating.
Claim 19
Dependent Claim 61 words
An article of manufacture comprising a coating of a metal selected from the group consisting of silver, copper, gold, platinum, palladium and mixtures thereof on a nonmetallic substrate, characterized by a protective overcoat of a metal which forms a dense oxide surface layer; and optionally, a primer layer which bonds oxidatively to the substrate surface between the substrate and the coating.
Claim 20
Dependent Claim 55 words
An article according to claim 15, wherein a. the substrate is glass; b. the primer layer and overcoat are selected from the group consisting of stainless steel, titanium, vanadium, chromium, aluminium, tin, tantalum and nickel alloys; and c. the coating is selected from the group consisting of gold, silver, copper, plantinum, palladium and mixtures thereof.

References Cited (Backward Citations)

DE2334152B2 Cited
DE2924824B2 Cited
DE2924833B2 Cited
US4342632A Cited
DE3118957A1 Cited

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