Patent US3354008A successfully refreshed from Google Patents.
US3354008A
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Method for diffusing an impurity from a doped oxide of pyrolytic origin
Assignee: Texas Instruments Inc
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Filing: 1966-09-21
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Granted: 1967-11-21
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Expires: 1986-09-21
Abstract
No abstract record available.
Inventors
- 👤 Jr John C Brixey
- 👤 Kenneth E Statham
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:36
CPC Classifications
C; C23; C23C; C23C8/00; H; H10; H10D; H10D99/00; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; Y; Y10; Y10S; Y10S148/00; Y10S148/015; Y10S148/037; Y10S148/043; Y10S148/062; Y10S148/079; Y10S148/118; Y10S148/144; Y10S148/151; Y10S148/173
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
50 words
A METHOD OF SELECTIVELY DIFFUSING AN IMPURITY INTO A SEMICONDUCTOR DIVICE COMPRISING THE STEPS OF: DEPOSITING AN IMPURITY CONTAINING OXIDE UPON THE SURFACE OF SAID SEMICONDUCTOR DEVICE, SELECTIVELY REMOVING A PORTION OF SAID OXIDE TO LEAVE THE DESIRED CONFIGURATION AND DIFFUSING THE IMPURITY INTO THE DEVICE FROM THE REMAINING OXIDE.
Claim 2
Independent Claim
50 words
A METHOD OF SELECTIVELY DIFFUSING AN IMPURITY INTO A SEMICONDUCTOR DIVICE COMPRISING THE STEPS OF: DEPOSITING AN IMPURITY CONTAINING OXIDE UPON THE SURFACE OF SAID SEMICONDUCTOR DEVICE, SELECTIVELY REMOVING A PORTION OF SAID OXIDE TO LEAVE THE DESIRED CONFIGURATION AND DIFFUSING THE IMPURITY INTO THE DEVICE FROM THE REMAINING OXIDE.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-11-20 | 1971-05-22 | 1971-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-11-20 | 1975-05-22 | 1975-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-11-20 | 1979-05-22 | 1979-11-21 | $7700.00 | Window Closed / Lapsed |