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US4493886A
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Composition and method for forming amorphous chalcogenide films from solution
Assignee: University Patents Inc
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Filing: 1984-03-27
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Granted: 1985-01-15
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Expires: 2004-03-27
Abstract
Abstract Amorphous chalcogenide films substantially free from particulate and microstructure are formed on a substrate from solution. The solution contains a glass-forming chalcogenide compound dissolved in a non-aqueous vaporizable solvent, such as a low molecular weight amine, and is substantially free from particulate or crystallizable material. Film formation is effected by coating the solution onto the substrate in a non-vacuumized environment, and thereafter evaporating the solvent from the coating. The procedure is particularly useful in forming amorphous chalcogenide resists for photolithographic applications.
Inventors
- 👤 Imants R. Lauks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0042; G03F7/0043; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/945
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
97 words
In a photolithographic process comprising the steps of forming a radiation-sensitive amorphous chalcogenide film on a substrate and employing said film as a resist in delineating a pattern on said substrate, the improvement wherein said film formation is effected by the steps comprising: (a) coating onto said substrate in a non-vacuumized environment a solution containing a glass-forming chalcogenide compound dissolved in a non-aqueous vaporizable solvent, said solution being substantially free from particulate or crystallizable material; and (b) evaporating the solvent from the coating so as to form an amorphous chalcogenide film substantially free from particulate and microstructure.
Claim 2
Dependent Claim
97 words
In a photolithographic process comprising the steps of forming a radiation-sensitive amorphous chalcogenide film on a substrate and employing said film as a resist in delineating a pattern on said substrate, the improvement wherein said film formation is effected by the steps comprising: (a) coating onto said substrate in a non-vacuumized environment a solution containing a glass-forming chalcogenide compound dissolved in a non-aqueous vaporizable solvent, said solution being substantially free from particulate or crystallizable material; and (b) evaporating the solvent from the coating so as to form an amorphous chalcogenide film substantially free from particulate and microstructure.
Claim 3
Dependent Claim
12 words
The process of claim 1, wherein said solvent is an organic solvent.
Claim 4
Dependent Claim
14 words
The process of claim 2, wherein said solvent is a low molecular weight amine.
Claim 5
Dependent Claim
18 words
The process of claim 3, wherein said solvent is a lower alkyl amine or a lower alkylene diamine.
Claim 6
Dependent Claim
34 words
The process of claim 1, wherein said chalcogenide compound is Se--Ge or As 2 Z 2+x , where Z is S, Se or Te, and x is an integer of from 0 to 3.
Claim 7
Dependent Claim
20 words
The process of claim 1, wherein said coating and evaporation steps are carried out in a non-oxidizing and non-hydrolyzing environment.
Claim 8
Dependent Claim
18 words
The process of claim 1, wherein said coating step is effected by means of a spin-on coating technique.
Claim 9
Dependent Claim
36 words
The process of claim 7, wherein a silver-containing overlayer capable of photodoping said amorphous chalcogenide film for enhancement of its resist properties is coated onto said amorphous chalcogenide film by means of a spin-on coating technique.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-01-15 | 1988-07-16 | 1989-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-01-15 | 1992-07-16 | 1993-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-01-15 | 1996-07-16 | 1997-01-15 | $7700.00 | Window Closed / Lapsed |