Patent US3630804A successfully refreshed from Google Patents.
US3630804A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etching apparatus
Assignee: Chemcut Corp
•
Filing: 1968-08-19
•
Granted: 1971-12-28
•
Expires: 1988-08-19
Abstract
Abstract An apparatus is provided for etching articles, in particular, for etching wafers in accordance with the production of semiconductor devices. The apparatus employs a rotatable conveying device for traversing wafers carried thereby through a spray of acid, neutralizer, water or the like, for a portion of the cycle of operation of the apparatus, the wafers then being air dried during a further portion of the cycle of operation of the apparatus, the air drying cycle generally being conducted at a high speed.
Inventors
- 👤 Frederick E Coffman
- 👤 Blair W Heffner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:21
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/08; H; H10; H10P; H10P50/00
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
51 words
The apparatus of claim 1, wherein said etching zone comprises a portion of said chamber that is substantially closed relative to the remainder of said chamber, with confined opening means provided between said zone and the remainder of said chamber for entry of articles to be etched into said etching zone.
Claim 2
Dependent Claim
16 words
The apparatus of claim 2, wherein said etching zone is provided with a movable access opening.
Claim 3
Dependent Claim
18 words
The apparatus of claim 3, wherein, said chamber is partially defined by an openable hood comprising access means.
Claim 4
Dependent Claim
16 words
The apparatus of claim 4, wherein said etching zone is partially defined by a movable baffle.
Claim 5
Dependent Claim
27 words
The apparatus of claim 5, wherein means are provided for automatic movement of said baffle for access to said etching zone upon opening said hood for access.
Claim 6
Dependent Claim
39 words
The apparatus of claim 1, wherein said pin means have uppermost ends which aggregately define surface means for seating an article carried thereby in a partiAlly forwardly facing direction relative to the direction of rotation of said plate means.
Claim 7
Dependent Claim
42 words
The apparatus of claim 1, wherein said pin means have uppermost ends which aggregately define planar surface means for seating a flat article carried thereby in a tilted partially forwardly facing direction relative to the direction of rotation of said plate means.
Claim 8
Dependent Claim
33 words
The apparatus of claim 8, wherein said surface means also provides for seating an article carried thereby in a tilted partially radially inwardly facing direction relative to the center of said disc member.
Claim 9
Dependent Claim
46 words
The apparatus of claim 1, wherein said pin means have uppermost ends which aggregately define surface means for seating an article carried thereby at an angular orientation for opposing both centrifugal and aerodynamic lifting forces acting upon an article due to rotation of said disc members.
Claim 10
Dependent Claim
27 words
The apparatus of claim 1, wherein said plate means comprise individual perforate disclike elements, each of substantially the diameter of a wafer-type article to be carried thereby.
Claim 11
Dependent Claim
23 words
The apparatus of claim 2, wherein spray means are provided in said etch zone for spraying an etching fluid on articles transversed therethrough.
Claim 12
Dependent Claim
35 words
The apparatus of claim 2, wherein means are provided in said etch zone for selectively spraying at least one of an etching fluid spray, a neutralizing fluid spray, or water spray on articles traversed therethrough.
Claim 13
Dependent Claim
26 words
The apparatus of claim 13, wherein said selective spraying means comprises a compressed air spraying device for dispersing any of said sprays in said etch zone.
Claim 14
Dependent Claim
27 words
The apparatus of claim 2, wherein a portion of said chamber comprises a drying zone, and means are provided for delivering drying fluid to said drying zone.
Claim 15
Dependent Claim
11 words
The apparatus of claim 15, wherein said means comprise air ducts.
Claim 16
Dependent Claim
109 words
Apparatus for etching articles comprising chamber means for housing articles to be etched, means within said chamber means for spraying articles with treating fluid in a treatment zone of said chamber means, and means for rotatably conveying articles to be sprayed into, through, and out of said treatment zone of said chamber means, wherein said rotatably conveying means includes perforate plate means carried on its periphery for traversal of said treatment zone by said plate means during rotation thereof, with said plate means carrying upstanding pin means for engaging articles to be carried by said plate means, with minimum contact area of ends of said pin means on articles.
Claim 17
Dependent Claim
15 words
The apparatus of claim 17, including means for air drying articles sprayed with treating fluid.
Claim 18
Dependent Claim
16 words
The apparatus of claim 18, including means for selectively actuating said spraying means and drying means.
Claim 19
Dependent Claim
15 words
The apparatus of claim 19, wherein said rotatable conveying means has plural speed drive means.
Claim 20
Dependent Claim
21 words
The apparatus of claim 20, wherein said drive means includes air turbine means for high speed driving of said conveying means.
Claim 21
Dependent Claim
79 words
The apparatus of claim 17, wherein a vent means is provided for drawing off treatment fluid from said chamber means, and with said chamber means being provided with partition means and air inlet means, that, in cooperation with said vent means, comprise means for dividing said chamber during spraying of treating fluid into a wet zone in direct contact with treating fluid being sprayed, a semiwet zone in indirect contact with treating fluid being sprayed, and a dry zone.
References Cited (Backward Citations)
US3406697A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-27 | 1975-06-28 | 1975-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-27 | 1979-06-28 | 1979-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-27 | 1983-06-28 | 1983-12-28 | $7700.00 | Window Closed / Lapsed |