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US4367429A
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Alloys for liquid metal ion sources
Assignee: The AT&T MVPD Group LLC
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Filing: 1980-11-03
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Granted: 1983-01-04
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Expires: 2000-11-03
Abstract
Abstract Alloys suitable for use in liquid metal field ionization ion sources are provided. Such sources include an anode electrode for supporting an ion emitter comprising an alloy in the liquid state. The source further comprises means for generating an ionizing electric field and a reservoir for the liquid metal, ions of which are to be emitted by the source. The alloys are selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element, the balance at least one transition metal element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition metal, the balance at least one late transition metal, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element. Ions generated in liquid metal ion sources form a high brightness ion beam, which permits focusing a beam of emitted ions to a submicrometer spot. The ions may be used to alter material properties by ion implantation such as to dope semiconductors, to form ohmic contacts, to improve wear and corrosion resistance in metal surfaces and by sputter etching thin films such as metals, dielectrics and semiconductors.
Inventors
- 👤 Victor Wang
- 👤 Joseph A. Wysocki
- 👤 Gregory L. Tangonan
- 👤 Robert L. Seliger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 23:44
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/26; H01J37/00; H01J37/02; H01J37/04; H01J37/08; H01J2237/00; H01J2237/06; H01J2237/08; H01J2237/0802; H01J2237/0805
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
159 words
A liquid metal ion source comprising: (a) an anode electrode for supporting an ion emitter comprising an alloy in the liquid state and having a termination such that at least one cusp of liquid metal will form under the influence of an electric field; (b) means for generating an ionizing electric field; and (c) a reservoir for said liquid metal, ions of which are to be emitted by said source, characterized in that said alloy is one selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element the balance at least one transition element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition element, the balance at least one late transition element, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element.
Claim 2
Dependent Claim
159 words
A liquid metal ion source comprising: (a) an anode electrode for supporting an ion emitter comprising an alloy in the liquid state and having a termination such that at least one cusp of liquid metal will form under the influence of an electric field; (b) means for generating an ionizing electric field; and (c) a reservoir for said liquid metal, ions of which are to be emitted by said source, characterized in that said alloy is one selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element the balance at least one transition element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition element, the balance at least one late transition element, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element.
Claim 3
Dependent Claim
26 words
The liquid metal ion source of claim 1 in which said alloy has a vapor pressure less than about 10 -5 Torr at its melting point.
Claim 4
Dependent Claim
57 words
The liquid metal ion source of claim 1 in which said alloy consists essentially of a metal-metalloid alloy consisting essentially of about 10 to 30 atom percent of at least one metalloid element selected from the group consisting of aluminium, arsenic, boron, carbon, germanium, indium, phosphorus, silicon and tin and the balance at least one transition element.
Claim 5
Dependent Claim
58 words
The liquid metal ion source of claim 3 in which said alloy consists essentially of about 10 to 30 atom percent of at least one element selected from the group consisting of arsenic, boron, germanium and silicon and the balance at least one transition metal element selected from the group consisting of nickel, palladium, platinum, lanthanum and gold.
Claim 6
Dependent Claim
60 words
The liquid metal ion source of claim 4 in which said alloy is selected from the group consisting of Ni 40 Pd 40 B 20 , Pt 80 B 20 , Pt 72 As 28 , Ni 40 Pd 40 As 10 B 10 , La 80 C 20 , Au 82 Si 18 and Au 73 Ge 27 .
Claim 7
Dependent Claim
68 words
The liquid metal ion source of claim 1 in which said alloy consists essentially of an early transition-late transition alloy consisting essentially of about 30 to 85 atom percent of at least one early transition metal selected from the group consisting of zirconium, niobium, tantalum and titanium and the balance at least one late transition metal selected from the group consisting of iron, cobalt, nickel, copper and palladium.
Claim 8
Dependent Claim
58 words
The liquid metal ion source of claim 7 in which said alloy consists essentially of about 35 to 80 atom percent of at least one Group II metal selected from the group consisting of beryllium, calcium, magnesium and zinc and the balance at least one metal selected from other Group II metals, aluminum, titanium, zirconium, hafnium and gold.
Claim 9
Dependent Claim
18 words
The liquid metal ion source of claim 7 in which said alloy is Be 50 Au 50 .
Claim 10
Dependent Claim
119 words
A process for altering properties of materials by ion bombardment with selected ionic species which comprises exposing a material to an ion beam generated from a liquid metal ion source employing as the liquid metal an alloy selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element, the balance at least one transition element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition element, the balance at least one late transition element, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element.
Claim 11
Dependent Claim
119 words
A process for altering properties of materials by ion bombardment with selected ionic species which comprises exposing a material to an ion beam generated from a liquid metal ion source employing as the liquid metal an alloy selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element, the balance at least one transition element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition element, the balance at least one late transition element, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element.
Claim 12
Dependent Claim
23 words
The process of claim 9 in which said alloy has a vapor pressure less than about 10 -5 Torr at its melting point.
Claim 13
Dependent Claim
54 words
The process of claim 9 in which said alloy consists essentially of a metal-metalloid alloy consisting essentially of about 10 to 30 atom percent of at least one metalloid element selected from the group consisting of aluminium, arsenic, boron, carbon, germanium, indium, phosphorus, silicon and tin and the balance at least one transition element.
Claim 14
Dependent Claim
55 words
The process of claim 11 in which said alloy consists essentially of about 10 to 30 atom percent of at least one element selected from the group consisting of arsenic, boron, germanium and silicon and the balance at least one transition metal element selected from the group consisting of nickel, palladium, platinium, lanthanum and gold.
Claim 15
Dependent Claim
52 words
The process of claim 12 in which said alloy is selected from the group consisting of Ni 40 Pd 40 B 20 , Pt 72 As 28 , Ni 40 Pd 40 As 10 B 10 , La 80 C 20 , Au 82 Si 18 and Au 73 Ge 27 .
Claim 16
Dependent Claim
65 words
The process of claim 9 in which said alloy consists essentially of an early transition-late transition alloy consisting essentially of about 30 to 85 atom percent of at least one early transition metal selected from the group consisting of zirconium, niobium, tantalum and titanium and the balance at least one late transition metal selected from the group consisting of iron, cobalt, nickel, copper and palladium.
Claim 17
Dependent Claim
55 words
The process of claim 9 in which said alloy consists essentially of about 35 to 80 atom percent of at least one Group II metal selected from the group consisting of beryllium, calcium, magnesium and zinc and the balance at least one metal selected from other Group II metals, aluminum, titanium, zirconium, hafnium and gold.
Claim 18
Dependent Claim
15 words
The process of claim 15 in which said alloy is Be 50 Au 50 .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-01-03 | 1986-07-05 | 1987-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-01-03 | 1990-07-05 | 1991-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-01-03 | 1994-07-05 | 1995-01-04 | $7700.00 | Window Closed / Lapsed |