Patent EP0369352A1 successfully refreshed from Google Patents.
EP0369352A1
Expired / Lapsed
EP
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Capacitance type accelerometer and method of manufacturing the same
Assignee: Hitachi Ltd
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Filing: 1989-11-10
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Granted: —
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Expires: 2009-11-10
Abstract
Abstract The invention relates to a capacitance type accelerometer and a method of manufacturing the same. The capacitance type accelerometer has a first silicon plate (2,7) formed as having a movable electrode part (7) which is moved according to acceleration, two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films (4, 5) which are respectively disposed between the first silicon plate except the movable electrode part (7) and the two second silicon plates (1, 3) and stick the first silicon plate (2) except the movable electrode and the two second silicon plates together. The process of manufacturing the capacitance type accelerometer is made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.
Inventors
- 👤 Seiko Suzuki
- 👤 Shigeki Tsuchitani
- 👤 Masayuki Miki
- 👤 Masahiro Matsumoto
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 12:25
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00015; B81C1/00261; B81C1/00301; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; G01P15/125; G01P15/13; G01P15/131; B81B; B81B2201/00; B81B2201/02; B81B2201/0228; B81B2201/0235; B81B2207/00; B81B2207/09; B81B2207/091; B81B2207/094; B81B2207/095; B81B2207/096; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
99 words
A capacitance type accelerometer, having a first silicon plate (2, 7) formed as having a movable electrode part (7) which is moved according to acceleration; two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance; and thermal oxide films (4, 5) which are respectively disposed between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plate (1, 3) and stick the first silicon plate (2) except the movable electrode part (7) and teh two second silicon plates (1, 3) together.
Claim 2
Dependent Claim
99 words
A capacitance type accelerometer, having a first silicon plate (2, 7) formed as having a movable electrode part (7) which is moved according to acceleration; two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance; and thermal oxide films (4, 5) which are respectively disposed between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plate (1, 3) and stick the first silicon plate (2) except the movable electrode part (7) and teh two second silicon plates (1, 3) together.
Claim 3
Dependent Claim
41 words
The accelerator as defined in claim 1, wherein the thermal oxide films (4, 5) are previously formed on the first silicon plate (2) except the movable electrode part (7) or on the two second silicon plates (1, 3) (Figs. 5, 6).
Claim 4
Dependent Claim
28 words
The accelerometer as defined in claim 2, further having glass layers (13, 14) previously formed on the thermal oxide films (4, 5) by spin coating method (Fig. 8).
Claim 5
Dependent Claim
36 words
The accelerometer as defined in claim 1, further having polycrystal silicon layers (11, 12) formed on the parts of the second silicon plates (1, 3) which are opposite to the movable electrode part (7) (Fig. 4).
Claim 6
Dependent Claim
106 words
A capacitance type accelerometer, having a silicon plate (2, 7) formed as having a movable electrode part (7) which is moved according to acceleration; glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance (8), the glass plates (26, 27) being sticked to both sides of the silicon plate (2) except the movable electrode part (7); and leading wires (32, 33) which are respectively connected to the conductive layers (28, 29) through a groove (34, 35) formed between the silicon plate (2) and the glass plates (26, 27), respectively (Figs. 17, 18, 19).
Claim 7
Dependent Claim
106 words
A capacitance type accelerometer, having a silicon plate (2, 7) formed as having a movable electrode part (7) which is moved according to acceleration; glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance (8), the glass plates (26, 27) being sticked to both sides of the silicon plate (2) except the movable electrode part (7); and leading wires (32, 33) which are respectively connected to the conductive layers (28, 29) through a groove (34, 35) formed between the silicon plate (2) and the glass plates (26, 27), respectively (Figs. 17, 18, 19).
Claim 8
Dependent Claim
16 words
The accelerometer as defined in claim 5, wherein the groove is formed on the silicon plate.
Claim 9
Dependent Claim
16 words
The accelerometer as defined in claim 5, wherein the groove is formed on the glass plates.
Claim 10
Dependent Claim
16 words
The accelerometer as defined in claim 5, wherein the groove is filled with a non-conductive material.
Claim 11
Dependent Claim
21 words
The accelerometer as defined in claim 5, further having silicon plates respectively covering each outside of the glass plates (Fig. 18).
Claim 12
Dependent Claim
20 words
The accelerometer as defined in claim 5, further having conductive paste electrically connecting the leading wires to the connecting terminal.
Claim 13
Dependent Claim
101 words
A capacitance type accelerometer, having a silicon plate (2) formed as having a movable electrode part (7) which is moved according to accelerating force; glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance, the glass plates being sticked to both sides of the silicon plate (2) except the movable electrode part (7); and leading wires (50, 51) which are respectively connected to the conductive layers (28, 29) and are respectively fed out of the glass plates (26, 27) through a hole formed thereon (Figs. 25, 27, 28).
Claim 14
Dependent Claim
101 words
A capacitance type accelerometer, having a silicon plate (2) formed as having a movable electrode part (7) which is moved according to accelerating force; glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance, the glass plates being sticked to both sides of the silicon plate (2) except the movable electrode part (7); and leading wires (50, 51) which are respectively connected to the conductive layers (28, 29) and are respectively fed out of the glass plates (26, 27) through a hole formed thereon (Figs. 25, 27, 28).
Claim 15
Dependent Claim
56 words
The accelerometer according to claim 11, wherein thermal oxide films (4, 5) are respectively formed on the first silicon plate (2) except the movable electrode part (7); a polycrystal silicon layer (58, 59) is formed on the thermal oxide films; and the leading wires are respectively connecting conductive layers to the polycrystal silicon layer (Fig. 29).
Claim 16
Dependent Claim
102 words
A capacitance type accelerometer, having a first silicon plate (2, 7) formed as having a movable electrode part (7) which is moved according to acceleration; two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance; and glasses (13, 14) having a low fusion point which are respectively disposed between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) and stick the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) together.
Claim 17
Dependent Claim
102 words
A capacitance type accelerometer, having a first silicon plate (2, 7) formed as having a movable electrode part (7) which is moved according to acceleration; two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance; and glasses (13, 14) having a low fusion point which are respectively disposed between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) and stick the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) together.
Claim 18
Independent Claim
111 words
A method of manufacturing a capacitance type accelerometer, comprising the steps of forming a first silicon plate (2, 7) having a movable electrode part (7) which is moved according to acceleration; forming two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance; respectively disposing thermal oxide films (4, 5) between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) and sticking the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) together by the interposed thermal oxide films (4, 5).
Claim 19
Independent Claim
111 words
A method of manufacturing a capacitance type accelerometer, comprising the steps of forming a first silicon plate (2, 7) having a movable electrode part (7) which is moved according to acceleration; forming two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance; respectively disposing thermal oxide films (4, 5) between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) and sticking the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) together by the interposed thermal oxide films (4, 5).
Claim 20
Dependent Claim
41 words
The method as defined in claim 14, wherein the thermal oxide films (4, 5) are previously formed on the first silicon plate (2) except the movable electrode part (7) or on the two second silicon plates (1, 3) (Figs. 5, 6).
Claim 21
Dependent Claim
28 words
The method as defined in claim 15, wherein glass layers (13, 14) are previously formed on the thermal oxide films (4, 5) by spin coating method (Fig. 8).
Claim 22
Dependent Claim
36 words
The method as defined in claim 14, wherein polycrystal silicon layers (11, 12) are formed on the parts of the second silicon plates (1, 3) which are opposite to the movable electrode part (7) (Fig. 4).
Claim 23
Independent Claim
114 words
A method of manufacturing a capacitance type accelerometer, comprising the steps of forming a silicon plate (2, 7) having a movable electrode part (7) which is moved according to acceleration; forming glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance (8), sticking the glass plates (26, 27) to both sides of the silicon plate (2) except the movable electrode part (7) forming a groove (34, 35) between the silicon plate (2) and the glass plates (26, 27), respectively, and connecting leading wires (32, 33) respectively to the conductive layers (28, 29) through the grooves (34, 35) (Figs. 17, 18, 19).
Claim 24
Independent Claim
114 words
A method of manufacturing a capacitance type accelerometer, comprising the steps of forming a silicon plate (2, 7) having a movable electrode part (7) which is moved according to acceleration; forming glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance (8), sticking the glass plates (26, 27) to both sides of the silicon plate (2) except the movable electrode part (7) forming a groove (34, 35) between the silicon plate (2) and the glass plates (26, 27), respectively, and connecting leading wires (32, 33) respectively to the conductive layers (28, 29) through the grooves (34, 35) (Figs. 17, 18, 19).
Claim 25
Dependent Claim
16 words
The method as defined in claim 18, wherein the groove is formed on the silicon plate.
Claim 26
Dependent Claim
16 words
The method as defined in claim 18, wherein the groove is formed on the glass plates.
Claim 27
Dependent Claim
16 words
The method as defined in claim 18, wherein the groove is filled with a non-conductive material.
Claim 28
Dependent Claim
21 words
The method as defined in claim 18, further forming silicon plates respectively covering each outside of the glass plates (Fig. 18).
Claim 29
Dependent Claim
21 words
The method as defined in claim 18, further electrically connecting the lead wires to the connecting terminal by a conductive paste.
Claim 30
Independent Claim
101 words
A method of manufacturing a capacitance type accelerometer comprising the steps of forming a silicon plate (2) having a movable electrode part (7) which is moved according to accelerating force; forming glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance sticking the glass plates to both sides of the silicon plate (2) except the movable electrode part (7); forming a hole through the glass plates (26, 27) and connecting leading wires (50, 51) respectively to the conductive layers (28, 29) through the holes (Figs. 25, 27, 28).
Claim 31
Independent Claim
101 words
A method of manufacturing a capacitance type accelerometer comprising the steps of forming a silicon plate (2) having a movable electrode part (7) which is moved according to accelerating force; forming glass plates (26, 27) respectively having a conductive layer (28, 29) opposite to the movable electrode part (7) with a certain separation distance sticking the glass plates to both sides of the silicon plate (2) except the movable electrode part (7); forming a hole through the glass plates (26, 27) and connecting leading wires (50, 51) respectively to the conductive layers (28, 29) through the holes (Figs. 25, 27, 28).
Claim 32
Dependent Claim
56 words
The method according to claim 24, wherein thermal oxide films (4, 5) are respectively formed on the first silicon plate (2) except the movable electrode part (7); a polycrystal silicon layer (58, 59) is formed on the thermal oxide films; and the leading wires are respectively connecting conductive layers to the polycrystal silicon layer (Fig. 29).
Claim 33
Independent Claim
103 words
A method of manufacturing a capacitance type accelerometer comprising the steps of forming a first silicon plate (2, 7) having a movable electrode part (7) which is moved according to acceleration; disposing two second silicon plates (1, 3) on both sides of the first silicon plate with a certain separation distance; disposing glasses (13, 14) having a low fusion point respectively between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3); and sticking the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) together.
Claim 34
Independent Claim
103 words
A method of manufacturing a capacitance type accelerometer comprising the steps of forming a first silicon plate (2, 7) having a movable electrode part (7) which is moved according to acceleration; disposing two second silicon plates (1, 3) on both sides of the first silicon plate with a certain separation distance; disposing glasses (13, 14) having a low fusion point respectively between the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3); and sticking the first silicon plate (2) except the movable electrode part (7) and the two second silicon plates (1, 3) together.
References Cited (Backward Citations)
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