Patent JPS60157230A successfully refreshed from Google Patents.
JPS60157230A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Carrying method for semiconductor wafer
Assignee: TELMEC CO Ltd
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Filing: 1984-01-11
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Granted: —
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Expires: 2004-01-11
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Hisashi Koike
- 👤 小池 久
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-29 13:28
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0606; H10P72/0608; H10P72/50
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS53129963A
Cited
JPS56120124A
Cited
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