Patent US4389970A successfully refreshed from Google Patents.
US4389970A
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US
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Apparatus for regulating substrate temperature in a continuous plasma deposition process
Assignee: Atlantic Richfield Co
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Filing: 1981-03-16
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Granted: 1983-06-28
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Expires: 2001-03-16
Abstract
Abstract Apparatus for raising a continuous substrate to a predetermined deposition temperature and thereafter maintaining it at that temperature as it advances through a glow discharge chamber. A lamp holder having a plurality of heater lamps extends substantially the length of the chamber. The lamps are selectively spaced apart along the length of travel of said substrate to provide a desired heating profile. A detector is engaged to control circuitry for continuously adjusting the intensity of the lamps to regulate substrate temperature.
Inventors
- 👤 Robert F. Edgerton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:43
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C23C16/545; C23C16/48; C23C16/481; F; F26; F26B; F26B21/00; F26B21/40; F26B3/00; F26B3/28; F26B3/30; F27; F27B; F27B9/00; F27B9/14; F27B9/20; F27B9/26
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
154 words
Apparatus for heating a continuous substrate to a predetermined deposition temperature as it travels through at least one glow discharge chamber, said apparatus comprising: a heater, said heater including a plurality of heater lamps within said glow discharge chamber spaced along the direction of travel of said substrate, the spacing between adjacent lamps increasing along said direction of travel so that the temperature of said continuous substrate is rapidly heated to and maintained at said predetermined deposition temperature as it travels through said chamber; a detector for monitoring the temperature of said substrate, said detector including means responsive to infrared radiation of about 5 microns in wavelength; and a feedback control circuit coupled to said detector for adjusting the intensity of said lamps in response to the temperature of said substrate, said circuit being responsive to the output of said detector to produce a signal to control the intensity of each of said lamps.
Claim 2
Dependent Claim
154 words
Apparatus for heating a continuous substrate to a predetermined deposition temperature as it travels through at least one glow discharge chamber, said apparatus comprising: a heater, said heater including a plurality of heater lamps within said glow discharge chamber spaced along the direction of travel of said substrate, the spacing between adjacent lamps increasing along said direction of travel so that the temperature of said continuous substrate is rapidly heated to and maintained at said predetermined deposition temperature as it travels through said chamber; a detector for monitoring the temperature of said substrate, said detector including means responsive to infrared radiation of about 5 microns in wavelength; and a feedback control circuit coupled to said detector for adjusting the intensity of said lamps in response to the temperature of said substrate, said circuit being responsive to the output of said detector to produce a signal to control the intensity of each of said lamps.
Claim 3
Dependent Claim
13 words
Apparatus as defined in claim 1 wherein said detector is an optical pyrometer.
Claim 4
Dependent Claim
12 words
Apparatus as defined in claim 1 wherein said detector is a thermocouple.
Claim 5
Dependent Claim
24 words
Apparatus as defined in claim 1 further including a plurality of said glow discharge chambers interconnected with one another and said substrate traveling therethrough.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-06-27 | 1986-12-27 | 1987-06-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-06-27 | 1990-12-27 | 1991-06-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-06-27 | 1994-12-27 | 1995-06-28 | $7700.00 | Window Closed / Lapsed |