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US4077818A Expired / Lapsed US ⏱️ 0.0 years remaining

Process for utilizing low-cost graphite substrates for polycrystalline solar cells

Assignee: National Aeronautics and Space Administration
•
Filing: 1976-06-04
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Granted: 1978-03-07
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Expires: 1996-06-04
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Abstract

Abstract Low-cost polycrystalline silicon solar cells supported on substrates are prepared by depositing successive layers of polycrystalline silicon containing appropriate dopants over supporting substrates of a member selected from the group consisting of metallurgical-grade polycrystalline silicon, graphite and steel coated with a diffusion barrier of silica, borosilicate, phosphosilicate, or mixtures thereof such that p-n junction devices are formed which effectively convert solar energy to electrical energy. To improve the conversion efficiency of the polycrystalline silicon solar cells, the crystallite size in the silicon is substantially increased by melting and solidifying a base layer of polycrystalline silicon before depositing the layers which form the p-n junction.

Inventors

  • 👤 Ting L. Chu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 09:44
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/24; H; H10; H10F; H10F10/00; H10F10/10; H10F10/14; H10F71/00; H10F71/128; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/164; H10F77/1642; H10F77/169; H10F77/1692; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/546; Y02E10/547; Y02P; Y02P70/00; Y02P70/50; Y10; Y10S; Y10S117/00; Y10S117/913; Y10S148/00; Y10S148/12; Y10S148/122; Y10S148/15

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 67 words
A method of fabricating polycrystalline silicon solar cells, which comprises: providing a roughened graphite substrate; depositing a low resistivity polycrystalline silicon layer on the roughened graphite; recrystallizing the polycrystalline silicon layer by melting and solidification; and depositing successive layers of polycrystalline silicon containing appropriate dopants on said low resistivity polycrystalline silicon layer such that p-n junction devices are formed which effectively convert solar energy to electrical energy.
Claim 2
Independent Claim 67 words
A method of fabricating polycrystalline silicon solar cells, which comprises: providing a roughened graphite substrate; depositing a low resistivity polycrystalline silicon layer on the roughened graphite; recrystallizing the polycrystalline silicon layer by melting and solidification; and depositing successive layers of polycrystalline silicon containing appropriate dopants on said low resistivity polycrystalline silicon layer such that p-n junction devices are formed which effectively convert solar energy to electrical energy.
Claim 3
Dependent Claim 22 words
The method of claim 1 wherein said low resistivity polycrystalline silicon layer is deposited by the thermal reduction of trichlorosilane with hydrogen.
Claim 4
Dependent Claim 11 words
The method of claim 2 wherein said recrystallizing employs zone melting.
Claim 5
Dependent Claim 11 words
The method of claim 3 wherein said recrystallizing employs unidirectional solidification.
Claim 6
Dependent Claim 31 words
The method of claim 3 wherein said zone melting employs rf coil heating and pulling of the silicon-graphite device to allow the molten zone to traverse the length of the device.
Claim 7
Dependent Claim 31 words
The method of claim 4 wherein said unidirectional solidification employs rf coil heating and adjusting the rf coil spacing so that there is a unidirectional temperature gradient along the silicon-graphite device.
Claim 8
Dependent Claim 13 words
The method of claim 1 wherein said graphite substrate is roughened by sandblasting.
Claim 9
Independent Claim 60 words
A method of fabricating polycrystalline silicon solar cells, which comprises: providing a graphite substrate; melting purified metallurgical grade silicon on the graphite; recrystallizing the device formed by unidirectional solidification; and depositing successive layers of polycrystalline silicon containing appropriate dopants on said purified metallurgical grade silicon such that p-n junction devices are formed which effectively convert solar energy to electrical energy.
Claim 10
Independent Claim 60 words
A method of fabricating polycrystalline silicon solar cells, which comprises: providing a graphite substrate; melting purified metallurgical grade silicon on the graphite; recrystallizing the device formed by unidirectional solidification; and depositing successive layers of polycrystalline silicon containing appropriate dopants on said purified metallurgical grade silicon such that p-n junction devices are formed which effectively convert solar energy to electrical energy.
Claim 11
Dependent Claim 15 words
The method of claim 8 wherein said purified metallurgical grade silicon is purified with chlorine.
Claim 12
Dependent Claim 31 words
The method of claim 8 wherein said unidirectional solidification employs rf coil heating and adjusting the rf coil spacing so that there is a unidirectional temperature gradient along the silicon-graphite device.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1981-03-06 1981-09-05 1982-03-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1985-03-06 1985-09-05 1986-03-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1989-03-06 1989-09-05 1990-03-07 $7700.00 Window Closed / Lapsed

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