Patent JPS5222598A successfully refreshed from Google Patents.
JPS5222598A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Etching method of chromium oxide
Assignee: Mitsubishi Electric Corp
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Filing: 1975-08-14
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Granted: —
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Expires: 1995-08-14
Abstract
Abstract PURPOSE: To reverse posi-nega pattern and to remove the masking film in the etching process, and to control the etching depth quantitatively and uniformly. COPYRIGHT: (C)1977,JPO&Japio
Inventors
- 👤 Kyusaku Nishioka
- 👤 Haruhiko Abe
- 👤 Teruhiko Yamazaki
- 👤 Ikuo Iwama
Bibliographic Details
Application Number
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Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-29 17:52
CPC Classifications
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