Patent US5745889A successfully refreshed from Google Patents.
Patent US3558093A successfully refreshed from Google Patents.
US3558093A
Expired / Lapsed
US
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Vacuum memory holding device
Assignee: EPEC SYSTEMS CORP
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Filing: 1969-07-29
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Granted: 1971-01-26
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Expires: 1989-07-29
Abstract
Abstract A vacuum memory holding device of the type used as a tray for rigidly supporting a plurality of waferlike objects in a spraycoating chamber. The device includes a top plate having a plurality of apertures as a support for each one of the wafers and a bottom vacuum chamber from which the vacuum is drawn. The vacuum chamber includes a resilient wall which is collapsed as the vacuum is drawn and serves to hold the vacuum independently and rigidly support the waferlike objects during the spraycoating operation without being connected to the vacuum-drawing source.
Inventors
- 👤 Hendrik F Bok
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:21
CPC Classifications
B; B05; B05B; B05B13/00; B05B13/02; B25; B25B; B25B11/00; B25B11/005
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
203 words
A vacuum memory holding device comprising: A. a rigid top plate and downwardly depending sides, the top having a plurality of apertures as a support for a plurality of objects, said apertures including a nonheat conducting resilient liner extending above the top plate as individual supports for said objects and said nonheat conducting liner having a soft inner ring extending above the liner when not compressed and compressible by the force of an object supported thereon, so as to lie flush with said liner, as the vacuum is drawn and the sides having a vacuum port; B. a resilient bottom secured to said sides and connected to said top by a compression spring; C. a check valve mounted in said vacuum port; D. a vacuum source connected to said vacuum port such that drawing of a vacuum through said port secures objects to said apertures and compresses said resilient bottom towards said rigid top; and E. a tray removably supported upon said top plate and having a plurality of object apertures corresponding to said apertures in said top plate, such that objects may be placed upon said top plate apertures by setting said tray with objects covering its apertures, on said top plate.
Claim 2
Dependent Claim
203 words
A vacuum memory holding device comprising: A. a rigid top plate and downwardly depending sides, the top having a plurality of apertures as a support for a plurality of objects, said apertures including a nonheat conducting resilient liner extending above the top plate as individual supports for said objects and said nonheat conducting liner having a soft inner ring extending above the liner when not compressed and compressible by the force of an object supported thereon, so as to lie flush with said liner, as the vacuum is drawn and the sides having a vacuum port; B. a resilient bottom secured to said sides and connected to said top by a compression spring; C. a check valve mounted in said vacuum port; D. a vacuum source connected to said vacuum port such that drawing of a vacuum through said port secures objects to said apertures and compresses said resilient bottom towards said rigid top; and E. a tray removably supported upon said top plate and having a plurality of object apertures corresponding to said apertures in said top plate, such that objects may be placed upon said top plate apertures by setting said tray with objects covering its apertures, on said top plate.
Claim 3
Dependent Claim
32 words
A vacuum memory holding device as in claim 1, said object apertures in said top plate having a vertically raised peripheral lip concentric with and surrounding said apertures in said top plate.
Claim 4
Dependent Claim
62 words
A vacuum memory holding device as in claim 2, said object apertures in said tray further including: i. inner lips; and ii. outer lips, said inner lips being of lower profile than said outer lips, such that when said tray is removed from said top plate, said objects are supported on said inner lips within the peripheral confines of said outer lips.
Claim 5
Dependent Claim
44 words
A vacuum memory holding device as in claim 3, including an independent vacuum release valve extending through an ingress port in said top plate, said vacuum release valve including a compression spring urging saId valve to close said port and against an O-ring seal.
Claim 6
Dependent Claim
37 words
A vacuum memory holding device as in claim 4, said vacuum port including a ball check valve seated upon an O-ring, such that atmospheric pressure closes said valve against said o-ring when said vacuum source is removed.
Claim 7
Dependent Claim
33 words
A vacuum memory holding device as in claim 5, said resilient liner including an outer flange extending over said top plate and being laterally inwardly inclined towards the axis of the individual apertures.
Claim 8
Dependent Claim
34 words
A vacuum memory holding device as in claim 9, the diameter of the resilient liner being smaller than the object to be supported thereon, so as to prevent spray coating of the top plate.
Claim 9
Dependent Claim
29 words
a vacuum memory holding device as in claim 7, the soft inner ring extending vertically above the resilient liner and laterally inwardly of the inclined portion of said liner.
Claim 10
Dependent Claim
38 words
A vacuum memory holding device as in claim 8, said tray inner and outer lips for said top plate object apertures respectively including round-hole flanges and three or more punched out lips extending vertically above said hole flanges.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-25 | 1974-07-27 | 1975-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-25 | 1978-07-27 | 1979-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-25 | 1982-07-27 | 1983-01-26 | $7700.00 | Window Closed / Lapsed |