Patent US3823489A successfully refreshed from Google Patents.
US3823489A
Expired / Lapsed
US
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Vacuum lock for plasma treatment of substrates
Assignee: Celanese Corp
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Filing: 1972-09-26
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Granted: 1974-07-16
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Expires: 1992-09-26
Abstract
Abstract A method and apparatus for efficiently generating a gaseous plasma particularly for the treatment of substrates. A radio frequency electrical signal is applied to two electrodes disposed exteriorly of an electrically insulative, gas impervious envelope. A central passage extends into the envelope and one electrode is disposed in the central passage. The electrodes are separated at least in part by the envelope and the radio frequency signal applied to the electrodes excites the gas within the envelope to thereby generate a gaseous plasma therein. The gas conditions within the envelope differ from the gas conditions exteriorly thereof and the amplitude of the radio frequency signal is insufficient to generate a plasma outside the chamber defined by the envelope. Since the plasma does not contact the electrodes, efficiency is maximized and the plasma is not contaminated by the electrodes. In addition, the surface areas of the electrodes differ substantially thereby creating a plasma within the envelope which varies in concentration in a predetermined manner, with the concentration being greatest near the center of the envelope. A substrate may therefore be contacted by varying plasma concentration as it passes through the envelope and the outer wall of the envelope is not contaminated by the plasma. A vacuum lock for preventing gas leakage into the envelope is also disclosed.
Inventors
- 👤 A Boom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:37
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32091; B; B29; B29C; B29C59/00; B29C59/14; D; D06; D06M; D06M14/00; D06M14/18; D06M14/26; D06M14/30; D06M14/34; H01J37/02; H01J37/18; H01J37/32431; H01J37/32733; H01J37/32743; H01J37/32752; H01J37/32761; H01J37/3277; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/336
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
101 words
Apparatus for continuously passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces comprising: first means defining an elongated passage for providing communication between the spaces, said passage and said substrate generally conforming in cross section throughout the length of said passage; transition means at the end of said first means in the first space for introducing the substrate into said passage; and, a plurality of pressure sources in fluid communication with said elongated passage at spaced points along the length thereof.
Claim 2
Dependent Claim
101 words
Apparatus for continuously passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces comprising: first means defining an elongated passage for providing communication between the spaces, said passage and said substrate generally conforming in cross section throughout the length of said passage; transition means at the end of said first means in the first space for introducing the substrate into said passage; and, a plurality of pressure sources in fluid communication with said elongated passage at spaced points along the length thereof.
Claim 3
Dependent Claim
15 words
The apparatus of claim 1 wherein the pressure of each of said sources are different.
Claim 4
Dependent Claim
45 words
The apparatus of claim 2 wherein the second gas pressure is lower than the first gas pressure and wherein the relative pressures of said sources vary progressively from higher to lower along the length of said passage from the first space to the second space.
Claim 5
Dependent Claim
34 words
The apparatus of claim 1 wherein said first means comprises a substantially hollow, elongated tube and said transition means comprises a flared end portion on the end of said tube in the first space.
Claim 6
Dependent Claim
38 words
The apparatus of claim 4 wherein the substrate is a fiber bundle and the substrate dimensions slightly exceed the internal dimensions of said tube in cross-section whereby the substrate is mechanically compressed as it passes through said passage.
Claim 7
Dependent Claim
31 words
The apparatus of claim 4 wherein the substrate is substantially incompressible without damage thereto and wherein the substrate dimensions are substantially equal to the internal dimensions of said tube in cross-section.
Claim 8
Dependent Claim
167 words
Sealing apparatus for passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces comprising: a hollow tube of generally circular cross section having a substantially constant internal diameter throughout the length thereof for providing communication between the first and second spaces; hollow transition means at the upstream end of said hollow tube for introducing the substrate into said hollow tube, said transition means having an internal diameter at the upstream end thereof larger than the internal diameter of said hollow tube and having an internal diameter at the downstream end thereof substantially equal to the internal diameter of said hollow tube; and, pressure means in fluid communication with the interior of said hollow tube at spaced points along the length thereof, said means being adapted for fluid communication at one of said spaced points with a source of pressure substantially equal to the pressure of the second space.
Claim 9
Dependent Claim
167 words
Sealing apparatus for passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces comprising: a hollow tube of generally circular cross section having a substantially constant internal diameter throughout the length thereof for providing communication between the first and second spaces; hollow transition means at the upstream end of said hollow tube for introducing the substrate into said hollow tube, said transition means having an internal diameter at the upstream end thereof larger than the internal diameter of said hollow tube and having an internal diameter at the downstream end thereof substantially equal to the internal diameter of said hollow tube; and, pressure means in fluid communication with the interior of said hollow tube at spaced points along the length thereof, said means being adapted for fluid communication at one of said spaced points with a source of pressure substantially equal to the pressure of the second space.
Claim 10
Dependent Claim
27 words
The apparatus of claim 7 wherein said pressure means includes means for establishing a pressure differential between said spaced points along the length of said hollow tube.
Claim 11
Dependent Claim
116 words
Sealing apparatus for passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces comprising: a hollow tube for providing communication between the first and second spaces, the internal cross section area of said hollow tube being continuously reduced throughout the length thereof from the first space to the second space; and, pressure means in fluid communication with the interior of said hollow tube at spaced points along the length thereof, said means being adapted for fluid communication at one of said spaced points with a source of pressure substantially equal to the pressure of the second space.
Claim 12
Dependent Claim
116 words
Sealing apparatus for passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces comprising: a hollow tube for providing communication between the first and second spaces, the internal cross section area of said hollow tube being continuously reduced throughout the length thereof from the first space to the second space; and, pressure means in fluid communication with the interior of said hollow tube at spaced points along the length thereof, said means being adapted for fluid communication at one of said spaced points with a source of pressure substantially equal to the pressure of the second space.
Claim 13
Dependent Claim
27 words
The apparatus of claim 9 wherein said pressure means includes means for establishing A pressure differential between said spaced points along the length of said hollow tube.
Claim 14
Dependent Claim
107 words
In a method of passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces wherein the substrate is passed through an elongate hollow tube of substantially constant internal cross section, the improvement comprising the establishment of fluid communication of the interior of the hollow tube with a source of pressure at each of a plurality of spaced points along the length of the hollow tube, the pressure of the source at one of the plurality of spaced points being substantially equal to the pressure of the second space.
Claim 15
Dependent Claim
107 words
In a method of passing a substrate from a first space at a first gas pressure into a second space at a second gas pressure while maintaining the pressure differential between the spaces wherein the substrate is passed through an elongate hollow tube of substantially constant internal cross section, the improvement comprising the establishment of fluid communication of the interior of the hollow tube with a source of pressure at each of a plurality of spaced points along the length of the hollow tube, the pressure of the source at one of the plurality of spaced points being substantially equal to the pressure of the second space.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-07-15 | 1978-01-14 | 1978-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-07-15 | 1982-01-14 | 1982-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-07-15 | 1986-01-14 | 1986-07-16 | $7700.00 | Window Closed / Lapsed |