Patent US658115A successfully refreshed from Google Patents.
Patent US4196232A successfully refreshed from Google Patents.
US4196232A
Expired / Lapsed
US
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Method of chemically vapor-depositing a low-stress glass layer
Assignee: RCA Corp
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Filing: 1975-12-18
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Granted: 1980-04-01
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Expires: 1995-12-18
Abstract
Abstract A method of chemically vapor-depositing a low-stress glass layer onto a substrate which is heated in an atmosphere including silane, oxygen, and an inert carrier gas, comprises the step of adding water vapor to the atmosphere to increase the water vapor content of the atmosphere substantially above that normally present therein from the oxidation of the silane.
Inventors
- 👤 George L. Schnable
- 👤 Albert W. Fisher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:38
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
80 words
In a method of chemically vapor-depositing a glass layer onto a substrate wherein said substrate is heated in an atmosphere comprising silane and oxygen to a temperature such that said silane is oxidized, the improvement in said method comprising the step of adding water vapor to said atmosphere to increase the water vapor content of said atmosphere substantially above that normally present therein from the oxidation of said silane, whereby the tensile stress of said deposited glass layer is reduced.
Claim 2
Dependent Claim
80 words
In a method of chemically vapor-depositing a glass layer onto a substrate wherein said substrate is heated in an atmosphere comprising silane and oxygen to a temperature such that said silane is oxidized, the improvement in said method comprising the step of adding water vapor to said atmosphere to increase the water vapor content of said atmosphere substantially above that normally present therein from the oxidation of said silane, whereby the tensile stress of said deposited glass layer is reduced.
Claim 3
Dependent Claim
32 words
A method as recited in claim 1 wherein the water vapor content in mole percent of said atmosphere is at least two times that normally present from the oxidation of said silane.
Claim 4
Dependent Claim
36 words
A method as recited in claim 2 wherein the water vapor content in mole percent of said atmosphere is increased by a factor of about four times that normally present from the oxidation of said silane.
Claim 5
Dependent Claim
31 words
A method as recited in claim 3 wherein said deposition temperature is about 350° C. and said layer of glass is deposited at a rate of about 1750 A per minute.
Claim 6
Dependent Claim
36 words
A method as recited in claim 2 wherein the water vapor content in mole percent of said atmosphere is increased by a factor of about seven times that normally present from the oxidation of said silane.
Claim 7
Dependent Claim
31 words
A method as recited in claim 5 wherein said deposition temperature is about 350° C. and said layer of glass is deposited at a rate of about 500 A per minute.
Claim 8
Dependent Claim
36 words
A method as recited in claim 2 wherein the water vapor content in mole percent of said atmosphere is increased by a factor of about nine times that normally present from the oxidation of said silane.
Claim 9
Dependent Claim
31 words
A method as recited in claim 7 wherein said deposition temperature is about 450° C. and said layer of glass is deposited at a rate of about 1000 A per minute.
Claim 10
Dependent Claim
22 words
A method as recited in claim 8 wherein said substrate is a silicon wafer and wherein said glass layer is silicon dioxide.
Claim 11
Dependent Claim
28 words
A method as recited in claim 8 wherein said substrate is a patterned aluminum layer disposed on a silicon wafer and wherein said glass layer is silicon dioxide.
Claim 12
Dependent Claim
28 words
A method as recited in claim 8 wherein said substrate is a patterned aluminum layer disposed on a silicon wafer and wherein said glass layer is phosphosilicate glass.
Claim 13
Dependent Claim
36 words
A method as recited in claim 2 wherein the water vapor content in mole percent of said atmosphere is increased by a factor of about fifteen times that normally present from the oxidation of said silane.
Claim 14
Dependent Claim
31 words
A method as recited in claim 12 wherein said deposition temperature is about 450° C. and said layer of glass is deposited at a rate of about 350 A per minute.
Claim 15
Dependent Claim
28 words
A method as recited in claim 1 wherein the step of adding said water vapor to said atmosphere is performed prior to including said silane in said atmosphere.
Claim 16
Independent Claim
64 words
A method of chemically vapor depositing a glass layer onto a surface of a substrate comprising heating said substrate while contacting said surface with a vaporous mixture comprising silane, oxygen, and water vapor, said water vapor being present in an amount substantially above that normally present therein from the oxidation of said silane, whereby the tensile stress of said deposited glass layer is reduced.
Claim 17
Independent Claim
64 words
A method of chemically vapor depositing a glass layer onto a surface of a substrate comprising heating said substrate while contacting said surface with a vaporous mixture comprising silane, oxygen, and water vapor, said water vapor being present in an amount substantially above that normally present therein from the oxidation of said silane, whereby the tensile stress of said deposited glass layer is reduced.
Claim 18
Dependent Claim
33 words
A method as recited in claim 15 wherein the water vapor content in mole percent of said vaporous mixture is at least two times that normally present from the oxidation of said silane.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-04-01 | 1983-10-01 | 1984-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-04-01 | 1987-10-01 | 1988-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-04-01 | 1991-10-01 | 1992-04-01 | $7700.00 | Window Closed / Lapsed |