Patent EP0440377A2 successfully refreshed from Google Patents.
EP0440377A2
Expired / Lapsed
EP
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Collimated deposition apparatus and method
Assignee: Varian Medical Systems Inc
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Filing: 1991-01-24
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Granted: —
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Expires: 2011-01-24
Abstract
Abstract Sputtering apparatus and method which are particularly suitable for forming step coatings. A workpiece (W) is supported in a chamber (17), particles are emitted from a sputter source (26) in a substantially uniform manner throughout an area of greater lateral extent than the workpiece, the pressure within the chamber is maintained at a level which is sufficiently low to prevent substantial scattering of the particles between the source and the workpiece, and the particles are passed through a collimating filter (63) having a plurality of transmissive cells with a length to diameter ratio on the order of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles at which the particles can impinge upon the workpiece.
Inventors
- 👤 Richard Ernest Demaray
- 👤 John C Helmer
- 👤 Young Hoon Park
- 👤 Ronald R Cochran
- 👤 Vance Eber Hoffman Jr
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 10:38
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3447; C; C23; C23C; C23C14/00; C23C14/04; C23C14/046; C23C14/22; C23C14/34; C23C14/35; H01J37/3402; H01J37/3405; H01J37/3408; H01J37/345; H01J37/3455; H01J37/3488; H01J37/3494; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3322; H01J2237/3327
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
113 words
In sputtering apparatus for depositing a step coating on a workpiece: a chamber, means for supporting the workpiece in the chamber, a sputter source having means for emitting particles substantially uniformly throughout an area of greater lateral extent than the workpiece, means for maintaining the pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the source and the workpiece, and a particle collimating filter having a plurality of transmissive cells with a length to diameter ratio on the order of 1:1 to 3:1 positioned between the source and the workpiece for limiting the angles at which the particles can impinge upon the workpiece.
Claim 2
Dependent Claim
32 words
The sputtering apparatus of Claim 1 wherein the sputter source includes a target which is eroded substantially uniformly over the area of greater lateral extent than the workpiece to produce the particles.
Claim 3
Dependent Claim
19 words
The sputtering apparatus of Claim 1 wherein the collimating filter is positioned midway between the source and the workpiece.
Claim 4
Dependent Claim
18 words
The sputtering apparatus of Claim 1 wherein each of the collimating cells has an aperture of hexagonal cross-section.
Claim 5
Dependent Claim
32 words
The sputtering apparatus of Claim 1 wherein the length to diameter ratio of the collimating cells is substantially equal to the aspect ratio of an opening to be coated in the workpiece.
Claim 6
Dependent Claim
32 words
The sputtering apparatus of Claim 1 wherein the collimating filter is adjustable to permit the length to diameter ratio of the cells to change as the coating builds up on the workpiece.
Claim 7
Dependent Claim
28 words
The sputtering apparatus of Claim 1 wherein the means for maintaining the pressure is adapted to maintain the pressure at a level on the order of 0.5-1.0 milliTorr.
Claim 8
Dependent Claim
31 words
The sputtering apparatus of Claim 1 including means for moving the collimating filter in a direction parallel to the source and the workpiece as the coating builds up on the workpiece.
Claim 9
Dependent Claim
39 words
The sputtering apparatus of Claim 8 wherein the means for moving the collimating filter is adapted to move the filter a distance on the order of one half of the diameter of one of the cells in the filter.
Claim 10
Dependent Claim
111 words
In a method of depositing a step coating on a workpiece, the steps of: supporting the workpiece in a chamber, emitting particles from a sputter source substantially uniformly throughout an area of greater lateral extent than the workpiece, maintaining the pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the source and the workpiece, and passing the particles through a collimating filter having a plurality of transmissive cells with a length to diameter ratio on the order of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles at which the particles can impinge upon the workpiece.
References Cited (Backward Citations)
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