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US4060448A
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Yttrium iron garnet disks on gadolinium gallium substrates for microwave applications
Assignee: Honeywell International Inc
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Filing: 1977-01-28
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Granted: 1977-11-29
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Expires: 1997-01-28
Abstract
Abstract A process is disclosed for fabricating narrow line-width yttrium iron garnet (YIG) disks suitable for microwave applications. The process comprises forming an epitaxial thin film of yttrium iron garnet, containing from about 0.5 to 1.5 atom percent trivalent lanthanum ions on the dodecahedral sites, on a substrate such as gadolinium gallium garnet (GGG), forming a thin layer of SiO2 on the YIG film, forming a photoresist mask layer on the SiO2 layer, removing portions of the photoresist mask layer to expose portions of the underlying SiO2 layer, removing portions of the SiO2 layer to expose portions of the underlying YIG layer and removing the exposed portions of the YIG layers to form isolated La:YIG disks supported on the GGG substrate. The substrate is then further processed, as by dicing, to provide individual La:YIG disks for fabrication into microwave devices. Linewidths of about 0.45 Oe are obtained by the process.
Inventors
- 👤 Michael Nemiroff
- 👤 Hong Jun Yue
- 👤 William Russell Schevey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:18
CPC Classifications
H; H01; H01F; H01F41/00; H01F41/32; H01F41/34; H01P; H01P11/00
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
134 words
A process for fabricating microwave electronic devices comprising yttrium iron garnet disks which comprises a. forming a thin film of yttrium iron garnet, doped with about 0.5 to 1.5 atom percent of trivalent lanthanum ions, on a gadolinium gallium garnet substrate; b. forming a thin layer of SiO 2 on the lanthanum-doped yttrium iron garnet layer; c. forming a photoresist mask layer on the SiO 2 layer; d. removing portions of the photoresist mask layer to expose portions of the underlying SiO 2 layer; e. removing the exposed portions of the SiO 2 layer to expose portions of the underlying lanthanum-doped yttrium iron garnet film; and f. removing the exposed portions of the yttrium iron garnet film to form an array of lanthanum-doped yttrium iron garnet disks supported on the gadolinium gallium garnet substrate.
Claim 2
Dependent Claim
134 words
A process for fabricating microwave electronic devices comprising yttrium iron garnet disks which comprises a. forming a thin film of yttrium iron garnet, doped with about 0.5 to 1.5 atom percent of trivalent lanthanum ions, on a gadolinium gallium garnet substrate; b. forming a thin layer of SiO 2 on the lanthanum-doped yttrium iron garnet layer; c. forming a photoresist mask layer on the SiO 2 layer; d. removing portions of the photoresist mask layer to expose portions of the underlying SiO 2 layer; e. removing the exposed portions of the SiO 2 layer to expose portions of the underlying lanthanum-doped yttrium iron garnet film; and f. removing the exposed portions of the yttrium iron garnet film to form an array of lanthanum-doped yttrium iron garnet disks supported on the gadolinium gallium garnet substrate.
Claim 3
Dependent Claim
29 words
The process of claim 1 which further comprises slicing the array to form individual sections of gadolinium gallium garnet, each supporting at least one lanthanum-doped yttrium iron garnet disk.
Claim 4
Dependent Claim
24 words
The process of claim 1 in which the yttrium iron garnet is doped with about 0.67 to 1 atom percent of trivalent lanthanum ions.
Claim 5
Dependent Claim
45 words
The process of claim 1 in which the thin film of lanthanum-doped yttrium iron garnet is formed on the gadolinium gallium garnet substrate by an isothermal liquid phase epitaxy procedure such that the growth rate of the thin film is at least about 1 μm/min.
Claim 6
Dependent Claim
37 words
The process of claim 1 in which the thin layer of SiO 2 is deposited on the thin film of lanthanum-doped yttrium iron garnet by a process that produces substantially no surface damage in the thin film.
Claim 7
Dependent Claim
33 words
The process of claim 5 in which the thin layer of SiO 2 is deposited by applying a dopant-free spin-on SiO 2 source solution which is then decomposed to form SiO 2 .
Claim 8
Dependent Claim
48 words
The proces of claim 6 in which densification and adhesion of the SiO 2 layer to the lanthanum-doped yttrium iron garnet film is improved by annealing the SiO 2 layer at a temperature of about 400° to 900° C following application of the source solution to the film.
Claim 9
Dependent Claim
31 words
The process of claim 7 in which the SiO 2 layer is annealed for a time ranging from about 10 to 60 min, the lower times being associated with higher temperatures.
Claim 10
Dependent Claim
15 words
The process of claim 7 in which the annealing is performed in an inert atmosphere.
Claim 11
Dependent Claim
22 words
The process of claim 1 in which the exposed portions of the SiO 2 layer are removed by a buffered HF solution.
Claim 12
Dependent Claim
48 words
The process of claim 10 in which the exposed portions of the SiO 2 layer are substantially removed by an etchant comprising a solution of 40% NH 4 F and 49% HF in a ratio of about 4 to 1, the etchant being maintained at about 25° C.
Claim 13
Dependent Claim
48 words
The process of claim 10 in which the exposed portions of the SiO 2 layer are substantially removed by an etchant comprising a solution of 40% NH 4 F and 49% HF in a ratio of about 10 to 1, the etchant being maintained at about 25° C.
Claim 14
Dependent Claim
33 words
The process of claim 1 in which the exposed portions of the lanthanum-doped yttrium iron garnet layer are substantially removed by an etchant comprising 85% H 3 PO 4 at about 160° C.
Claim 15
Dependent Claim
33 words
The process of claim 1 in which the exposed portions of the lanthanum-doped yttrium iron garnet layer are substantially removed by an etchant comprising 85% H 3 PO 4 at about 140° C.
Claim 16
Dependent Claim
72 words
The process of claim 1 in which the exposed portions of the SiO 2 layer are substantially removed by an etchant comprising a solution of 40% HF in a ratio of about 10 to 1, the etchant being maintained at about 25° C, and in which the exposed portions of the lanthanum-doped yttrium iron garnet layer are substantially removed by an etchant comprising 85% H 3 PO 4 at about 140° C.
References Cited (Backward Citations)
US3753814A
Cited
US3991233A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-11-28 | 1981-05-30 | 1981-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-11-28 | 1985-05-30 | 1985-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-11-28 | 1989-05-30 | 1989-11-29 | $7700.00 | Window Closed / Lapsed |