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US3703306A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of hermetically sealing silicon to a low expansion alloy

Assignee: Xerox Corp
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Filing: 1970-11-09
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Granted: 1972-11-21
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Expires: 1990-11-09
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Abstract

Abstract A surface of silicon is hermetically sealed to a surface of Kovar by coating the surface of silicon with several thin layers of silver, coating the surface of Kovar with a layer of copper, applying a tin-base sealing alloy between the two coated surfaces and then heating the tin-base sealing alloy so as to cause it to fuse to the two coated surfaces.

Inventors

  • 👤 Murdock H Lachance

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 01:06
CPC Classifications
B; B23; B23K; B23K35/00; B23K35/001; B23K2035/008; H; H10; H10W; H10W72/00; H10W72/071; H10W72/073; H10W72/07331; H10W72/07336; H10W72/30; H10W72/351; H10W72/352; Y; Y10; Y10T; Y10T428/00; Y10T428/24

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 126 words
A method for forming a hermetic seal between the mating surfaces of a silicon member and a metal alloy comprising the steps of: a. preparing the mating surfaces of the silicon member and said metal alloy. b. forming a plurality of metal layers on the surface of said silicon member, each of said layers consisting essentially of silver, c. coating the metal alloy mating surface with a layer of copper, d. interposing a sealing alloy between the layered mating surfaces, e. heating the sealing alloy to a temperature at least equal to the melting point of the sealing alloy, and f. cooling the contact area of the mating surfaces and the sealing alloy to effect fusing of the sealing alloy to the silver and copper layers.
Claim 2
Independent Claim 126 words
A method for forming a hermetic seal between the mating surfaces of a silicon member and a metal alloy comprising the steps of: a. preparing the mating surfaces of the silicon member and said metal alloy. b. forming a plurality of metal layers on the surface of said silicon member, each of said layers consisting essentially of silver, c. coating the metal alloy mating surface with a layer of copper, d. interposing a sealing alloy between the layered mating surfaces, e. heating the sealing alloy to a temperature at least equal to the melting point of the sealing alloy, and f. cooling the contact area of the mating surfaces and the sealing alloy to effect fusing of the sealing alloy to the silver and copper layers.
Claim 3
Dependent Claim 13 words
The method as defined in claim 1 wherein said metal alloy comprises Kovar.
Claim 4
Dependent Claim 24 words
The method as defined in claim 2 wherein said sealing alloy is heated in an argon atmosphere to a temperature of about 242* C.
Claim 5
Dependent Claim 66 words
A hermetically sealed assembly comprising a silicon member, a plurality of metal layers overlying one surface of said silicon member, said metal layers each consisting essentially of silver, a metal alloy member having a copper coating, and a sealing alloy sandwiched between the layered surface of said silicon member and said coated metal alloy member, said sealing alloy being fused to said copper and silver layers.
Claim 6
Dependent Claim 66 words
A hermetically sealed assembly comprising a silicon member, a plurality of metal layers overlying one surface of said silicon member, said metal layers each consisting essentially of silver, a metal alloy member having a copper coating, and a sealing alloy sandwiched between the layered surface of said silicon member and said coated metal alloy member, said sealing alloy being fused to said copper and silver layers.

References Cited (Backward Citations)

US3243072A Cited
US2163408A Cited
US2776472A Cited
US3006069A Cited
US2974761A Cited
US3025439A Cited
US3418422A Cited
US3462349A Cited
US3609471A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1975-11-21 1976-05-22 1976-11-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1979-11-21 1980-05-22 1980-11-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1983-11-21 1984-05-22 1984-11-21 $7700.00 Window Closed / Lapsed

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