Patent US3677853A successfully refreshed from Google Patents.
US3677853A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer mounting
Assignee: International Business Machines Corp
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Filing: 1969-12-30
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Granted: 1972-07-18
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Expires: 1989-12-30
Abstract
Abstract WAFERS ARE BONDED TO A CARRIER SURFACE WHICH TENDS TO BULGE IN REACTION TO THE BONDING PROCESS, PARTICULARLY HEATING, BUT TO RETURN TO A FLAT CONFIGURATION AFTER BOND CURING. VOID-FREE BONDING IS OBTAINED BY SHAPING THE BONDING MATERIAL TO THE CARRIER BULGE AND INTRODUCING THE WAFER TO THE HIGH POINT OF THE BULGE RELATIVE TO THE FLAT SURFACE OF THE CARRIER. CLOSURE PRESSURE BETWEEN WAFER AND CARRIER AND THE REACTION OF THE CARRIER IN COOLING TO A SUBSTANTIALLY FLAT SURFACE CONFIGURATION COPERATE TO COMPLETE THE BONDING.
Inventors
- 👤 Thomas A Anzelone Jr
- 👤 Harold A Larson
- 👤 Alfred A Stricker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:56
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/30; H10P; H10P50/00; H10W72/01; H10W72/013; H10W72/01365; H10W72/071; H10W72/073; H10W72/07311; H10W72/07331; H10W72/07337; Y; Y10; Y10S; Y10S228/00; Y10S228/903
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-07-18 | 1976-01-17 | 1976-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-07-18 | 1980-01-17 | 1980-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-07-18 | 1984-01-17 | 1984-07-18 | $7700.00 | Window Closed / Lapsed |