Abstract A pure water manufacturing apparatus for producing ultra pure water to be used in the electronic and medical industries. This apparatus comprises a pure water circulation system consisting of a pure water storage tank (11), a first heat exchanger (13) arranged at the downstream side of the tank (11) for thermally sterilizing pure water, a filter (14) arranged at the downstream side of the first heat exchanger (13) for removing dead bacteria, a pure water circulating means (12), and a second heat exchanger (15) for cooling pure water disposed between the filter (14) and a terminal device (17a, 17b, 17c) at which pure water is requried. The ultrapure water is supplied to the terminal device (17a, 17b, 17c) from the downstream side of the filter (14) through the second heat exchanger (15).
A pure water manufacturing apparatus comprising: a pure water circulation system consisting of: a pure water storage tank, a heat exchanger for performing thermal sterilization, arranged downstream of the tank, a filter for removing dead bacteria, arranged downstream of the heat exchanger, and a drive means for circulating pure water, the pure water being supplied to a terminal device downstream of the filter, at which pure water is required; characterized in that a heat exchanger for cooling pure water is inserted in the pure water path between said filter and said terminal device.
Claim 2
Dependent Claim
93 words
A pure water manufacturing apparatus comprising: a pure water circulation system consisting of: a pure water storage tank, a heat exchanger for performing thermal sterilization, arranged downstream of the tank, a filter for removing dead bacteria, arranged downstream of the heat exchanger, and a drive means for circulating pure water, the pure water being supplied to a terminal device downstream of the filter, at which pure water is required; characterized in that a heat exchanger for cooling pure water is inserted in the pure water path between said filter and said terminal device.
Claim 3
Dependent Claim
17 words
An apparatus according to claim 1, characterized in that said terminal device is a semiconductor manufacturing line.
Claim 4
Independent Claim
25 words
An apparatus according to claim l, characterized in that a heat exchanger for cooling the pure water is inserted in said pure water circulation system.
Claim 5
Dependent Claim
25 words
An apparatus according to claim 1, characterized in that a heat exchanger for cooling the pure water is arranged outside said pure water circulation system.
Claim 6
Dependent Claim
47 words
An apparatus according to claim 1, characterized in that said pure water storage tank is connected to a primary pure water manufacturing appparatus consisting of an agglomerating/clarifying apparatus, a filtration apparatus, an ultraviolet sterilization apparatus, and an ion exchanger, and is supplied with primarily treated water therefrom.
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