US4427713A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Planarization technique
Assignee: RCA Corp
•
Filing: 1983-01-17
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Granted: 1984-01-24
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Expires: 2003-01-17
Abstract
Abstract A method of planarizing a light sensitive coating on a substrate having topographical features is provided. The coating which comprises a novolak resin and a diazoquinone sensitizer is exposed to actinic radiation to react substantially all of the sensitizer and then heated by applying heat to the surface of the substrate opposite the coating.
Inventors
- 👤 Lawrence K. White
- 👤 Metodi Popov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/168; B; B05; B05D; B05D3/00; B05D3/02; B05D3/0209; B05D3/0254; B05D3/06; B05D3/061; B05D3/065
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
85 words
A method of planarizing a coating on a substrate having topographical features, said coating having a thickness at least equal to the highest step height on the substrate and including a novolak resin and a diazoquinone sensitizer, comprising exposing said coating to actinic radiation so as to react the sensitizer in at least the upper one-third of the coating and then heating said coating by applying heat to the substrate on the surface opposite to said coating, thereby heating said coating through from the substrate.
Claim 2
Independent Claim
85 words
A method of planarizing a coating on a substrate having topographical features, said coating having a thickness at least equal to the highest step height on the substrate and including a novolak resin and a diazoquinone sensitizer, comprising exposing said coating to actinic radiation so as to react the sensitizer in at least the upper one-third of the coating and then heating said coating by applying heat to the substrate on the surface opposite to said coating, thereby heating said coating through from the substrate.
Claim 3
Dependent Claim
25 words
A method in accordance with claim 1, wherein the coating is exposed to a sufficient dose of radiation to react substantially all of said sensitizer.
Claim 4
Dependent Claim
21 words
A method in accordance with claim 1, wherein said coating is exposed to ultraviolet light between about 300 and 450 nm.
Claim 5
Dependent Claim
20 words
A method in accordance with claim 1, wherein said coating is heated to from about 150° to about 210° C.
Claim 6
Dependent Claim
27 words
A method in accordance with claim 1, where said coating has a thickness at least about one and one-half times the highest step height on the substrate.
Claim 7
Dependent Claim
29 words
A method in accordance with claim 5, wherein said coating has a thickness from about one and one-half to about two times the highest step height on the substrate.
References Cited (Backward Citations)
US4315985A
Cited
US3873313A
Cited
US3971316A
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US3976524A
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US4015986A
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US4004044A
Cited
US4171979A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-23 | 1987-07-25 | 1988-01-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-23 | 1991-07-25 | 1992-01-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-23 | 1995-07-25 | 1996-01-24 | $7700.00 | Window Closed / Lapsed |