Patent EP0273741A2 successfully refreshed from Google Patents.
EP0273741A2
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EP
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Plasma apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1987-12-24
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Granted: —
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Expires: 2007-12-24
Abstract
Abstract The present invention relates to the plasma treatment of a sample (100), whereby the plasma is generated by electron cyclotron resonance (E.C.R) in a plasma chamber (1). The plasma is led into a sample chamber (3), along the magnetic field which is used to satisfy the E.C.R. condition. To obtain a more uniform plasma density, the magnetic field should be stronger at the edge of the sample than at the centre of it. This is achieved by additional, field forming means (6).
Inventors
- 👤 Seiichi C/O Central Research Laboratory Nakamura
- 👤 Satoshi C/O Central Research Laboratory Nakayama
- 👤 Takashi C/O Central Research Laboratory Inoue
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 13:47
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511; H01J37/3266; H01J37/32678
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
120 words
A plasma apparatus, in which a plasma is generated within a plasma chamber by the use of an electron cyclotron resonance and the generated plasma is introduced into a sample chamber provided with a sample stage for placing a sample thereon through a plasma outlet window by the use of magnetic field formed by an exciting coil disposed around said plasma chamber, characterized by that a magnetic field forming means is provided on a side opposite to the plasma outlet window relatively to the sample on said sample stage for forming the magnetic field so that a magnetic flux density in a peripheral edge portion of the sample may be higher than that in a central portion of the sample.
Claim 2
Dependent Claim
120 words
A plasma apparatus, in which a plasma is generated within a plasma chamber by the use of an electron cyclotron resonance and the generated plasma is introduced into a sample chamber provided with a sample stage for placing a sample thereon through a plasma outlet window by the use of magnetic field formed by an exciting coil disposed around said plasma chamber, characterized by that a magnetic field forming means is provided on a side opposite to the plasma outlet window relatively to the sample on said sample stage for forming the magnetic field so that a magnetic flux density in a peripheral edge portion of the sample may be higher than that in a central portion of the sample.
Claim 3
Dependent Claim
32 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means is disposed on a side opposite to said plasma outlet window relatively to said sample stage.
Claim 4
Dependent Claim
25 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means is disposed between said sample and said sample stage.
Claim 5
Dependent Claim
23 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means is disposed outside of said sample chamber.
Claim 6
Dependent Claim
21 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means comprises a cylindrical magnetic body.
Claim 7
Dependent Claim
29 words
A plasma apparatus as set forth in Claim 5, in which an outside diameter of said magnetic body is nearly equal to a diameter of said sample or more.
Claim 8
Dependent Claim
19 words
A plasma apparatus as set forth in Claim 5, in which a coil is disposed around said magnetic body.
Claim 9
Dependent Claim
19 words
A plasma apparatus as set forth in Claim 7, in which said coil is wound around said magnetic body.
Claim 10
Dependent Claim
21 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means is a cylindrical permanent magnet.
Claim 11
Dependent Claim
39 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means regulates the magnetic flux density in the peripheral edge portion of the sample and that at the central portion of the sample independently.
Claim 12
Dependent Claim
51 words
A plasma apparatus as set forth in Claim 10, in which said magnetic field forming means forms a magnetic field in a direction same as that of the magnetic field formed by said exciting coil and in a direction opposite to that of the magnetic field formed by said exciting coil.
Claim 13
Dependent Claim
20 words
A plasma apparatus as set forth in Claim 10, in which said plasma forming means comprises two cylindrical magnetic bodies.
Claim 14
Dependent Claim
26 words
A plasma apparatus as set forth in Claim 12, in which said two magnetic bodies are concentrically disposed, and their diameters are different from each other.
Claim 15
Dependent Claim
19 words
A plasma apparatus as set forth in Claim 12, in which coils are disposed around said two magnetic bodies.
Claim 16
Dependent Claim
54 words
A plasma apparatus as set forth in Claim 10, in which said magnetic field forming means comprises a nearly columnar magnetic body surrounded by a coil and thicker at the central portion thereof and a cylindrical magnetic body surrounded by a coil having an inside diameter larger than a diameter of said magnetic body.
Claim 17
Dependent Claim
85 words
A plasma apparatus as set forth in Claim 10, in which said magnetic field forming means comprises a disc magnetic body provided with a columnar portion at a center of one surface thereof, a cylindrical portion with the center of one surface as a center disposed at a position closer to said peripheral portion, a coil being disposed around said cylindrical portion, and a cylindrical magnetic body surrounded by a coil having an inside diameter larger than an outside diameter of said disc magnetic body.
Claim 18
Dependent Claim
21 words
A plasma apparatus as set forth in Claim 10, in which said magnetic field forming means comprises two cylindrical permanent magnets.
Claim 19
Dependent Claim
56 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means comprises a cylindrical magnetic body with coils integrally disposed around an inside circumference and a periphery thereof and the magnetic body is disposed so as to make an axial direction thereof coincident with a direction of thickness of said sample.
Claim 20
Dependent Claim
50 words
A plasma apparatus as set forth in Claim 18, in which said magnetic field forming means is disposed on a side opposite to said plasma outlet window relatively to said sample stage and an outside diameter of said magnetic body is nearly equal to a diameter of said sample stage.
Claim 21
Dependent Claim
47 words
A plasma apparatus as set forth in Claim 18, in which the diameter of said magnetic body in a portion on a side opposite to the sample is shorter than that of said magnetic body in other portion and this shorter-diameter portion is surrounded by the coils.
Claim 22
Dependent Claim
47 words
A plasma apparatus as set forth in Claim 18, in which the diameter of said magnetic body in a portion on a side opposite to the sample is larger than that of said magnetic body in other portion and this larger-diameter portion is surrounded by the coils.
Claim 23
Dependent Claim
40 words
A plasma apparatus as set forth in Claim 18, in which said magnetic body is provided with sponson portion in both the reduced-diameter direction and the increased-diameter direction at an end portion thereof on a side opposite to the sample.
Claim 24
Dependent Claim
25 words
A plasma apparatus as set forth in Claim 1, in which said magnetic field forming means comprises permanent magnets and a magnetic body in combination.
Claim 25
Dependent Claim
56 words
A plasma apparatus as set forth in Claim 23, in which said magnetic field forming means comprises a rod-like magnetic body disposed at a center, a circular magnetic body disposed concentrically with said rod-like magnetic body and a plurality of permanent magnets disposed in a space between the rod-like magnetic body and the circular magnetic body.
Claim 26
Dependent Claim
44 words
A plasma apparatus as set forth in Claim 24, in which another circular magnetic body is disposed concentrically with said circular magnetic body, this circular magnetic body being movable in a direction of approaching to and a direction of separating from the sample stage.
Claim 27
Dependent Claim
46 words
A plasma apparatus as set forth in Claim 24, in which said plurality of permanent magnets are bar magnets and each bar magnet is radially disposed with positioning one pole on a central side and the other pole on a side of the peripheral edge portion.
Claim 28
Dependent Claim
73 words
A plasma apparatus as set forth in Claim 23, in which said magnetic field forming means comprises a disc magnetic body, a rod-like permanent magnet with one pole on a side of the sample stage disposed at a central portion on the disc magnetic body and a circular permanent magnet with the other pole on a side of the sample stage disposed concentrically with said rod-like permanent magnet on the disc magnetic body.
References Cited (Backward Citations)
No citation records indexed.
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