Abstract A wafer transfer fixture for transferring a batch of circular semiconductor wafers from deep-walled containers used for storage and washing operations to slotted platforms used as furnace boats. The wafer transfer fixture comprises a wafer carrier having transversely-disposed grooves for holding individual wafers, which is split longitudinally into two halves like a clam shell and is mounted within a support frame. Each half of the split carrier is hinged about an upper, central axis to enable the halves to separate in clam-shell fashion when cammed apart by thumb depressed plungers on the support frame. The top face of the fixture is arranged to register with the top face of the deep-walled container to enable convenient transfer from container to fixture, and the reverse, of the entire batch of wafers by gravity action. The bottom of the split carrier is partially open so that the lower segment of each wafer protrudes. The transfer fixture is placed atop a furnace boat using registration elements whereupon each protruding wafer rests in a corresponding slot in the platform of the furnace boat. The split halves of the carrier are then cammed apart so that the fixture can be lifted away leaving the batch of wafers resting on the furnace boat. The process is reversible.
A wafer transfer fixture for transferring a batch of substantially circular semiconductor wafers between a deepwalled, internally grooved container and a slotted, unwalled platform-like carrier for holding a batch of wafers in substantially parallel upright array, said fixture comprising a wafer carrier having a series of parallel, transverselydisposed, internal grooves for retaining said wafers in a separated array, said carrier having an open top and being split into two half portions by a vertical, longitudinally disposed plane, said carrier having a bottom portion arranged to enable a portion of each wafer to protrude therefrom, a support member for hingedly supporting the half portions of the split carrier in clam-shell relation, and camming means attached to said support frame and said half portions for rotating each carrier half portion to separate the carrier halves a distance greAter than the diameter of the wafer.
Claim 2
Dependent Claim
142 words
A wafer transfer fixture for transferring a batch of substantially circular semiconductor wafers between a deepwalled, internally grooved container and a slotted, unwalled platform-like carrier for holding a batch of wafers in substantially parallel upright array, said fixture comprising a wafer carrier having a series of parallel, transverselydisposed, internal grooves for retaining said wafers in a separated array, said carrier having an open top and being split into two half portions by a vertical, longitudinally disposed plane, said carrier having a bottom portion arranged to enable a portion of each wafer to protrude therefrom, a support member for hingedly supporting the half portions of the split carrier in clam-shell relation, and camming means attached to said support frame and said half portions for rotating each carrier half portion to separate the carrier halves a distance greAter than the diameter of the wafer.
Claim 3
Dependent Claim
29 words
A wafer transfer fixture in accordance with claim 1 in which said wafer carrier portion has registration means on the top face thereof for mating with the deep-walled container.
Claim 4
Dependent Claim
29 words
A wafer transfer fixture in accordance with claim 1 in which portions of said support member are arranged to register with alignment means for the slotted unwalled platform-like carrier.