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US3985915A
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Use of nitrocellulose containing 10.5 to 12% nitrogen as electron beam positive resists
Assignee: International Business Machines Corp
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Filing: 1974-12-20
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Granted: 1976-10-12
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Expires: 1994-12-20
Abstract
Abstract Very sensitive electron beam positive resists have been obtained using films of nitrocellulose containing 10.5 to 12% nitrogen.
Inventors
- 👤 Edward Gipstein
- 👤 Wayne M. Moreau
- 👤 Omar U. Need, III
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
53 words
A process for forming an image with a positive resist, said process comprising the steps of: 1. forming on a substrate a film comprising nitrocellulose containing from 10.5 to 12% nitrogen, 2. exposing said film in a predetermined pattern to radiation with electron beams at a strength of from 5 to 30 KV,
Claim 2
Dependent Claim
53 words
A process for forming an image with a positive resist, said process comprising the steps of: 1. forming on a substrate a film comprising nitrocellulose containing from 10.5 to 12% nitrogen, 2. exposing said film in a predetermined pattern to radiation with electron beams at a strength of from 5 to 30 KV,
Claim 3
Dependent Claim
11 words
removing the radiation exposed portion of said film with a solvent.
Claim 4
Dependent Claim
11 words
removing the radiation exposed portion of said film with a solvent.
Claim 5
Dependent Claim
12 words
A process as claimed in claim 1, wherein the solvent is di-t-butylketone.
References Cited (Backward Citations)
US3535137A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-10-12 | 1980-04-12 | 1980-10-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-10-12 | 1984-04-12 | 1984-10-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-10-12 | 1988-04-12 | 1988-10-12 | $7700.00 | Window Closed / Lapsed |