Patent US3276902A successfully refreshed from Google Patents.
US3276902A
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Method of vapor deposition employing an electron beam
Assignee: TDK Micronas GmbH
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Filing: 1963-10-01
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Granted: 1966-10-04
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Expires: 1983-10-01
Abstract
No abstract record available.
Inventors
- 👤 Jimmy M Abraham
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 11:39
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30; H; H01; H01B; H01B3/00; H01B3/002; H01B3/004; H01B3/02; H01B3/08; H01B3/088; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; H01J9/00; H01J9/20; H01J9/233
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
73 words
THE METHOD OF VAPOR DEPOSITION OF A FUSIBLE DIELECTRIC MATERIAL UPON A SUBSTRATE MEMBER COMPRISING THE STEPS OF: PROVIDING A FUSED BODY OF SAID MATERIAL; POSITIONING SAID MEMBER SO THAT THE SAME IS EXPOSED TO SAID BODY AND SPACED THERFROM; DIRECTING AN ELECTRON BEAM ONTO SAID BODY; AND RAPIDLY PULSING SAID BEAM BETWEEN UPPER AND LOWER BEAM CURRENT LEVELS THEREBY PROVIDING UNIFORM VAPOR DEPOSITION OF SAID MATERIAL FROM SAID BODY ONTO SAID MEMBER.
Claim 2
Independent Claim
73 words
THE METHOD OF VAPOR DEPOSITION OF A FUSIBLE DIELECTRIC MATERIAL UPON A SUBSTRATE MEMBER COMPRISING THE STEPS OF: PROVIDING A FUSED BODY OF SAID MATERIAL; POSITIONING SAID MEMBER SO THAT THE SAME IS EXPOSED TO SAID BODY AND SPACED THERFROM; DIRECTING AN ELECTRON BEAM ONTO SAID BODY; AND RAPIDLY PULSING SAID BEAM BETWEEN UPPER AND LOWER BEAM CURRENT LEVELS THEREBY PROVIDING UNIFORM VAPOR DEPOSITION OF SAID MATERIAL FROM SAID BODY ONTO SAID MEMBER.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-10-03 | 1970-04-04 | 1970-10-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-10-03 | 1974-04-04 | 1974-10-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-10-03 | 1978-04-04 | 1978-10-04 | $7700.00 | Window Closed / Lapsed |