US3398029A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making semiconductor devices by diffusing and forming an oxide
Assignee: Fujitsu Ltd
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Filing: 1964-10-05
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Granted: 1968-08-20
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Expires: 1984-10-05
Abstract
No abstract record available.
Inventors
- 👤 Yasufuku Matami
- 👤 Kawamura Toyosaku
- 👤 Hayashi Tsuneo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:32
CPC Classifications
C; C01; C01G; C01G9/00; C01G9/02; H; H10; H10D; H10D99/00; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/6322; Y; Y10; Y10S; Y10S148/00; Y10S148/017; Y10S148/043; Y10S148/102; Y10S148/116; Y10S148/117; Y10S148/118; Y10S438/00; Y10S438/91
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
76 words
THE METHOD OF PRODUCING A SILICON SEMICONDUCTOR DEVICE WHICH COMPRISES FORMING A SILICON DIOXIDE LAYER ON THE SURFACE OF A SILICON BODY WHILE DIFFUSING A DOPING IMPURITY INTO A PORTION OF SAID SILICON BODY, REMOVING THE SILICON-DIOXIDE LAYER AND THEREAFTER FORMING A NEW SILICONDIOXIDE LAYER AT A TEMPERATURE LESS THAN THAT TEMPERATURE AT WHICH THE DIFFUSION TOOK PLACE AND ADDING A SMALL AMOUNT OF DOPING MATERIAL INTO SAID SILICON DIOXIDE LAYER TO MINIMIZE SURFACE CHANNEL EFFECT.
Claim 2
Independent Claim
76 words
THE METHOD OF PRODUCING A SILICON SEMICONDUCTOR DEVICE WHICH COMPRISES FORMING A SILICON DIOXIDE LAYER ON THE SURFACE OF A SILICON BODY WHILE DIFFUSING A DOPING IMPURITY INTO A PORTION OF SAID SILICON BODY, REMOVING THE SILICON-DIOXIDE LAYER AND THEREAFTER FORMING A NEW SILICONDIOXIDE LAYER AT A TEMPERATURE LESS THAN THAT TEMPERATURE AT WHICH THE DIFFUSION TOOK PLACE AND ADDING A SMALL AMOUNT OF DOPING MATERIAL INTO SAID SILICON DIOXIDE LAYER TO MINIMIZE SURFACE CHANNEL EFFECT.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-08-20 | 1972-02-19 | 1972-08-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-08-20 | 1976-02-19 | 1976-08-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-08-20 | 1980-02-19 | 1980-08-20 | $7700.00 | Window Closed / Lapsed |