Patent EP0284867A2 successfully refreshed from Google Patents.
EP0284867A2
Expired / Lapsed
EP
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Dry etching apparatus using surface magnetic field confinement of plasma
Assignee: CollabRx Inc
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Filing: 1988-03-14
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Granted: —
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Expires: 2008-03-14
Abstract
Abstract An improved plasma reactor apparatus and method are disclosed. Improved uniformity of etching and an increased etch rate are achieved in a triode reactor through the use of a plasma confining multi-polar magnetic field which contains the plasma and which is generated by a plurality of bar magnets located on the sides and top of the reactor.
Inventors
- 👤 Thomas E. Wicker
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 16:53
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; H01J37/3266; H01J37/32688; H01J37/32917; H01J37/32935
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
47 words
In a dry etching apparatus having a chamber for containing a plasma glow discharge and a workpiece, the improvement comprising a plasma confining, multi-polar magnetic field (33,34) having a substantially field-free region (38) containing said workpiece so that the magnetic field does not pass through said workpiece.
Claim 2
Dependent Claim
47 words
In a dry etching apparatus having a chamber for containing a plasma glow discharge and a workpiece, the improvement comprising a plasma confining, multi-polar magnetic field (33,34) having a substantially field-free region (38) containing said workpiece so that the magnetic field does not pass through said workpiece.
Claim 3
Dependent Claim
27 words
The dry etching apparatus as set forth in claim 1 wherein said apparatus comprises a plurality of bar magnets (30) arranged in anti-parallel configuration about said chamber.
Claim 4
Dependent Claim
73 words
The dry etching apparatus as claimed in claim 2 wherein said chamber comprises a cylindrical sidewall having a central axis, a top plate, and a bottom plate, and wherein each of the plurality of magnets are elongated and are generally regularly spaced around said cylindrical sidewall, each extending substantially parallel to and equally spaced from said axis, and further comprising additional elongated permanent magnets (32) located within said top plate in anti-parallel relation.
References Cited (Backward Citations)
No citation records indexed.
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