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US4347479A
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Test methods and structures for semiconductor integrated circuits for electrically determining certain tolerances during the photolithographic steps
Assignee: International Business Machines Corp
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Filing: 1980-11-24
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Granted: 1982-08-31
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Expires: 2000-11-24
Abstract
Abstract Test methods and structures are provided for electrically monitoring the image size tolerance (ΔW) during a critical photolithographic step in the processing of a semiconductor wafer. The test structure includes two symmetrical resistor bridges combined into a single structure exhibiting a specific topology and having specific nominal parameters of length and width. The structure further includes contact regions and contact voltages are respectively measured across the first and second bridges. The size tolerance is determined from the voltages. Therefore, the factor ΔW is directly determined by means of simple electrical measurements and, therefore, a data base is immediately provided with respect to the wafer in which the structure exists. Also, this invention relates to a method for monitoring the electrical tolerance (ΔA) where images are superimposed, which uses the preceding calculation.
Inventors
- 👤 Rene Cullet
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:51
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2884; G03F7/70605; G03F7/70616; G03F7/70633; G03F7/70653; G03F7/70658; H; H10; H10P; H10P74/00; H10P74/27; H10P74/277; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
376 words
A test structure formed in a semiconductor wafer, the wafer including semiconductor devices therein having lines made by lithographic process steps, the test structure formed in the wafer for electrically monitoring the variations in line width relative to nominal line width (ΔW/W), the structure comprising: a first resistance bridge having a first branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element and a second branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element, the first branch electrically connected in parallel with the second branch and of a resistance value approximately equal to that of the second branch, the first branch further including means for monitoring a voltage across one resistive element in the first branch and the second branch further including means for monitoring voltage across one resistive element in the second branch so that when a current is applied to the bridge, a voltage difference (ΔV 1 ) between the two branches can be measured, and a second resistive bridge having a first branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element and a second branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element, the first branch electrically connected and parallel with the second branch and of a resistance value approximately equal to the second branch, the first branch including means for monitoring a voltage at one resistive element of the first branch and means for monitoring the voltage at one resistive element of the second branch so that the voltage difference between the two elements (ΔV 2 ) can be monitored when a current is applied to the second bridge whereby variation in line width relative to nominal line width (ΔW/W) for lines fabricated in and on the wafer may be directly monitored by measuring the voltage difference (ΔV 1 ) between the first and second branches of the first bridge and the voltage difference (ΔV 2 ) between the first and second branches of the second bridge.
Claim 2
Dependent Claim
376 words
A test structure formed in a semiconductor wafer, the wafer including semiconductor devices therein having lines made by lithographic process steps, the test structure formed in the wafer for electrically monitoring the variations in line width relative to nominal line width (ΔW/W), the structure comprising: a first resistance bridge having a first branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element and a second branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element, the first branch electrically connected in parallel with the second branch and of a resistance value approximately equal to that of the second branch, the first branch further including means for monitoring a voltage across one resistive element in the first branch and the second branch further including means for monitoring voltage across one resistive element in the second branch so that when a current is applied to the bridge, a voltage difference (ΔV 1 ) between the two branches can be measured, and a second resistive bridge having a first branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element and a second branch including at least two resistive elements, each element having a resistance value defined by the length, width and resistivity of the element, the first branch electrically connected and parallel with the second branch and of a resistance value approximately equal to the second branch, the first branch including means for monitoring a voltage at one resistive element of the first branch and means for monitoring the voltage at one resistive element of the second branch so that the voltage difference between the two elements (ΔV 2 ) can be monitored when a current is applied to the second bridge whereby variation in line width relative to nominal line width (ΔW/W) for lines fabricated in and on the wafer may be directly monitored by measuring the voltage difference (ΔV 1 ) between the first and second branches of the first bridge and the voltage difference (ΔV 2 ) between the first and second branches of the second bridge.
Claim 3
Dependent Claim
19 words
The test structure of claim 1 wherein the first bridge is electrically connected in series with the second bridge.
Claim 4
Dependent Claim
91 words
The test structure of claim 2 wherein the width of the voltage monitored resistive elements of the first branch of the first and second bridges respectively are equal to the respective width of the voltage monitored elements of the second branch of the first and second bridges, but wherein the lengths of the voltage monitored resistive elements of the first branch of the first and second bridge respectively are not equal to the respective lengths of the voltage monitored resistive element of the second branch of the first and second bridges.
Claim 5
Dependent Claim
240 words
The test structure of claim 2 wherein the width of the voltage monitored resistive element of the first branch of the first bridge is equal to the width of the voltage monitored element of the second branch of the first bridge and equal to the width of the voltage monitored element of the first branch of the second bridge, but where the width of the voltage monitored element of the second branch of the second bridge is equal to twice the width of the voltage monitored element of the first branch of the second bridge and where the length of the voltage monitored element of the first branch of the first bridge is equal to the length of the voltage monitored element of the first branch of the second bridge and the length of the voltage monitored element of the second branch of the first bridge is equal to the length of the voltage monitored element of the second branch of the second bridge which itself is equal to twice the length of the voltage monitored element of the first branch of the second bridge and where the current supplied to the first bridge and the second bridge is equal so that the variation of line width relative to nominal line width (ΔW/W) is determined by monitoring the voltage measured at the first bridge (ΔV 1 ) and the second bridge (ΔV 2 ) according to the following relationship: ##EQU18##
Claim 6
Dependent Claim
28 words
The test structure of claim 3 or 4 wherein the first and second bridges are provided with contact regions for making electrical connections which minimize end resistance effects.
Claim 7
Dependent Claim
27 words
A structure according to claim 5, wherein the test structure is located either on the periphery of the chip (Kerf) or in a specialized chip (test site).
References Cited (Backward Citations)
US3922707A
Cited
US3974443A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-08-30 | 1986-03-01 | 1986-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-08-30 | 1990-03-01 | 1990-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-08-30 | 1994-03-01 | 1994-08-31 | $7700.00 | Window Closed / Lapsed |