Patent US4521118A successfully refreshed from Google Patents.
US4521118A
Expired / Lapsed
US
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Method for detection of thermal waves with a laser probe
Assignee: Therma Wave Inc
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Filing: 1982-07-26
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Granted: 1985-06-04
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Expires: 2002-07-26
Abstract
Abstract A method for measuring thermal waves in a sample is disclosed. More particularly, thermal waves, which may be used for imaging, are generated in a sample through local periodic heating as, for example, by impinging an intensity modulated beam of energy on the surface of the sample. A laser probe is focused on a portion of the heated area on the surface of the sample in a manner such that the beam is reflected from the surface. The angular displacement of the reflected beam, resulting from the local angular change in surface conditions of the sample due to the thermal waves are monitored. By this arrangement, the displacement of the reflected beam can be used to detect the thermal waves.
Inventors
- 👤 Allan Rosencwaig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:19
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/171; G01N25/00
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
143 words
A method for detecting thermal waves in a sample, said thermal waves being generated in an area by a periodic localized heating at a spot on the surface of the sample, said thermal waves radiating outwardly from said spot, said method comprising the steps of: focusing a probe beam of energy within a preselected portion of said area on the surface of the sample which is being periodically heated by the thermal waves, in a manner such that said beam is reflected from said surface; and monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to detect the thermal waves.
Claim 2
Independent Claim
143 words
A method for detecting thermal waves in a sample, said thermal waves being generated in an area by a periodic localized heating at a spot on the surface of the sample, said thermal waves radiating outwardly from said spot, said method comprising the steps of: focusing a probe beam of energy within a preselected portion of said area on the surface of the sample which is being periodically heated by the thermal waves, in a manner such that said beam is reflected from said surface; and monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to detect the thermal waves.
Claim 3
Dependent Claim
25 words
A method as recited in claim 1 wherein said probe beam of energy is focused on one-half of the area which is being periodically heated.
Claim 4
Dependent Claim
30 words
The method as recited in claim 1 wherein said probe beam of energy which is reflected off said area on the surface of said sample is defined by electromagnetic radiation.
Claim 5
Dependent Claim
15 words
The method as recited in claim 3 wherein said electromagnetic radiation is defined by light.
Claim 6
Dependent Claim
18 words
The method as recited in claim 4 wherein said light is generated from a laser and is coherent.
Claim 7
Dependent Claim
32 words
The method as recited in claim 1 wherein said probe beam of energy which is reflected off said area on the surface of the sample is defined by a stream of particles.
Claim 8
Dependent Claim
15 words
The method as recited in claim 6 wherein the particles in said beam are electrons.
Claim 9
Dependent Claim
21 words
The method as recited in claim 1 wherein the angular displacement of the reflected beam is monitored utilizing a split detector.
Claim 10
Dependent Claim
21 words
The method as recited in claim 1 wherein the angular displacement of the reflected beam is monitored with a quadrant detector.
Claim 11
Independent Claim
148 words
An apparatus for detecting thermal waves in a sample, said thermal waves being generated in an area by a periodic localized heating at a spot on the surface of the sample, said thermal waves radiating outwardly from said spot, said apparatus comprising: a probe beam of energy; means for focusing said probe beam within a preselected portion of said area on the surface of the sample which is being periodically heated by the thermal waves in a manner such that said probe beam is reflected from the surface; and means for monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to detect the thermal waves.
Claim 12
Independent Claim
148 words
An apparatus for detecting thermal waves in a sample, said thermal waves being generated in an area by a periodic localized heating at a spot on the surface of the sample, said thermal waves radiating outwardly from said spot, said apparatus comprising: a probe beam of energy; means for focusing said probe beam within a preselected portion of said area on the surface of the sample which is being periodically heated by the thermal waves in a manner such that said probe beam is reflected from the surface; and means for monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to detect the thermal waves.
Claim 13
Dependent Claim
36 words
An apparatus as recited in claim 10 wherein said means for focusing said probe beam functions to focus said probe beam on only one-half the area on the surface of the sample which is periodically heated.
Claim 14
Independent Claim
141 words
A method for evaluating thermal features in a sample comprising: generating a periodic localized heating at a spot on the surface of the sample to produce thermal waves which radiate outwardly from said spot in an area on the sample surface; focusing a probe beam of energy within a preselected portion of said area on the surface of the sample which is being periodically heated by the thermal waves, in a manner such that said beam is reflected from said surface; and monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to evaluate thermal features in a sample.
Claim 15
Independent Claim
141 words
A method for evaluating thermal features in a sample comprising: generating a periodic localized heating at a spot on the surface of the sample to produce thermal waves which radiate outwardly from said spot in an area on the sample surface; focusing a probe beam of energy within a preselected portion of said area on the surface of the sample which is being periodically heated by the thermal waves, in a manner such that said beam is reflected from said surface; and monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to evaluate thermal features in a sample.
Claim 16
Dependent Claim
31 words
A method as recited in claim 12 wherein said probe beam of energy is focused on one-half of the area on the surface of the sample which is being periodically heated.
Claim 17
Independent Claim
151 words
An apparatus for evaluating thermal features in a sample comprising: means for generating a periodic localized heating at a spot on the surface of the sample to produce thermal waves which radiate outwardly form said spot in an area on the sample surface; a probe beam of energy; means for focusing said probe beam within a preselected portion of said area in the surface of the sample which is being periodically heated by the thermal waves in a manner such that said probe beam is reflected from the surface; means for monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to evaluate said thermal features in a sample.
Claim 18
Independent Claim
151 words
An apparatus for evaluating thermal features in a sample comprising: means for generating a periodic localized heating at a spot on the surface of the sample to produce thermal waves which radiate outwardly form said spot in an area on the sample surface; a probe beam of energy; means for focusing said probe beam within a preselected portion of said area in the surface of the sample which is being periodically heated by the thermal waves in a manner such that said probe beam is reflected from the surface; means for monitoring the periodic angular displacement of the reflected probe beam, said periodic displacement resulting from the periodic local angular change in the surface conditions of the sample induced by the presence of thermal waves generated by said periodic localized heating, whereby the periodic displacement of the reflected probe beam can be used to evaluate said thermal features in a sample.
Claim 19
Dependent Claim
36 words
An apparatus as recited in claim 14 wherein said means for focusing said probe beam functions to focus said probe beam on only one-half the area on the surface of the sample which is periodically heated.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-03 | 1988-12-03 | 1989-06-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-03 | 1992-12-03 | 1993-06-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-03 | 1996-12-03 | 1997-06-04 | $7700.00 | Window Closed / Lapsed |