Photosensitive composition

Claim 2

A photosensitive composition comprising a high-molecular compound having sulfonamide group to be insoluble in water, but soluble in an aqueous alkaline solution and a positive working photosensitive compound.

Claim 3

A photosensitive composition as claimed in claim 1, wherein said high-molecular compound is obtained by polymerizing a low-molecular compound having at least one polymerizable unsaturated bond and at least one sulfonamide group, wherein at least one hydrogen atom is attached to a nitrogen atom, per molecule in the presence of an initiator in a solvent.

Claim 4

A photosensitive composition as claimed in claim 1, wherein said high-molecular compound is one obtained by polymerizing a low-molecular compound selected from the group consisting of compound represented by formulas (I) to (V) wherein X¹ and X² represent each -O- or -NR⁷-; R¹ and R⁴ represent each H or CH₃; R² and R⁵ represent each a substituted or unsubstituted alkylene group, cycloalkylene group, a substituted or unsubstituted arylene group or a substituted or unsubstituted arakylene group, R³ represents a hydrogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted aryl group or a substituted or unsubstituted aralkyl group, R⁶ represents a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted aryl group, or a substituted or unsubstituted aralkyl group; and R⁷ represent hydrogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted aryl group, or a substituted or unsubstituted aralkyl group. R8, R¹⁰ and R¹⁴ represent each a hydrogen atom, a halogen atom or methyl group, R9 represents substituted or unsubstituted alkylene group, a substituted or unsubstituted cycloalkylene group, a substituted or unsubstituted arylene group or a substituted or unsubstituted aralkylene group, R¹¹ and R¹⁵ represent each a single bond or a substituted or unsubstituted alkylene group, a substituted or unsubstituted cycloalkylene group, a substituted or unsubstituted arylene group or a substituted or unsubstituted aralkylene group, R¹² and R¹⁶ represent each a substituted or unsubstituted alkylene group, a substituted or unsubstituted cycloalkylene group, a substituted or unsubstituted arylene group or a substituted or unsubstituted aralkylene group, R¹³ represents a hydrogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted aryl group or a substituted or unsubstituted aralkyl group, R17 represents a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted aryl group or a substituted or unsubstituted aralkyl group. Y¹ and Y² represent each a single bond or - -.

Claim 5

A photosensitive composition as claimed in claim 1, wherein said high-molecular compound is a polyurethane resin which is a reaction product between a diisocyanate compound and a diol compound having a sulfonamide group where at least one hydrogen atom is attached to nitrogen atom.

Claim 6

A photosensitive composition as claimed in claim 1, wherein said photosensitive compound is an o-­naphthoquinone diazide compound.

Claim 7

A photosensitive composition as claimed in claim 1, wherein said high-molecular compound has a weight-average molecular weight of 5,000 to 300,000.

Claim 8

A photosensitive composition as claimed in claim 1, wherein the amount of said high-molecular compound to be incorporated into the photosensitive composition is from about 5 to 95%.

Claim 9

A photosensitive composition as claimed in claim 1, wherein the amount of the positive working photosensitive compound in the photosensitive composition is from 10 to 50% by weight.

Claim 10

A photosensitive composition as claimed in claim 1, wherein said composition further comprises an alkali-soluble high-molecular-weight-compound selected from the group consisting of a phenol-formaldehyde resin, a cresol-formaldehyde resin, a phenol-modified xylene resin, a poly(hydroxystyrene), and a poly(halogenated hydroxy styrene).

Claim 11

A photosensitive composition as claimed in Claim 9, wherein said alkali-soluble high-­molecular-weight compound has a weight-average molecular wieght of from 500 to 20,000 and a number-average molecular weight of from 200 to 60,000.

Claim 12

A photosensitive composition as claimed in claim 9, wherein the amount of said alkali-soluble high-­molecular-wieght-compound in the photosensitive composition reanges not more than 70% by weight.

Claim 13

A photosensitive composition as claimed in claim 1, wherein said composiiton further comprises an organic acid having an pKa of 3.0 or less than 3.0.

Claim 14

A photosensitive composition as claimed in claim 12, wherein said organic acid is selected from an organic sulfonic acid or an organic sulfinic acid.

Claim 15

A photosensitive composition as claimed in claim 13, wherein said organic acid is selected from the group consisting of naphthalene-2-sulfonic acid, naphthalene-1-sulfonic acid, p-toluenesulfonic acid, dodecylbenzenesulfonic acid, mesitylenesulfonic acid, methanesulfonic acid, ethanesulfonic acid, benzenesulfonic acid, meta-benzene-di-sulfonic acid, cyclohexylsulfamic acid, p-toluidine-2-sulfonic acid, pyridine-3-sulfonic acid, phenyl J-acid, p-toluene sulfinic acid, benzylsulfinic acid, and methane sulfinic acid.

Claim 16

A photosensitive composition as claimed in claim 13, wherein the amount of the organic acid is in the range from 0.05 to 5% by weight based on the total weight of the composition.

Claim 17

A photosensitive composition as claimed in claim 1, wherein said high-molecular compound is one obtained by polymerizing a low-molecular compound selected from the group consisting of compound represented by formulae (I) and (II) wherein X¹ and X² each represents -NH-, R¹ and R² each represents H or CH₃, R² and R⁵ each represents an alkylene group having from 2 to 6 carbon atoms, a cycloalkylene group having 5 or 6 carbon atoms, or an optionally substituted phenylene or naphthylene group, R³ represens H, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 5 or 6 carbon atoms, or an optionally substituted phenyl or naphthyl group and R⁶ represents an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 5 or 6 carbon atoms, or an optionally substituted phenylene or naphthylene group.

Claim 18

A photosensitive composition as claimed in claim 16, wherein said high-molecular compound is one obtained by copolymerizing the low-molecular compound with at least one selected from the group consisting of a methacrylate, an acrylate, an methacrylamide, an acrylamide, acrylonitrile, methacrylonitrile, methacrylic acid and acrylic acid.

Claim 19

A photosensitive composition as claimed in claim 17, wherein said low molecular weight compound is copolymerized in the range from 10 to 90 mole% based on the copoloymer.