Patent US3886578A successfully refreshed from Google Patents.
US3886578A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Low ohmic resistance platinum contacts for vanadium oxide thin film devices
Assignee: Multi State Devices Ltd
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Filing: 1973-02-26
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Granted: 1975-05-27
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Expires: 1993-02-26
Abstract
Abstract A thin film device having a low ohmic contact resistance comprising a plate-like substrate of electrically insulating material, spaced platinum contacts deposited on the surface of such substrate, and a thin film of vanadium oxide deposited over such substrate and bridging a portion of the spaced platinum contacts. The vanadium oxide film has a low ohmic contact resistance with the platinum film and also a good adhesion to such platinum film.
Inventors
- 👤 H Keith Eastwood
- 👤 Barry A Noval
- 👤 Marcus Arts
- 👤 Michael Leitner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 17:51
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/04; H01C7/041; H01C7/042; H01C7/043; H01C7/047; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W70/692
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
83 words
A THIN FILM DEVICE HAVING A LOW OHMIC CONTACT RESISTANCE COMPRISING: A. A PLATE-LIKE SUBSTRATE OF ELECTRICALLY INSULATING MATERIAL, B. SPACED PLATINUM CONTACTS DEPOSITED ON THE SURFACE OF SAID SUBSTRATE AND C. A THIN FILM OF VANADIUM OXIDE HAVING A THICKNESS OF FROM 1000 TO 5000 A DEPOSITED OVER SAID SUBSTRATE AND BRIDGING A PORTION OF SAID SPACED PLATINUM CONTACTS, SAID VANADIUM OXIDE HAVING AN OHMIC CONTACT RESISTANCE WHICH IS LOWER THAN 10 OHMS AND HAVING A GOOD ADHESION WITH SAID PLATINUM CONTACTS.
Claim 2
Dependent Claim
83 words
A THIN FILM DEVICE HAVING A LOW OHMIC CONTACT RESISTANCE COMPRISING: A. A PLATE-LIKE SUBSTRATE OF ELECTRICALLY INSULATING MATERIAL, B. SPACED PLATINUM CONTACTS DEPOSITED ON THE SURFACE OF SAID SUBSTRATE AND C. A THIN FILM OF VANADIUM OXIDE HAVING A THICKNESS OF FROM 1000 TO 5000 A DEPOSITED OVER SAID SUBSTRATE AND BRIDGING A PORTION OF SAID SPACED PLATINUM CONTACTS, SAID VANADIUM OXIDE HAVING AN OHMIC CONTACT RESISTANCE WHICH IS LOWER THAN 10 OHMS AND HAVING A GOOD ADHESION WITH SAID PLATINUM CONTACTS.
Claim 3
Dependent Claim
31 words
A thin film device as defined in claim 1, wherein said substrate is made of a material selected from the group consisting of sapphire, polycrystalline alumina, beryllium oxide, quartz and glass.
Claim 4
Dependent Claim
23 words
A thin film device as defined in claim 2, wherein said material is selected from the group consisting of sapphire, quartz, and glass.
Claim 5
Dependent Claim
52 words
A thin film device as defined in claim 3, further comprising contacts of titanium material deposited on said substrate and wherein said spaced platinum contacts are deposited over said titanium contacts, said titanium material being used to enhance the adhesion of the platinum contacts to a substrate of sapphire, quartz or glass.
Claim 6
Dependent Claim
28 words
A thin film device as defined in claim 1, further comprising a gold layer deposited on the portions of said platinum contacts not covered by the vanadium oxide.
Claim 7
Dependent Claim
28 words
A thin film device as defined in claim 1, further comprising an aluminum layer deposited on the portions of said platinum contacts not covered by the vanadium oxide.
Claim 8
Dependent Claim
22 words
A thin film device as defined in claim 1, further comprising an overcoating of silicon dioxide placed over the vanadium oxide film.
Claim 9
Dependent Claim
17 words
A thin film device as defined in claim 1 wherein said thin film consists of vanadium dioxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-05-26 | 1978-11-25 | 1979-05-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-05-26 | 1982-11-25 | 1983-05-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-05-26 | 1986-11-25 | 1987-05-27 | $7700.00 | Window Closed / Lapsed |