US3294660A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Amorphous zinc oxide semiconductor and method of making
Assignee: Individual
•
Filing: 1964-09-30
•
Granted: 1966-12-27
•
Expires: 1984-09-30
Abstract
No abstract record available.
Inventors
- 👤 William D Kingery
- 👤 Reid A Mickelsen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:28
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/086; C23C14/22; C23C14/54; C23C14/541; H; H10; H10F; H10F71/00; H10F71/10; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
69 words
THE METHOD OF PRODUCING A AMORPHOUS SEMICONDUCTING FILM OF ZINC OXIDE THAT COMPRISES THE STEPS OF PROVIDING A SUBSTRATE, MAINTAINING THE SUBSTRATE AT A TEMPERATURE BETWEEN -90*C. AND -45*C., VAPOR DEPOSITING A FILM OF ZINC OXIDE ON SAID SUBSTRATE BY REACTIVE SPUTTERING USING A ZINC METAL CATHODE AND AN ATMOSPHERE CONSISTING OF A MIXTURE OF OXYGEN AND AN INERT GAS, AND PERMITTING THE FILM TO WARM TO ROOM TEMPERATURE.
Claim 2
Independent Claim
69 words
THE METHOD OF PRODUCING A AMORPHOUS SEMICONDUCTING FILM OF ZINC OXIDE THAT COMPRISES THE STEPS OF PROVIDING A SUBSTRATE, MAINTAINING THE SUBSTRATE AT A TEMPERATURE BETWEEN -90*C. AND -45*C., VAPOR DEPOSITING A FILM OF ZINC OXIDE ON SAID SUBSTRATE BY REACTIVE SPUTTERING USING A ZINC METAL CATHODE AND AN ATMOSPHERE CONSISTING OF A MIXTURE OF OXYGEN AND AN INERT GAS, AND PERMITTING THE FILM TO WARM TO ROOM TEMPERATURE.
References Cited (Backward Citations)
US2441217A
Cited
US2825687A
Cited
US2917442A
Cited
US3039896A
Cited
US3079993A
Cited
US3142586A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-26 | 1970-06-27 | 1970-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-26 | 1974-06-27 | 1974-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-26 | 1978-06-27 | 1978-12-27 | $7700.00 | Window Closed / Lapsed |