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US3784858A Expired / Lapsed US ⏱️ 0.0 years remaining

Ion sources

Assignee: Individual
•
Filing: 1972-11-24
•
Granted: 1974-01-08
•
Expires: 1992-11-24
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Abstract

Abstract An ion source comprising a right-circular cylindrical cathode having two anode rods extending through the cylinder and symmetrically disposed about its axis. An ion beam outlet aperture is formed in the cylindrical wall of the cathode, and an inlet is provided in the cathode for introducing a gas therein.

Inventors

  • 👤 J Franks

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 16:38
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 69 words
An ion source comprising a hollow cathode having a wall, the wall having an ion beam outlet aperture formed therein, 2n anodes in the cylinder and symmetrically disposed about the axis thereof where n is an integer, means for coupling the cathode and the anodes to a source of an electric potential for the ion source, the cathode further including inlet means for introducing a gas into the cylinder.
Claim 2
Dependent Claim 69 words
An ion source comprising a hollow cathode having a wall, the wall having an ion beam outlet aperture formed therein, 2n anodes in the cylinder and symmetrically disposed about the axis thereof where n is an integer, means for coupling the cathode and the anodes to a source of an electric potential for the ion source, the cathode further including inlet means for introducing a gas into the cylinder.
Claim 3
Dependent Claim 26 words
An ion source according to claim 1, wherein said gas inlet means is provided in said cathode substantially opposite said outlet aperture and axially displaced therefrom.
Claim 4
Dependent Claim 21 words
An ion source according to claim 1, wherein the cathode is cylindrical and the said wall is the cylindrical wall thereof.
Claim 5
Dependent Claim 30 words
An ion source according to claim 3, wherein said gas inlet means is provided in said cylindrical wall of said cathode substantially opposite said outlet aperture and axially displaced therefrom.
Claim 6
Dependent Claim 17 words
An ion source according to claim 2, wherein said anodes are in the form of elongate rods.
Claim 7
Dependent Claim 13 words
An ion source according to claim 5, wherein there are two anode rods.
Claim 8
Dependent Claim 25 words
An ion source according to claim 6, wherein said outlet aperture is formed about a plane substantially normal to the plane of the anode rods.
Claim 9
Dependent Claim 15 words
An ion source according to claim 5, wherein said outlet aperture is an elongate slot.
Claim 10
Dependent Claim 34 words
An ion source according to claim 7, further comprising two caps mounted on the ends of said cylinder and electrically coupled thereto, said end caps having apertures formed therein through which the anodes protrude.
Claim 11
Dependent Claim 37 words
An ion source according to claim 9, further comprising two plates of insulating material mounted on and externally of said two end caps respectively, said insulating means providing a means for maintaining the anode rods in position.
Claim 12
Dependent Claim 31 words
An ion source according to claim 10, further comprising a chamber, means for mounting the source in the chamber, evacuating means, and means for coupling the chamber to the evacuating means.
Claim 13
Dependent Claim 29 words
An ion source according to claim 11, wherein said chamber comprises an inlet and means are provided for coupling said inlet to said gas inlet means in said cylinder.
Claim 14
Dependent Claim 15 words
An ion source according to claim 12, wherein said outlet aperture is an elongate slot.

References Cited (Backward Citations)

US3484602A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-01-07 1977-07-09 1978-01-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-01-07 1981-07-09 1982-01-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-01-07 1985-07-09 1986-01-08 $7700.00 Window Closed / Lapsed

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