Patent US4915476A successfully refreshed from Google Patents.
Patent US3294660A successfully refreshed from Google Patents.
US3294660A
Expired / Lapsed
US
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Amorphous zinc oxide semiconductor and method of making
Assignee: Individual
•
Filing: 1964-09-30
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Granted: 1966-12-27
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Expires: 1984-09-30
Abstract
No abstract record available.
Inventors
- 👤 William D Kingery
- 👤 Reid A Mickelsen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:06
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/086; C23C14/22; C23C14/54; C23C14/541; H; H10; H10F; H10F71/00; H10F71/10; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
69 words
THE METHOD OF PRODUCING A AMORPHOUS SEMICONDUCTING FILM OF ZINC OXIDE THAT COMPRISES THE STEPS OF PROVIDING A SUBSTRATE, MAINTAINING THE SUBSTRATE AT A TEMPERATURE BETWEEN -90*C. AND -45*C., VAPOR DEPOSITING A FILM OF ZINC OXIDE ON SAID SUBSTRATE BY REACTIVE SPUTTERING USING A ZINC METAL CATHODE AND AN ATMOSPHERE CONSISTING OF A MIXTURE OF OXYGEN AND AN INERT GAS, AND PERMITTING THE FILM TO WARM TO ROOM TEMPERATURE.
Claim 2
Independent Claim
69 words
THE METHOD OF PRODUCING A AMORPHOUS SEMICONDUCTING FILM OF ZINC OXIDE THAT COMPRISES THE STEPS OF PROVIDING A SUBSTRATE, MAINTAINING THE SUBSTRATE AT A TEMPERATURE BETWEEN -90*C. AND -45*C., VAPOR DEPOSITING A FILM OF ZINC OXIDE ON SAID SUBSTRATE BY REACTIVE SPUTTERING USING A ZINC METAL CATHODE AND AN ATMOSPHERE CONSISTING OF A MIXTURE OF OXYGEN AND AN INERT GAS, AND PERMITTING THE FILM TO WARM TO ROOM TEMPERATURE.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-26 | 1970-06-27 | 1970-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-26 | 1974-06-27 | 1974-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-26 | 1978-06-27 | 1978-12-27 | $7700.00 | Window Closed / Lapsed |