Patent US2834697A successfully refreshed from Google Patents.
US2834697A
Expired / Lapsed
US
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Process for vapor-solid diffusion of a conductivity-type determining impurity in semiconductors
Assignee: AT&T Inc
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Filing: 1956-05-18
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Granted: 1958-05-13
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Expires: 1976-05-18
Abstract
No abstract record available.
Inventors
- 👤 Friedolf M Smits
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 18:11
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/50; C; C23; C23C; C23C16/00; C30; C30B; C30B31/00; C30B31/06; H10D; H10D62/00; H10D62/60; H10P32/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
80 words
THE PROCESS FOR VAPOR-SOLID DIFFUSION OF A CONDUCTIVITY-TYPE DETERMINING IMPURITY INTO A SEMICONDUCTOR COMPRISING THE STEPS OF HEATING THE SMICONDUCTOR IN A DIFFUSION FURNACD TO A TEMPERATURE AT WHICH THE DESIRED IMPURITY WILL DIFFUSE INTO THE SEMICONDUCTOR, AND INTRODUCING THE DESIRED IMPURITY IN VAPOR FORM INTO THE DIFFUSION FURNACE AT A CONTROLLED RATE, WHILE SIMULTANEOUSLY EVACUATING THE DIFFUSION FURNACE FOR THE EVAPORATION OF THE SEMICONDUCTOR AT A RATE COMPARABLE TO THE RATE OF DIFFUSION OF THE IMPURITY INTO THE SIMICONDUCTOR.
Claim 2
Dependent Claim
80 words
THE PROCESS FOR VAPOR-SOLID DIFFUSION OF A CONDUCTIVITY-TYPE DETERMINING IMPURITY INTO A SEMICONDUCTOR COMPRISING THE STEPS OF HEATING THE SMICONDUCTOR IN A DIFFUSION FURNACD TO A TEMPERATURE AT WHICH THE DESIRED IMPURITY WILL DIFFUSE INTO THE SEMICONDUCTOR, AND INTRODUCING THE DESIRED IMPURITY IN VAPOR FORM INTO THE DIFFUSION FURNACE AT A CONTROLLED RATE, WHILE SIMULTANEOUSLY EVACUATING THE DIFFUSION FURNACE FOR THE EVAPORATION OF THE SEMICONDUCTOR AT A RATE COMPARABLE TO THE RATE OF DIFFUSION OF THE IMPURITY INTO THE SIMICONDUCTOR.
References Cited (Backward Citations)
US2695852A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1961-05-12 | 1961-11-11 | 1962-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1965-05-12 | 1965-11-11 | 1966-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1969-05-12 | 1969-11-11 | 1970-05-13 | $7700.00 | Window Closed / Lapsed |