Patent US2197357A successfully refreshed from Google Patents.
Patent US3748253A successfully refreshed from Google Patents.
US3748253A
Expired / Lapsed
US
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Apparatus with labyrinth heat exchanger for the sputtering depositionof thin films
Assignee: AG Communication Systems Corp
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Filing: 1972-01-24
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Granted: 1973-07-24
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Expires: 1992-01-24
Abstract
Abstract SPUTTERING APPARATUS IS IMPROVED BY PROVIDING THE CATHODE THEREOF WITH AN INTEGRALLY FORMED GRADED LABYLINTH HEAT EXCHANGER THROUGH WHICH A COOLANT IS CIRCULATED TO MAINTAIN THE CATHODE AND TARGET MATERIAL AT A UNIFORM TEMPERATURE. COOLANT PARTS AND POWER INPUT PROVISIONS ARE MADE SUCH THAT THE SPUTTERING CHAMBER MAY BE HERMETICALLY SEALED WITH A SINGLE SEAL.
Inventors
- 👤 J Provenzano
- 👤 R Govednik
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:01
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-23 | 1977-01-22 | 1977-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-23 | 1981-01-22 | 1981-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-23 | 1985-01-22 | 1985-07-24 | $7700.00 | Window Closed / Lapsed |